Method of tuning parameter settings for performing acoustic scanning probe microscopy for subsurface imaging, scanning probe microscopy system, and computer program product

Patent metadata

Field	Value
Publication number	US-10746702-B2
Application number	US-201716093522-A
Country	US
Kind code	B2
Filing date	Apr 13, 2017
Priority date	Apr 14, 2016
Publication date	Aug 18, 2020
Grant date	Aug 18, 2020

Abstract

Method of tuning parameter settings for performing acoustic scanning probe microscopy for subsurface imaging, scanning probe microscopy system, and computer program product. This document relates to a method of tuning a scanning probe microscopy system. The method comprises: a) applying an acoustic vibration signal comprising a first frequency and a second frequency to a sample; b) at a first position of the probe tip, sweeping the first frequency across a first frequency range, and obtaining a first signal; c) at a second position of the probe tip, sweeping the first frequency across at least said first frequency range, and obtaining a second signal; d) analyzing the first and second signals to obtain a difference characteristic dependent on the first frequency. The first and second position are selected such that a subsurface structure of the sample at the first and second position is different.

First claim

The invention claimed is:

1. A method of operating a scanning probe microscopy system for performing acoustic scanning probe microscopy for subsurface imaging using the scanning probe microscopy system, wherein the scanning probe microscopy system for performing acoustic scanning probe microscopy comprises a sample carrier for supporting a sample, a probe with a probe tip, a transducer, a sensor for sensing probe tip vibrations, and a controller, wherein the system is configured for positioning the probe tip relative to the sample;
wherein the method of operating the scanning probe microscopy system comprises tuning parameter settings of the scanning probe microscopy system by:
a) applying, by the transducer to the sample, an acoustic vibration signal comprising a first frequency and a second frequency;
b) controlling, at a first position of the probe tip relative to the sample, the transducer to carry out a sweeping of the first frequency of the acoustic vibration signal across a first frequency range, and obtaining a first probe tip sensor signal using the sensor during the sweeping of the first frequency;
c) controlling, at a second position of the probe tip relative to the sample, the transducer to carry out a sweeping of the first frequency of the acoustic vibration signal across at least said first frequency range, and obtaining a second probe tip sensor signal using the sensor during the sweeping of the first frequency; and
d) analyzing, by the controller, the first probe tip sensor signal and the second probe tip sensor signal to obtain a difference characteristic dependent on the first frequency, and selecting a first frequency value for which the difference characteristic exceeds a threshold for tuning the first frequency;

wherein the first position and the second position of the probe tip are selected such that a subsurface structure of the sample at the second position differs from a subsurface structure of the sample at the first position.

2. The method according to claim 1 , wherein a setpoint setting of the system defines a force applied by the probe tip to a surface of the sample during sensing, wherein the method further comprises repeating b), c) and d) for a plurality of different setpoint settings, and
for said selecting, for the tuning, a setpoint setting and an associated first frequency value for which the difference characteristic exceeds a threshold.

3. The method according to claim 1 , further comprising:
e) controlling, at said first position, the transducer to carry out a sweeping of the second frequency of the acoustic vibration signal across a second frequency range, and obtaining a third probe tip sensor signal using the sensor during the sweeping of the second frequency;
f) controlling, at said second position, the transducer to carry out a sweeping of the second frequency of the acoustic vibration signal across at least said second frequency range, and obtaining a fourth probe tip sensor signal using the sensor during the sweeping of the second frequency; and
g) analyzing, by the controller, the third probe tip sensor signal and the fourth probe tip sensor signal to obtain a difference characteristic dependent on the second frequency, and selecting a second frequency value for which the difference characteristic exceeds a threshold for tuning the second frequency.

4. The method according to claim 1 , wherein b) and c) are performed by:
scanning the probe tip relative to the sample; and
controlling, at a plurality of relative positions between the probe tip and the sample during the scanning the probe tip relative to the sample, the transducer to carry out a sweeping of the first frequency of the acoustic vibration signal across the first frequency range, and obtaining a probe tip sensor signal for each of the plurality of relative positions using the sensor during the sweeping of the first frequency;
further comprising identifying from the plurality of relative positions or the associated probe tip sensor signals, a first group of positions and a second group of positions such that the subsurface structure of the sample at the second group of positions is different from the subsurface structure of the sample at the first group of positions; and
wherein d) is performed by analyzing, by the controller, the sensor signals associated with the first group of positions in relation to the sensor signals associated with the second group of positions to obtain the difference characteristic dependent on the first frequency, and selecting the first frequency value for which the difference characteristic exceeds the threshold for tuning of the first frequency.

5. The method according to claim 3 , wherein e) and f) are performed by:
controlling, at said plurality of relative positions between the probe tip and the sample during said scanning, the transducer to carry out a sweeping of the second frequency of the acoustic vibration signal across the second frequency range, and obtaining a further probe tip sensor signal for each of the plurality of relative positions using the sensor during the sweeping of the second frequency; and
wherein g) is performed by analyzing, by the controller, the sensor signals associated with the first group of positions in relation to the sensor signals associated with the second group of positions to obtain the difference characteristic dependent on the second frequency, and selecting the second frequency value for which the difference characteristic exceeds the threshold for tuning of the second frequency.

6. The method according to claim 5 , wherein the sweeping of the second frequency at the plurality of relative positions between the probe tip and the sample, and obtaining the further probe tip sensor signal for each position is performed during a further scanning of the probe tip relative to the sample.

7. The method according to claim 4 , wherein at least one of the scanning or the further scanning is performed by scanning in a first direction and scanning in a second direction, the second direction being a counter direction of the first direction.

8. The method according to claim 3 , wherein the at least one difference characteristic obtained in either one or both d) and g) includes at least one element or a combination of elements of the group consisting of:
an amplitude difference between the first and second sensor signals,
a phase difference between the first and second sensor signals,
a Weber contrast value of the amplitude difference between the first and second sensor signal, and
a value of the phase difference between the first and second sensor signal.

9. The method according to claim 1 , wherein the first frequency range comprises frequencies between 10 Hz and 10 GHz.

10. Method according to any of the preceding claims, wherein the second frequency range comprises frequencies between 0 MHz and 300 MHz, preferably 1 MHz to 200 MHz, more preferably 2 MHz to 150 MHz.

11. The method of operating the scanning probe microscopy system of claim 1 , wherein the method further comprises performing an acoustic scanning probe microscopy for subsurface imaging by:
scanning the probe tip relative to the sample;
applying, by the transducer to the sample, an acoustic vibration signal comprising a first frequency and a second frequency; and
obtaining a responsive probe tip sensor signal using the sensor for providing an output signal for said subsurface imaging of the sample.

12. A scanning probe microscopy system configured for operation, including performing an automatic tuning of parameter settings of scanning probe microscopy system for acoustic scanning probe microscopy for subsurface imaging, wherein t

Assignees

• Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno

Inventors

• Sadeghian Marnani Hamed
• Meijer Timmerman Thijssen Rutger
• Van Es Maarten Hubertus

Classifications

• G01N29/22

  Details {, e.g. general constructional or apparatus details} · CPC title

• G01Q60/32 Primary

  AC mode · CPC title

• G01Q30/04

  Display or data processing devices · CPC title

• G01N29/0681 Primary

  by acoustic microscopy, e.g. scanning acoustic microscopy · CPC title

• G01N29/2418

  using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics (photoacoustic cells G01N21/1702; measuring characteristics of vibrations by using radiation-sensitive means G01H9/00; acousto-optical conversion techniques for short-range imaging G01S15/8965; sound-producing devices using laser bundle G10K15/046) · CPC title