Vacuum valve

Patent metadata

Field	Value
Publication number	US-10738895-B2
Application number	US-201615747271-A
Country	US
Kind code	B2
Filing date	Jul 25, 2016
Priority date	Aug 28, 2015
Publication date	Aug 11, 2020
Grant date	Aug 11, 2020

Abstract

Vacuum valve having a valve housing with first and second valve openings, and a closure unit having first and second plates, a roller support arranged between the plates, multiple roller pairs, each formed from first and second spreading rollers, and a spring. The plates are carried together with the roller support when it moves parallel to a movement direction from the open position into an intermediate position, and an additional movement of the plates in the movement direction is blocked when the roller support moves from the intermediate position into a closed position, during which the spreading rollers move along rising flanks of recesses, and the plates are thus spread apart. Rotational axes of the spreading rollers of each roller pair are offset relative to each other and are spaced apart in the spreading direction by a distance smaller than a sum of the radiuses of the spreading rollers.

First claim

The invention claimed is:

1. A vacuum valve comprising:
a valve housing with an interior and first and second valve openings which are surrounded by first and second seat surfaces, and
a closure unit arranged in the interior of the valve housing, said closure unit having a first plate, a second plate, a roller carrier arranged between the first plate and the second plate, a plurality of roller pairs which are each formed by a first spreading roller and a second spreading roller which are mounted on the roller carrier so as to be rotatable about respective axes of rotation, and at least one spring by which the first and second plates are pulled against the spreading rollers, which bear against mutually facing surfaces of the first and second plates,
the roller carrier is displaceable, parallel to a displacement direction, from an open position, in which the vacuum valve is open and the first and second valve openings are cleared, via an intermediate position, in which the first and second plates are located between the first and second valve openings but are spaced apart from the first and second seat surfaces, into a closed position, in which the vacuum valve is closed, and during the displacement of the roller carrier from the open position into the intermediate position, the first and second plates are carried along by the roller carrier, and during the displacement of the roller carrier from the intermediate position into the closed position, any further displacement of the first and second plates in the displacement direction is blocked,
in the open position and intermediate position of the roller carrier, the first spreading roller of each said roller pair bears against the surface of the first plate in a region of a respective recess in the surface of the first plate, and the second spreading roller of each said roller pair bears against the surface of the second plate in a region of a respective recess in the surface of the second plate, and during the displacement of the roller carrier from the intermediate position into the closed position, the first and second spreading rollers are displaced along rising flanks of the recesses and in the process spread apart the first and second plates parallel to a spreading direction, and
the axes of rotation of the first and second spreading rollers of each said roller pair are offset from one another with regard to the displacement direction and are at a spacing (b), with regard to the spreading direction, which is less than a sum of a radius of the first spreading roller and a radius of the second spreading roller.

2. The vacuum valve as claimed in claim 1 , wherein the radius of the first spreading roller is equal to the radius of the second spreading roller of each said roller pair.

3. The vacuum valve as claimed in claim 1 , wherein the spreading rollers are mounted so as to be rotatable about axes of rotation thereof by rolling bearings.

4. The vacuum valve as claimed in claim 1 , wherein the roller carrier is configured in a plate-like manner.

5. The vacuum valve as claimed in claim 4 , wherein the spreading rollers of each said roller pair are arranged in respective common window openings in the roller carrier.

6. The vacuum valve as claimed in claim 5 , wherein the axis of rotation of each said spreading roller is formed by an axle pin that bridges the window opening and is secured to the roller carrier.

7. The vacuum valve as claimed in claim 6 , wherein each said axle pin passes through abutment tabs arranged on both sides of each said spreading roller.

8. The vacuum valve as claimed in claim 7 , further comprising, for both said spreading rollers of each said roller pair, a common abutment tab is provided on each of two opposite sides of the spreading rollers, said abutment tab being passed through by the axle pins of both said spreading rollers.

9. The vacuum valve as claimed in claim 1 , further comprising a guide device for guiding the first and second plates in a displaceable manner in the displacement direction with respect to the roller carrier.

10. The vacuum valve as claimed in claim 1 , wherein the axes of rotation of the first and second spreading rollers of each said roller pair are at a spacing (b), with regard to the spreading direction, which is less than half the sum of the radius of the first spreading roller and the radius of the second spreading roller.

Assignees

• Vat Holding Ag

Inventors

• Ehrne Florian
• Netzer Martin

Classifications

• F16K51/02

  specially adapted for high-vacuum installations · CPC title

• F16K27/04

  of sliding valves · CPC title

• F16K3/18 Primary

  by movement of the closure members · CPC title

• F16K3/314

  Forms or constructions of slides; Attachment of the slide to the spindle · CPC title

• F16K3/0281

  Guillotine or blade-type valves, e.g. no passage through the valve member · CPC title