Polishing pad with secondary window seal

Patent metadata

Field	Value
Publication number	US-10744618-B2
Application number	US-201715676882-A
Country	US
Kind code	B2
Filing date	Aug 14, 2017
Priority date	Mar 15, 2013
Publication date	Aug 18, 2020
Grant date	Aug 18, 2020

Abstract

A polishing article has a polishing surface and an aperture, the aperture including a first section and a second section. The polishing article includes a projection extending inwardly into the aperture. The polishing article includes a lower portion on a side of the first surface farther from the polishing surface. A window has a first portion positioned in the first section of the aperture and a second portion extending into the second section of the aperture. The window has a second surface substantially parallel to the polishing surface. A first adhesive adheres the first surface of the projection to the second surface of the window to secure the window to the projection and a second adhesive of different material composition than the first adhesive. The second adhesive is positioned laterally between the second portion of the window and the lower portion of the polishing article.

First claim

What is claimed is:

1. A polishing pad for a chemical mechanical polishing apparatus, comprising:
a polishing article having a polishing surface and an aperture formed through the polishing article, the aperture including a first section adjacent the polishing surface and a second section adjacent the first section, wherein the first section has a smaller lateral dimension than the second section such that a portion of the polishing article provides a projection having a lower surface and extending over the second section of the aperture;
a window having a first portion positioned in the first section of the aperture and a second portion extending into the second section of the aperture, the second portion of the window having an upper surface;
a first adhesive adhering the lower surface of the projection to the upper surface of the second portion of the window to secure the window to the projection; and
a second adhesive of different material composition than the first adhesive, the second adhesive positioned laterally between the first adhesive and a side-wall of the second section of the aperture.

2. The polishing pad of claim 1 , wherein the lower surface of the projection is substantially parallel to the polishing surface and the upper surface of the second portion of the window is substantially parallel to the polishing surface.

3. The polishing pad of claim 1 , wherein the polishing article comprises a polishing layer having the polishing surface and a backing layer, and wherein the second section of the window is formed through the backing layer.

4. The polishing pad of claim 3 , comprising a third layer of different composition than the second adhesive adhering the polishing layer to the backing layer.

5. The polishing pad of claim 4 , wherein the third adhesive comprises a pressure-sensitive adhesive.

6. The polishing pad of claim 5 , wherein the second adhesive comprises a UV-curable adhesive.

7. The polishing pad of claim 1 , wherein the second adhesive has greater adhesion to the window than the first adhesive.

8. The polishing pad of claim 7 , wherein the second adhesive comprises a UV-curable adhesive.

9. The polishing pad of claim 8 , wherein the first adhesive comprises a pressure-sensitive adhesive.

10. The polishing pad of claim 1 , comprising a recess formed in the second section of the window.

11. A polishing pad for a chemical mechanical polishing apparatus, comprising:
a polishing article having a polishing surface and an aperture formed through the polishing article, the aperture including a first section adjacent the polishing surface and a second section adjacent the first section, wherein the first section has a larger lateral dimension than the second section such that a portion of the polishing article provides a projection having an upper surface and extending under the first section of the aperture;
a window having a first portion positioned in the first section of the aperture and a second portion extending into the second section of the aperture, the first portion of the window having a lower surface;
a first adhesive adhering the upper surface of the projection to the lower surface of the first portion of the window to secure the window to the projection; and
a second adhesive of different material composition than the first adhesive, the second adhesive positioned laterally between the first adhesive and the second portion of the window.

12. The polishing pad of claim 11 , wherein the upper surface of the projection is substantially parallel to the polishing surface and the lower surface of the second portion of the window is substantially parallel to the polishing surface.

13. The polishing pad of claim 11 , wherein the polishing article comprises a polishing layer having the polishing surface and a backing layer, and wherein the second section of the window is formed through the backing layer.

14. The polishing pad of claim 13 , comprising a third adhesive of different composition than the second adhesive adhering the polishing layer to the backing layer.

15. The polishing pad of claim 14 , wherein the third adhesive comprises a pressure-sensitive adhesive.

16. The polishing pad of claim 15 , wherein the second adhesive comprises a UV-curable adhesive.

17. The polishing pad of claim 11 , wherein the second adhesive has greater adhesion to the window than the first adhesive.

18. The polishing pad of claim 17 , wherein the second adhesive comprises a UV-curable adhesive.

19. The polishing pad of claim 18 , wherein the first adhesive comprises a pressure-sensitive adhesive.

20. The polishing pad of claim 11 , comprising a recess formed in the second portion of the window.

Assignees

• Applied Materials Inc

Inventors

• Alagarsamy Rajkumar
• Hu Yongqi
• Yavelberg Simon
• Gopalan Periya
• Mahon Christopher R

Classifications

• B24B37/205 Primary

  provided with a window for inspecting the surface of the work being lapped · CPC title

• B24B37/22

  characterised by a multi-layered structure · CPC title

• B24B49/12

  involving optical means · CPC title

• B24B37/20

  Lapping pads for working plane surfaces · CPC title