Wafer container with external passive getter module

Patent metadata

Field	Value
Publication number	US-10734264-B2
Application number	US-201615573311-A
Country	US
Kind code	B2
Filing date	May 12, 2016
Priority date	May 12, 2015
Publication date	Aug 4, 2020
Grant date	Aug 4, 2020

Abstract

A semiconductor wafer container assembly includes a container defining an exterior and defining an interior having a wafer storage area adapted to support one or more semiconductor wafers. The container also defines an opening in the container between the exterior and the interior. The container has a door and a latching mechanism to sealingly secure the door closed, and the door is openable for access to the wafer storage area. A passive getter module is removably secured with respect to the exterior of the container by substantially rigid connection structure that is a part of or extends from substantially rigid getter module housing. Getter material is disposed within the housing to decrease concentration of contaminants within the wafer storage area of the container via the access opening and the opening in the container.

First claim

What is claimed is:

1. A substrate container assembly, comprising:
a container, the container defining an exterior and defining an interior having a substrate storage area adapted to support one or more substrates, the container also defining an opening in the container between the exterior and the interior; the container having a door and a latching mechanism to sealingly secure the door closed, the door being openable for access to the substrate storage area, the door defining an interior side facing the interior of the container; and
a getter module mounted to the container, the getter module comprising:
a substantially rigid housing with an access opening;
a getter material disposed within the substantially rigid housing, the getter material arranged to passively decrease concentration of contaminants within the substrate storage area of the container via the access opening and the opening in the container, free of any active purge flow through the getter module; and
a filter positioned at the access opening, the filter including a filter housing containing a filter material, the housing defining windows therein.

2. The substrate container assembly of claim 1 , further comprising a connection structure, the connection structure adapted to removably and sealingly secure the getter module with respect to the exterior of the container and to connect the access opening in the getter module housing to the opening in the container, whereby the getter material is positioned exterior the container and is communicable outside the module housing with the interior of the container.

3. The container assembly of claim 1 , wherein the getter module comprises a base, getter material supported by the base, a cover to close the base, and a seal disposed between the cover and the base.

4. The container assembly of claim 1 , wherein the getter material is disposed in or formed as a readily removable and replaceable getter cartridge.

5. The container assembly of claim 1 , wherein the getter module comprises a slidable tray, the slidable tray being adapted to slide into and out of the housing for access to and replacement of the getter material.

6. The container assembly of claim 1 , wherein the getter material comprises any one of a desiccant, a physiosoptive media, a chemisorptive media, a particulate filter media, and combinations thereof.

7. The container assembly of claim 2 , wherein the container exterior is substantially curved and the getter module is substantially flat, the opening in the container being substantially tapered in cross section to sealingly accommodate the connection structure of the container.

8. A getter cartridge, comprising:
a substantially rigid housing defining at least one access opening;
a getter material supported within the housing;
a filter disposed in the substantially rigid housing and positioned at the at least one passageway, the filter including a filter housing containing a filter material, the housing defining windows therein; and
a connection structure adapted to secure the getter cartridge to the exterior surface of a back wall of a substrate container, such that getter material supported within the housing and the filter is exposed to an interior of the substrate container.

9. The getter cartridge of claim 8 , wherein the connection structure defines the at least one passageway and is adapted for sealing to an opening in the substrate container to provide fluid communication between the interior of the substrate container and the getter material in the cartridge.

10. The getter cartridge of claim 8 , wherein the connection structure further comprises a mounting tab adapted for securement to the structure on the exterior of the front opening wafer container.

Assignees

• Entegris Inc

Inventors

• King Jeffrey J
• Fuller Matthew A
• Burns John
• Forbes Martin

Classifications

• H10W42/00

  Arrangements for protection of devices (arrangements for thermal protection H10W40/00) · CPC title

• H10P72/1926 Primary

  characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier · CPC title

• H10P72/1916

  characterised by sealing arrangements · CPC title

• H10P72/14

  Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls · CPC title

• H10P72/1922 Primary

  characterised by the construction of the closed carrier · CPC title