Pressure sensors with tensioned membranes

Patent metadata

Field	Value
Publication number	US-10739218-B2
Application number	US-201715485190-A
Country	US
Kind code	B2
Filing date	Apr 11, 2017
Priority date	Apr 11, 2016
Publication date	Aug 11, 2020
Grant date	Aug 11, 2020

Abstract

Pressure sensors having ring-tensioned membranes are disclosed. A tensioning ring is bonded to a membrane in a manner that results in the tensioning ring applying a tensile force to the membrane, flattening the membrane and reducing or eliminating defects that may have occurred during production. The membrane is bonded to the sensor housing at a point outside the tensioning ring, preventing the process of bonding the membrane to the housing from introducing defects into the tensioned portion of the membrane. A dielectric may be introduced into the gap between the membrane and the counter electrode in a capacitive pressure sensor, resulting in an improved dynamic range.

First claim

What is claimed is:

1. A pressure sensor comprising: a membrane, the membrane comprising an electrode; a counter electrode positioned parallel to the membrane; a spacer between the membrane and the counter electrode, the spacer having a first thickness between the membrane and the counter electrode; a dielectric between the membrane and the counter electrode, the dielectric having a second thickness less than the first thickness of the spacer; a sensor circuit configured to evaluate a capacitance between the electrode and the counter electrode; and a tensioning ring to apply a tensile force to the membrane; wherein the membrane has a non-tensioned region; the non-tensioned region is an area of the membrane outside the tensioning ring and the non-tensioned region of the membrane is bonded to a housing.

2. The pressure sensor of claim 1 , wherein
the membrane is configured to not be in contact with the dielectric when under pressures in a first pressure range, and
the membrane is configured to be in contact with the dielectric when under pressures in a second pressure range.

3. The pressure sensor of claim 2 , wherein the sensor circuit is configured to measure the capacitance over the first pressure range and the second pressure range.

4. The pressure sensor of claim 1 , wherein the pressure sensor has a first dynamic range when the membrane does not contact the dielectric, and a second dynamic range when the membrane does contact the dielectric.

5. The pressure sensor of claim 1 , wherein the membrane is configured to come in contact with the dielectric at pressures within an operating pressure range of the pressure sensor.

6. The pressure sensor of claim 1 , wherein the membrane is configured to contact the dielectric and wherein the sensor circuit generates a pressure signal based on an amount of a surface area of the membrane in contact with the dielectric.

7. The pressure sensor of claim 1 , wherein the membrane has a first coefficient of thermal expansion, the tensioning ring has a second coefficient of thermal expansion lower than the first coefficient of thermal expansion, the membrane and the tensioning ring are configured to be bonded together when heated to above an operating temperature range while the membrane experiences greater expansion than the tensioning ring and the tensioning ring applies the tensile force to the membrane at the operating temperature range.

8. A pressure sensor comprising:
a membrane, the membrane comprising an electrode;
a counter electrode positioned parallel to the membrane;
a spacer between the membrane and the counter electrode, the spacer having a first thickness between the membrane and the counter electrode;
a dielectric between the membrane and the counter electrode, the dielectric having a second thickness less than the first thickness of the spacer;
a tensioning ring to apply a tensile force to the membrane; and
a sensor circuit configured to evaluate a capacitance between the electrode and the counter electrode,
wherein the membrane has a tensioned region and a non-tensioned region,
the tensioned region of the membrane is an area of the membrane inside the tensioning ring,
the non-tensioned region of the membrane is an area of the membrane outside the tensioning ring, and
the non-tensioned region of the membrane is bonded to a housing.

9. The pressure sensor of claim 8 , wherein
the membrane is configured to not be in contact with the dielectric when under pressures in a first pressure range, and
the membrane is configured to be in contact with the dielectric when under pressures in a second pressure range.

10. The pressure sensor of claim 9 , wherein the sensor circuit is configured to measure the capacitance over the first pressure range and the second pressure range.

11. The pressure sensor of claim 8 , wherein the pressure sensor has a first dynamic range when the membrane does not contact the dielectric, and a second dynamic range when the membrane does contact the dielectric.

12. The pressure sensor of claim 8 , wherein the membrane is configured to come in contact with the dielectric at pressures within an operating pressure range of the pressure sensor.

13. The pressure sensor of claim 8 , wherein the membrane is configured to contact the dielectric and wherein the sensor circuit generates a pressure signal based on an amount of a surface area of the membrane in contact with the dielectric.

Assignees

• The Alfred E Mann Foundation For Scient Research

Inventors

• Schmidt Siegmar
• Dai William A
• NG Boon Khai

Classifications

• G01L9/0047 Primary

  Diaphragm with non uniform thickness, e.g. with grooves, bosses or continuously varying thickness · CPC title

• G01L9/0075 Primary

  using a ceramic diaphragm, e.g. alumina, fused quartz, glass · CPC title

• G01L9/0073

  using a semiconductive diaphragm · CPC title

• G01L19/14

  Housings {(G01L19/0007, G01L19/0084, G01L19/0092, G01L19/04, G01L19/06 take precedence)} · CPC title

• G01L19/0618

  Overload protection · CPC title