Detector, surface property measuring machine, and roundness measuring machine

Patent metadata

Field	Value
Publication number	US-10724841-B2
Application number	US-201916544609-A
Country	US
Kind code	B2
Filing date	Aug 19, 2019
Priority date	Mar 27, 2017
Publication date	Jul 28, 2020
Grant date	Jul 28, 2020

Abstract

There are provided a detector, a surface property measuring machine and a roundness measuring machine for automatically measuring a plurality of surfaces to shorten the time necessary for measurement. This problem is solved by a detector provided with a stylus for supporting a contact coming in contact with a surface of an object to be measured, a holder configured to hold the stylus, a measuring part configured to hold the holder to be capable of swinging by a rotating shaft and detect a displacement of the holder, and a body configured to accommodate the measuring part, wherein the holder holds the stylus such that a stylus axis as an axis of the stylus and a body axis as an axis of the body are in parallel, and the stylus axis and the body axis are offset in a first direction perpendicular to the body axis and the rotating shaft.

First claim

The invention claimed is:

1. A detector comprising:
a stylus configured to support a contact which is brought into contact with a surface of an object to be measured;
a holder configured to hold the stylus;
a measuring part configured to swingably hold the holder with a rotating shaft and detect a displacement of the holder; and
a body configured to accommodate the measuring part, the body having a cylindrical shape;
wherein the holder holds the stylus such that a stylus axis being a longitudinal axis of the stylus and a body axis being a longitudinal axis of the body are in parallel with each other, and the stylus axis and the body axis are offset in a first direction orthogonal to the body axis and a longitudinal axis of the rotating shaft, and
a distance in the first direction between the body axis and a position where the contact is brought into contact with the object to be measured is larger than a distance in the first direction between the body axis and an outer peripheral surface of the body.

2. The detector according to claim 1 , wherein the body is formed into a cylindrical shape.

3. A detector comprising:
a stylus configured to support a contact which is brought into contact with a surface of an object to be measured;
a holder configured to hold the stylus;
a measuring part configured to swingably hold the holder with a rotating shaft and detect a displacement of the holder; and
a body configured to accommodate the measuring part, the body having a cylindrical shape;
wherein the holder holds the stylus such that a stylus axis being a longitudinal axis of the stylus and a body axis being a longitudinal axis of the body are in parallel with each other, and the stylus axis and the body axis are offset in a first direction orthogonal to the body axis and a longitudinal axis of the rotating shaft.

4. The detector according to claim 1 , wherein the measuring part supports the holder rotatably around the rotating shaft.

5. The detector according to claim 1 , wherein the measuring part includes a parallel link mechanism comprising:
a fixed link having a pair of rotating shafts;
a pair of movable links one ends of which are respectively supported to be rotatable by the pair of the rotating shafts; and
a swinging link configured to hold the stylus, the swinging link being swingably supported by rotating shafts which are respectively provided in another ends of the pair of the movable links.

6. A detector comprising:
a stylus configured to support a contact which is brought into contact with a surface of an object to be measured;
a holder configured to hold the stylus;
a measuring part configured to swingably hold the holder with a rotating shaft and detect a displacement of the holder; and
a body configured to accommodate the measuring part, the body having a cylindrical shape;
wherein the holder holds the stylus such that a stylus axis being a longitudinal axis of the stylus and a body axis being a longitudinal axis of the body are in parallel with each other, and the stylus axis and the body axis are offset in a first direction orthogonal to the body axis and a longitudinal axis of the rotating shaft, and
wherein the measuring part includes a parallel link mechanism comprising:
a fixed link having a pair of rotating shafts;
a pair of movable links one ends of which are respectively supported to be rotatable by the pair of the rotating shafts; and
a swinging link configured to hold the stylus, the swinging link being swingably supported by the rotating shafts which are respectively provided in another ends of the pair of the movable links.

7. The detector according to claim 1 , wherein a shape of the contact is any one of a spherical shape, a conical shape, a polygon pyramid shape, a disc shape, or an ax blade shape.

8. A surface property measuring machine comprising:
the detector according to claim 1 ;
a relative moving part configured to cause the contact to come into contact with a measurement surface of an object to be measured, and relatively move the object to be measured and the contact; and
a surface property measuring part configured to measure a surface property of the object to be measured based on a detection result of the detector.

9. A roundness measuring machine configured to include the surface property measuring machine according to claim 8 ,
wherein the relative moving part includes a rotating stage configured to rotate an object to be measured, and
the surface property measuring part measures roundness of the object to be measured.

10. A roundness measuring machine configured to include a surface property measuring machine, the surface property measuring machine comprising:
a detector including a stylus configured to support a contact which is brought into contact with a surface of an object to be measured, a holder configured to hold the stylus, a measuring part configured to swingably hold the holder with a rotating shaft and detect a displacement of the holder, and a body configured to accommodate the measuring part, the body having a cylindrical shape, wherein the holder holds the stylus such that a stylus axis being a longitudinal axis of the stylus and a body axis being a longitudinal axis of the body are in parallel with each other, and the stylus axis and the body axis are offset in a first direction orthogonal to the body axis and a longitudinal axis of the rotating shaft;
a relative moving part configured to cause the contact to come into contact with a measurement surface of an object to be measured, and relatively move the object to be measured and the contact; and
a surface property measuring part configured to measure a surface property of the object to be measured based on a detection result of the detector,
wherein the relative moving part includes a rotating stage configured to rotate an object to be measured, and
the surface property measuring part measures roundness of the object to be measured.

Assignees

• Tokyo Seimitsu Co Ltd

Inventors

• Morii Hideki

Classifications

• G01B5/012 Primary

  Contact-making feeler heads therefor · CPC title

• G01B5/201 Primary

  for measuring roundness · CPC title

• G01B5/016

  Constructional details of contacts · CPC title

• G01B7/282

  for measuring roundness · CPC title