Stirring device for treatment of photoresist settlement and photoresist tank

Patent metadata

Field	Value
Publication number	US-10730025-B2
Application number	US-201715539732-A
Country	US
Kind code	B2
Filing date	Apr 12, 2017
Priority date	Mar 24, 2017
Publication date	Aug 4, 2020
Grant date	Aug 4, 2020

Abstract

Involved is the technical field of a stirring device, specifically a stirring device for treatment of photoresist settlement and a photoresist tank. The stirring device includes a sleeve shaft, an inner telescopic shaft, a stirring component, and a rotary rod, wherein, the rotary rod is mounted on an upper end of the sleeve shaft for driving the sleeve shaft to rotate; the stirring component is arranged on a lower end of the sleeve shaft and rotates with the sleeve shaft; and the inner telescopic shaft is arranged inside of the sleeve shaft and connected to the stirring component for controlling opening and closing of the stirring component. Stirring plates approach a bottom portion of the photoresist tank, at which moment manual control is adopted to control stirring of the stirring device upward from the bottom gradually, so as to achieve the objective of homogeneous component of the photoresist. The photoresist is stirred to be more homogeneous. A lot of manpower and material resources are saved. The stirring device enables high stirring speed and high safeness.

First claim

The invention claimed is:

1. A stirring device, comprising:
a sleeve shaft ( 13 ), an inner telescopic shaft ( 12 ), a stirring component, and a rotary rod ( 11 ),
wherein the rotary rod ( 11 ) is mounted on an upper end of the sleeve shaft ( 13 ) for driving the sleeve shaft ( 13 ) to rotate;
wherein the stirring component is mounted on a lower end of the sleeve shaft ( 13 ) and rotates with the sleeve shaft ( 13 ); and
wherein the inner telescopic shaft ( 12 ) is mounted inside of the sleeve shaft ( 13 ) and connected to the stirring component for controlling opening and closing of the stirring component;
wherein the stirring component comprises two stirring plates, a sum of width of the two stirring plates ( 16 ) and a diameter of the inner telescopic shaft ( 12 ) is smaller than a diameter of the sleeve shaft ( 13 ), the two stirring plates ( 16 ) and the inner telescopic shaft ( 12 ) are received in the sleeve shaft ( 13 ) when folded to fit to the inner telescopic shaft ( 12 ) such that the inner telescopic shaft ( 12 ) has a capability to be pulled out directly together with the stirring plates ( 16 ) from the sleeve shaft ( 13 ).

2. The stirring device according to claim 1 , wherein the two stirring plates ( 16 ) which have a same structure and are symmetrically arranged,
wherein the stirring plate ( 16 ) has one end in a semicircle shape and another end in a vertical shape; and
wherein a groove ( 161 ) is provided on a side of an upper portion of the stirring plate ( 16 ), and is connected to the semicircle shape.

3. The stirring device according to claim 2 , wherein the two stirring plates ( 16 ) show a horizontal straight line when they are pushed open.

4. The stirring device according to claim 1 , wherein the sleeve shaft ( 13 ) is hollow cylindrical.

5. The stirring device according to claim 1 , wherein openings are provided on two sides of a lower portion of the sleeve shaft ( 13 ) for the stirring component to be opened and closed, and torque transmission is formed between the stirring component and the openings during rotation.

6. The stirring device according to claim 5 , wherein a movable coupling ( 14 ) is mounted to a lower end of the inner telescopic shaft ( 12 ); and
wherein two connecting plates ( 15 ) are mounted in the openings, upper ends of the two connecting plates ( 15 ) being connected to the movable coupling ( 14 ) respectively, and lower ends of the two connecting plates ( 15 ) being connected to the stirring component respectively.

7. The stirring device according to claim 6 , wherein the two connecting plates ( 15 ) are arranged in an inclined way.

8. The stirring device according to claim 6 , wherein when the two stirring plates ( 16 ) are folded, the two stirring plates ( 16 ) and the two connecting plates ( 15 ) are arranged side-by-side along a direction perpendicular to a length direction of the two stirring plates ( 16 ), one stirring plate ( 16 ) is located at a first side of the two connecting plates ( 15 ), the other stirring plate ( 16 ) is located at a second side of the two connecting plates ( 15 ) opposite to the first side.

9. The stirring device according to claim 1 , wherein height of the sleeve shaft ( 13 ) is smaller than that of the inner telescopic shaft ( 12 ).

10. The stirring device according to claim 1 , wherein the rotary rod ( 11 ) is in a shape of transverse “L.”

11. The stirring device according to claim 1 , wherein when the two stirring plates ( 16 ) are open, an end portion of the inner telescopic shaft ( 12 ) away from the rotary rod ( 11 ) is spaced apart from the two stirring plates ( 16 ).

12. A tank comprising an exit ( 22 ) constructed on a tank body ( 20 ),
wherein a round mouth ( 21 ) for entry and exit of a stirring device is also constructed on the tank body ( 20 ); wherein the stirring device comprises a sleeve shaft ( 13 ), an inner telescopic shaft ( 12 ), a stirring component, and a rotary rod ( 11 ); and wherein the rotary rod ( 11 ) is mounted on an upper end of the sleeve shaft ( 13 ) for driving the sleeve shaft ( 13 ) to rotate; the stirring component is mounted on a lower end of the sleeve shaft ( 13 ) and rotates with the sleeve shaft ( 13 ); and
the inner telescopic shaft ( 12 ) is mounted inside of the sleeve shaft ( 13 ) and connected to the stirring component for controlling opening and closing of the stirring component;
wherein a sum of width of the two stirring plates ( 16 ) and a diameter of the inner telescopic shaft ( 12 ) is smaller than a diameter of the sleeve shaft ( 13 ), the two stirring plates ( 16 ) and the inner telescopic shaft ( 12 ) are received in the sleeve shaft ( 13 ) when folded to fit to the inner telescopic shaft ( 12 ) such that the inner telescopic shaft ( 12 ) has a capability to be pulled out directly together with the stirring plates ( 16 ) from tank when the sleeve shaft ( 13 ) is not pulled out.

13. The tank according to claim 12 , wherein the stirring component comprises two stirring plates ( 16 ) which have a same structure and are symmetrically arranged;
wherein one end of the stirring plate ( 16 ) is in a semicircle shape and another end thereof is in a vertical shape; and
wherein a groove ( 161 ) is provided on a side of an upper portion of the stirring plate ( 16 ), and is connected to the semicircle shape.

14. The tank according to claim 13 , wherein the two stirring plates ( 16 ) show a horizontal straight line when they are pushed open.

15. The tank according to claim 12 , wherein the sleeve shaft ( 13 ) is hollow and cylindrical.

16. The tank according to claim 12 , wherein openings are provided on two sides of a lower portion of the sleeve shaft ( 13 ) for the stirring component to be opened and closed, and torque transmission is formed between the stirring component and the openings during rotation.

17. The tank according to claim 16 , wherein a movable coupling ( 14 ) is mounted on a lower end of the inner telescopic shaft ( 12 ); and
wherein two connecting plates ( 15 ) are mounted in the openings, upper ends of the two connecting plates ( 15 ) being connected to the movable coupling ( 14 ) respectively, and lower ends of the two connecting plates ( 15 ) being connected to the stirring component respectively.

18. The tank according to claim 17 , wherein the two connecting plates ( 15 ) are arranged in an inclined way.

19. The stirring device according to claim 12 , wherein when the two stirring plates ( 16 ) are folded, the two stirring plates ( 16 ) and the two connecting plates ( 15 ) are arranged side-by-side along a direction perpendicular to a length direction of the two stirring plates ( 16 ), one stirring plate ( 16 ) is located at a first side of the two connecting plates ( 15 ), the other stirring plate ( 16 ) is located at a second side of the two connecting plates ( 15 ) opposite to the first side.

20. The stirring device according to claim 12 , wherein when the two stirring plates ( 16 ) are open, an end portion of the inner telescopic shaft ( 12 ) away from the rotary rod ( 11 ) is spaced apart from the two stirring plates ( 16 ).

Assignees

• Wuhan China Star Optoelectronics Technology Co Ltd

Inventors

• Tang Ninglin

Classifications

• B01F27/2312

  the position of the rotating shaft being adjustable in the interior of the receptacle, e.g. to locate the stirrer in different locations during the mixing · CPC title

• B01F27/2124 Primary

  Shafts with adjustable length, e.g. telescopic shafts · CPC title

• B01F35/3202

  Hand driven · CPC title

• B01F27/90

  with paddles or arms · CPC title

• B01F27/0541 Primary

  with mechanical means to alter the position of the stirring elements · CPC title