Device and method for measuring electric field by using MOS capacitor

Patent metadata

Field	Value
Publication number	US-10725082-B2
Application number	US-201715647755-A
Country	US
Kind code	B2
Filing date	Jul 12, 2017
Priority date	Jan 14, 2015
Publication date	Jul 28, 2020
Grant date	Jul 28, 2020

Abstract

One embodiment provides a technique of adjusting a gate voltage to be applied to at least one MOS capacitor and an amount of electric charges to be stored in the MOS capacitor so as to determine a sensitivity of a change in the amount of electric charges stored in the MOS capacitor, and exposing the MOS capacitor to an electric filed for a predetermined amount of time and then reading an electron inflow or outflow result due to the electric field so as to interpret the intensity and the direction of the electric field, thereby measuring the intensity and the direction of the electric field.

First claim

The invention claimed is:

1. An electric field measurement device for measuring an electric field, the electric field measurement device comprising:
a metal-oxide-semiconductor (MOS) capacitor exposed to an electric field; and
a control unit configured to control the MOS capacitor so that information stored in the MOS capacitor is changed by the electric field,
wherein the control unit is further configured to control a gate voltage applied to the MOS capacitor,
wherein a potential well in a substrate region of the MOS capacitor is generated when electrical potential energy is lowered by the gate voltage, the potential well storing at least a portion of electric charges before exposure to the electric field,
wherein the at least a portion of electric charges stored in the potential well is released in response to the exposure to the electric field above a threshold energy corresponding to a difference between an amount of electric charges storable in the potential well and an amount of electric charges actually stored in the potential well, and
wherein the electric field is measured based on the at least a portion of electric charges released due to the exposure to the electric field.

2. The electric field measurement device of claim 1 , wherein the information stored in the MOS capacitor comprises the amount of electric charges stored in the MOS capacitor.

3. The electric field measurement device of claim 1 , wherein the MOS capacitor is configured to store electric charges in the substrate region of the MOS capacitor based on the gate voltage applied to a gate electrode of the MOS capacitor.

4. The electric field measurement device of claim 1 , wherein an intensity of the electric field is calculated based on a difference between an amount of electric charges stored in advance in the MOS capacitor before the MOS capacitor is exposed to the electric field and an amount of electric charges stored in the MOS capacitor after the MOS capacitor is exposed to the electric field.

5. The electric field measurement device of claim 1 , further comprising an input circuit configured to supply electric charges stored in the MOS capacitor.

6. An electric field measurement device for measuring an electric field, the electric field measurement device comprising:
a measurer comprising a plurality of metal-oxide-semiconductor (MOS) capacitors; and
a control unit configured to control the measurer so that information stored in at least one MOS capacitor among the plurality of MOS capacitors is changed by an electric field,
wherein the control unit is further configured to control a gate voltage applied to each of the plurality of MOS capacitors,
wherein a potential well in a substrate region of the at least one MOS capacitor is generated when electrical potential energy is lowered by the gate voltage, the potential well storing at least a portion of electric charges before exposure to the electric field,
wherein the at least a portion of electric charges stored in the potential well is released in response to the exposure to the electric field above a threshold energy corresponding to a difference between an amount of electric charges storable in the potential well and an amount of electric charges actually stored in the potential well, and
wherein the electric field is measured based on the at least a portion of electric charges released due to the exposure to the electric field.

7. The electric field measurement device of claim 6 , wherein the measurer uses, as a measuring unit, the at least one MOS capacitor among the plurality of MOS capacitors.

8. The electric field measurement device of claim 6 , wherein the control unit is configured to control gate voltages applied to the MOS capacitors so that an electric charge released from a first MOS capacitor included in the measurer is introduced by the electric field into at least one of second MOS capacitors located around the first MOS capacitor.

9. The electric field measurement device of claim 6 , wherein the measurer is configured to measure an electric field simultaneously at a plurality of positions using a plurality of measuring units, wherein each of the plurality of measuring units comprises at least one of the plurality of MOS capacitors.

10. The electric field measurement device of claim 6 , further comprising at least one input circuit configured to supply electric charges stored in a first MOS capacitor included in the measurer and second MOS capacitors located around the first MOS capacitor.

11. The electric field measurement device of claim 6 , wherein the measurer comprises:
a substrate formed of a semiconductor material;
an insulating material laminated on the substrate; and
gate electrodes laminated on the insulating material.

12. An electric field measurement method using a metal-oxide-semiconductor (MOS) capacitor, the electric field measurement method comprising:
initializing an electric field measurement device by storing first information in at least one MOS capacitor included in the electric field measurement device before the at least one MOS capacitor is exposed to an electric field;
controlling a gate voltage applied to the at least one MOS capacitor, wherein a potential well in a substrate region of the MOS capacitor is generated when electrical potential energy is lowered by the gate voltage, the potential well storing at least a portion of electric charges corresponding to the first information before exposure to the electric field, and wherein the at least a portion of electric charges stored in the potential well is released in response to the exposure to the electric field above a threshold energy corresponding to a difference between an amount of electric charges storable in the potential well and an amount of electric charges actually stored in the potential well;
receiving second information stored in the at least one MOS capacitor after the at least one MOS capacitor is exposed to the electric field; and
acquiring at least one of information associated with an intensity of the electric field or information associated with a direction of the electric field based on the first information and the second information.

13. The electric field measurement method of claim 12 , wherein the first information comprises the amount of electric charges stored in the at least one MOS capacitor, to initialize the at least one MOS capacitor.

14. The electric field measurement method of claim 12 , wherein the initializing comprises determining the first information based on at least one of a sensitivity to an outflow of an electric charge stored in the at least one MOS capacitor due to the electric field or a sensitivity to an inflow of the electric charge flowing out from the at least one MOS capacitor into at least one other MOS capacitor.

15. The electric field measurement method of claim 12 , wherein the initializing comprises determining the gate voltage that is to be applied to the MOS capacitors based on at least one of a sensitivity to an outflow of an electric charge to be stored in the at least one MOS capacitor due to the electric field or a sensitivity to an inflow of the electric charge flowing out from the at least one MOS capacitor into at least one other MOS capacitor.

16. The electric field measurement method of claim 12 , wherein the initializing comprises setting an exposure time in which the at least one MOS capacitor is to be exposed to the electric field, and a number of exposures of the at least one MOS capacitor to the electric field.

17. The electric field measurement method of claim 12 , w

Assignees

• Snu R&Db Foundation

Inventors

• Min Sang Lyul
• Lee Yong Hun

Classifications

• H10D89/601

  for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs · CPC title

• G01R29/0814

  Field measurements related to measuring influence on or from apparatus, components or humans (EMC, EMI and similar testing in general G01R31/001), e.g. in ESD, EMI, EMC, EMP testing, measuring radiation leakage; detecting presence of micro- or radiowave emitters; dosimetry; testing shielding; measurements related to lightning · CPC title

• G01R29/24

  Arrangements for measuring quantities of charge · CPC title

• G01R15/165

  measuring electrostatic potential, e.g. with electrostatic voltmeters or electrometers, when the design of the sensor is essential (electrometers with passively moving electrodes G01R5/28; measuring electrostatic fields G01R29/12; measuring charge G01R29/24; measuring in circuits with high internal resistance G01R19/0023) · CPC title

• G01R29/12 Primary

  Measuring electrostatic fields {or voltage-potential} · CPC title