Piezoelectric resonator unit and temperature control method therefor, and piezoelectric oscillator

Patent metadata

Field	Value
Publication number	US-10749467-B2
Application number	US-201815950499-A
Country	US
Kind code	B2
Filing date	Apr 11, 2018
Priority date	Oct 20, 2015
Publication date	Aug 18, 2020
Grant date	Aug 18, 2020

Abstract

A piezoelectric resonator unit includes a base member having a mounting surface. A piezoelectric resonator is mounted on the mounting surface and a lid member is bonded to the mounting surface such that the piezoelectric resonator is hermetically sealed in an inner space. A heat conductor is connected to a temperature sensor that detects a temperature of the piezoelectric resonator and is connected to a heating element that radiates heat onto the piezoelectric resonator. The heat conductor has a portion that is arranged in the inner space.

First claim

The invention claimed is:

1. A piezoelectric resonator unit, comprising:
a base having first and second opposed main surfaces;
a piezoelectric resonator mounted on the second main surface of the base;
a lid which is bonded to the base to form an inner space in which the piezoelectric resonator is hermetically sealed;
a temperature sensor located outside of the inner space;
a heating element located outside of the inner space; and
a heat conductor that extends through the base from the first main surface to the second main surface and provides a thermal connection between the inner space and both the temperature sensor and the heating element such that the heat conductor can apply heat to the inner space and the temperature sensor can sense the temperature of the inner space via the heat conductor, the heat conductor extending over a portion of the second main surface of the base which overlaps the piezoelectric resonator and not being electrically connected to the piezoelectric resonator.

2. The piezoelectric resonator unit according to claim 1 , wherein:
the piezoelectric resonator is mounted on the second main surface of the base member via an electrically conductive holding member; and
the heat conductor is not in physical contact with the electrically conductive holding member.

3. The piezoelectric resonator unit according to claim 2 , wherein the piezoelectric resonator is a crystal resonator.

4. The piezoelectric resonator unit according to claim 1 , wherein the piezoelectric resonator is a crystal resonator.

5. The piezoelectric resonator unit according to claim 4 , wherein the base and the lid are each composed of a crystal material.

6. The piezoelectric resonator unit according to claim 5 , wherein the piezoelectric resonator includes:
a crystal blank having a main surface;
an excitation electrode formed on the main surface of the crystal blank; and
a frame body that surrounds an outer periphery of the crystal blank and is connected to the crystal blank by a connection portion.

7. The piezoelectric resonator unit according to claim 6 , wherein the heat conductor includes a portion that is located on the connection portion in the inner space.

8. The piezoelectric resonator unit according to claim 6 , wherein the heat conductor includes a portion that is located on the crystal blank in the inner space.

9. The piezoelectric resonator unit according to claim 4 , wherein the crystal resonator includes:
a crystal blank having a main surface;
an excitation electrode formed on the main surface of the crystal blank; and
a frame body that surrounds an outer periphery of the crystal blank and is connected to the crystal blank by a connection portion.

10. The piezoelectric resonator unit according to claim 9 , wherein the heat conductor includes a portion that is located in on the frame body in the inner space.

11. The piezoelectric resonator unit according to claim 9 , wherein the heat conductor includes a portion that is located on the connection portion in the inner space.

12. The piezoelectric resonator unit according to claim 9 , wherein the heat conductor includes a portion that is located on the crystal blank in the inner space.

13. A method for controlling the temperature of the piezoelectric resonator unit according to claim 1 , the method comprising:
(a) detecting a temperature of the piezoelectric resonator via the heat conductor using the temperature sensor;
(b) determining an amount of heat to be supplied to the heat conductor by the heating element on the basis of the temperature detected in (a); and
(c) radiating heat onto the piezoelectric resonator via a portion of the heat conductor located in the inner space using the heating element on the basis of the amount of heat to be supplied determined in (b).

14. The piezoelectric resonator unit according to claim 1 , wherein:
the piezoelectric resonator includes an excitation electrode facing the second main surface of the base; and
the portion of the heat conductor located on the second main surface of the base overlaps the entire excitation electrode.

15. The piezoelectric resonator unit according to claim 1 , wherein the heat conductor is both thermally and electrically connected to the temperature sensor and the heating element.

16. A piezoelectric resonator unit, comprising:
a base having a mounting surface;
a piezoelectric resonator mounted on the mounting surface;
a lid which is bonded to the base such that the piezoelectric resonator is hermetically sealed in an inner space;
a temperature sensor located outside of the inner space;
a heating element located outside of the inner space; and
a heat conductor that extends from a position outside of the inner space to a position in the inner space to provide a thermal connection to both the temperature sensor and the heating element so that the heat conductor can apply heat to the inner space and the temperature sensor can sense the temperature of the inner space,
wherein:
the piezoelectric resonator is comprises a piezoelectric material; and
the lid and the base are formed of the piezoelectric material.

17. The piezoelectric resonator unit according to claim 16 , wherein the heat conductor is formed on either the lid member or the base member.

18. The piezoelectric resonator unit according to claim 17 , wherein the piezoelectric material is a crystal material.

19. The piezoelectric resonator unit according to claim 1 , wherein the piezoelectric resonator has a principal surface facing the second main surface of the base and the heat conductor includes a portion located between the principal surface of the piezoelectric resonator and the second surface of the base.

20. A piezoelectric resonator unit, comprising:
a base having a mounting surface;
a piezoelectric crystal resonator mounted on the mounting surface;
a lid which is bonded to the base such that the piezoelectric resonator is hermetically sealed in an inner space;
a heat conductor that extends from a position outside of the inner space to a position in the inner space to provide a thermal connection to a temperature sensor and a heating element so that when the temperature sensor and the heating element are connected to the heat conductor from a position outside of the inner space, the heat conductor can apply heat to the inner space and the temperature sensor can sense the temperature of the inner space; and wherein:
the base and the lid are each composed of a crystal material; and
the crystal resonator includes:
a crystal blank having a main surface of the crystal blank;
an excitation electrode formed on the main surface; and
a frame body that surrounds an outer periphery of the crystal blank and is connected to the crystal blank by a connection portion.

21. The piezoelectric resonator unit according to claim 20 , wherein the heat conductor includes a portion that is located on the frame body in the inner space.

22. The piezoelectric resonator unit according to claim 20 , wherein the heat conductor includes a portion that is located on the connection portion in the inner space.

23. The piezoelectric resonator unit according to claim 20 , wherein the heat conductor includes a portion located on the crystal blank in the inner space.

24. A piezoelectric resonator unit, comprising:
a base having a mounting surface;
a piezoelectric resonator mounted on the mounting surface;
a lid which is bonded to the base suc

Assignees

• Murata Manufacturing Co

Inventors

• Noto Kazuyuki

Classifications

• H03B5/32 Primary

  being a piezoelectric resonator (selection of piezoelectric material H10N30/00) · CPC title

• H03H9/0552

  the device and the other elements being mounted on opposite sides of a common substrate · CPC title

• H03H9/02102

  of temperature influence (cutting angles H03H9/02015) · CPC title

• H03H9/21

  Crystal tuning forks · CPC title

• H03H9/0509

  consisting of adhesive elements · CPC title