Image processing device, analysis device, and image processing method for generating an X-ray spectrum

Patent metadata

Field	Value
Publication number	US-10746675-B2
Application number	US-201816048540-A
Country	US
Kind code	B2
Filing date	Jul 30, 2018
Priority date	Jul 31, 2017
Publication date	Aug 18, 2020
Grant date	Aug 18, 2020

Abstract

An image processing device includes a spectrum acquisition unit that acquires a plurality of spectra that respectively have different measurement energy ranges and energy resolutions and are acquired using an X-ray spectrometer having a plurality of dispersion elements with different spectral characteristics, a graph generation unit that sets the plurality of spectra on a single graph having an axis of an a th root of the energy (where a≥2) as a first axis, and an axis based on an X-ray intensity as a second axis, and a display control unit that executes control to display the graph generated by the graph generation unit on a display unit.

First claim

What is claimed is:

1. An image processing device, comprising:
a spectrum acquisition processor configured to acquire a plurality of spectra that respectively have different measurement energy ranges and energy resolutions and are acquired using an X-ray spectrometer having a plurality of dispersion elements with different spectral characteristics;
a graph generation processor configured to set the plurality of spectra on a single graph having an axis of an a th root of the energy (where a≥2) as a first axis, and an axis based on an X-ray intensity as a second axis; and
a display control processor configured to execute control to display the graph generated by the graph generation processor on a display unit,
wherein:
when I is the X-ray intensity, A is a sensitivity coefficient of the dispersion element, and L is an L value representing a distance between an X-ray generation source and the dispersion element, the graph generation processor sets an axis of (I×A×L) 1/b (where b≥2) as the second axis; or
when I is the X-ray intensity, A is a sensitivity coefficient of the dispersion element, and θ is a Bragg angle, the graph generation processor sets an axis of (I×A×sin θ) 1/b (where b≥2) as the second axis.

2. The image processing device according to claim 1 ,
wherein the graph generation processor is configured to generate the graph by disposing each of the plurality of spectra on a single energy axis and converting the energy axis into an axis of the a th root of the energy.

3. The image processing device according to claim 1 ,
wherein the graph generation processor is configured to set an axis of a ratio of the X-ray intensity relative to the X-ray intensity of a standard specimen as the second axis.

4. An analysis device comprising the image processing device according to claim 1 .

5. An image processing device, comprising:
a spectrum acquisition processor configured to acquire a spectrum that is obtained by an X-ray spectrometer by detecting a characteristic X-ray generated from a specimen;
a graph generation processor configured to set the spectrum on a graph having an axis of an a th root of the energy (where a≥2) as a first axis, and an axis based on an X-ray intensity as a second axis; and
a display control processor configured to execute control to display the graph generated by the graph generation processor on a display unit,
wherein:
when I is the X-ray intensity, A is a sensitivity coefficient of the dispersion element, and L is an L value representing a distance between an X-ray generation source and the dispersion element, the graph generation processor sets an axis of (I×A×L) 1/b (where b≥2) as the second axis; or
when I is the X-ray intensity, A is a sensitivity coefficient of the dispersion element, and θ is a Bragg angle, the graph generation processor sets an axis of (I×A×sin θ) 1/b (where b≥2) as the second axis.

6. An image processing method, comprising:
acquiring a plurality of spectra that respectively have different measurement energy ranges and energy resolutions and are acquired using an X-ray spectrometer having a plurality of dispersion elements with different spectral characteristics;
setting the plurality of spectra on a single graph having an axis of an a th root of the energy (where a≥2) as a first axis, and an axis based on an X-ray intensity as a second axis; and
displaying the graph on a display unit,
wherein:
when I is the X-ray intensity, A is a sensitivity coefficient of the dispersion element, and L is an L value representing a distance between an X-ray generation source and the dispersion element, an axis of (I×A×L) 1/b (where b≥2) is set as the second axis; or
when I is the X-ray intensity, A is a sensitivity coefficient of the dispersion element, and θ is a Bragg angle, an axis of (I×A×sin θ) 1/b (where b≥2) is set as the second axis.

Assignees

• Jeol Ltd

Inventors

• Mori Norihisa
• Katoh Naoki
• Morita Masaki

Classifications

• G06T11/26

  Drawing of charts or graphs · CPC title

• G01N23/2252

  Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA] · CPC title

• G01N23/2209 Primary

  using wavelength dispersive spectroscopy [WDS] · CPC title

• G06T11/206

  Physics · mapped topic