Inspection apparatus, and article manufacturing method
US-2017089840-A1 · Mar 30, 2017 · US
US10748020B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10748020-B2 |
| Application number | US-201916249913-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 17, 2019 |
| Priority date | Mar 13, 2018 |
| Publication date | Aug 18, 2020 |
| Grant date | Aug 18, 2020 |
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A controller includes a specifying part and a reception part. The specifying part specifies positions where the illumination units are connected. The reception part presents a lightable area and an unlightable area in different modes based on the positions where the illumination units are connected, the positions being specified by the specifying part. The reception part receives settings of the lighting conditions for the lightable area.
Opening claim text (preview).
What is claimed is: 1. A controller configured to perform a lighting control of an illumination unit detachably held according to a predetermined disposition rule in an illumination device for irradiating light on an object in image measurement which performs an appearance inspection of the object, comprising a processor configured to execute: a specifying part for specifying a position where the illumination unit is connected; a reception part for presenting a lightable area where the illumination unit is connected and an unlightable area where the illumination unit is not connected in different modes based on the position specified by the specifying part and also for receiving a setting of a lighting condition for the lightable area; a memory part for storing the lighting condition; and a comparison part which compares connection status of the illumination unit connected to the illumination device, the connection status being specified by the specifying part, with a connection of the illumination unit for satisfying the lighting condition stored in the memory part and also outputs a comparison result. 2. The controller according to claim 1 , wherein the reception part further presents one or more irradiation patterns that can be irradiated on the object based on the position specified by the specifying part and further receives designation of the irradiation patterns. 3. The controller according to claim 1 , wherein the illumination unit comprises: a first illumination unit whose dominant wavelength to be irradiated is a first wavelength; and a second illumination unit whose dominant wavelength to be irradiated is a second wavelength different from the first wavelength, the specifying part further specifies which illumination unit among the first illumination unit and the second illumination unit is connected to the illumination device, and the reception part further presents one or more irradiation patterns that can be irradiated on the object based on the position where the illumination unit is connected and based on a type of the connected illumination unit, the position and the type being specified by the specifying part, and further receives designation of the irradiation patterns. 4. The controller according to claim 1 , wherein the processor further configured to execute: a power supply part for supplying power to the illumination unit connected to the illumination device; and a determination part for determining excess or deficiency of the power supplied to the illumination unit connected to the illumination device and also for outputting a determination result. 5. The controller according to claim 2 , wherein the processor further configured to execute: a power supply part for supplying power to the illumination unit connected to the illumination device; and a determination part for determining excess or deficiency of the power supplied to the illumination unit connected to the illumination device and also for outputting a determination result. 6. The controller according to claim 3 , wherein the processor further configured to execute: a power supply part for supplying power to the illumination unit connected to the illumination device; and a determination part for determining excess or deficiency of the power supplied to the illumination unit connected to the illumination device and also for outputting a determination result. 7. An image processing system for performing image measurement based on an appearance image of an object, comprising: an imaging part for imaging the object; an illumination device for irradiating light on the object; illumination units having one or a plurality of light sources for irradiating light on the object; and a controller for controlling to irradiate light from the illumination device on the object by causing the one or the plurality of light sources included in each of the illumination units to emit light, wherein the illumination units are held by the illumination device according to a predetermined disposition rule, and the controller comprises a processor configured to execute: a specifying part for specifying positions where the illumination units are connected; a reception part for presenting a lightable area where the illumination units are connected and an unlightable area where the illumination units are not connected in different modes according to the positions specified by the specifying part and also for receiving settings of lighting conditions for the lightable area; a display part for displaying an image obtained by imaging by the imaging part under the lighting conditions received by the reception part; a memory part for storing the lighting condition; and a comparison part which compares connection status of the illumination unit connected to the illumination device, the connection status being specified by the specifying part, with a connection of the illumination unit for satisfying the lighting condition stored in the memory part and also outputs a comparison result.
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