Elastic wave device and manufacturing method for the same
US-2017250671-A1 · Aug 31, 2017 · US
US10715939B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10715939-B2 |
| Application number | US-201816130564-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 13, 2018 |
| Priority date | Sep 13, 2018 |
| Publication date | Jul 14, 2020 |
| Grant date | Jul 14, 2020 |
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A transducer supported by the eardrum provides a piezoelectric material exchanging energy with the eardrum through a nanoscale membrane, the latter serving to boost the coupling between the piezoelectric material and the eardrum.
Opening claim text (preview).
We claim: 1. A transducer comprising: a substrate sized to permit an inner surface of the substrate to be placed adjacent to a distal surface of an eardrum of a human ear to be supported by that distal surface, the substrate providing: piezoelectric material distributed about an opening in the substrate; a set of electrodes communicating with the piezoelectric material to electrically induce surface waves in the piezoelectric material around and not electrically induce surface waves within the opening, the surface waves directed to converge on a point in the opening; and a nanoscale membrane supported on the inner surface of the piezoelectric material covering the opening and acoustically coupled to the piezoelectric material around the opening to conduct the induced surface waves from the piezoelectric material into the nanoscale membrane to the point for constructive interference. 2. The transducer of claim 1 wherein the substrate includes multiple openings each having a corresponding set of electrodes and nanoscale membrane. 3. The transducer of claim 2 wherein the multiple openings have different sizes. 4. The transducer of claim 1 wherein the opening passes through the substrate from the inner surface to an outer surface opposite the inner surface. 5. The transducer of claim 1 further including an antenna for receiving energy directed to the substrate and circuitry for applying phase signals to the set of electrodes to induce the surface waves. 6. The transducer of claim 1 wherein the nanoscale membrane has a thickness of less than 1/10 that of the piezoelectric substrate. 7. The transducer of claim 1 wherein the substrate has a thickness less than or equal to an average human eardrum. 8. The transducer of claim 1 wherein the nanoscale membrane is a semiconductor material. 9. The transducer of claim 8 wherein the nanoscale membrane is silicon. 10. The transducer of claim 1 wherein the nanoscale membrane has a thickness of 1-1000 nanometers. 11. The transducer of claim 1 wherein the substrate has a thickness from 5 to 100 micrometers. 12. The transducer of claim 1 wherein the opening circumscribes an area of a circle having a diameter from 10 to 1000 micrometers. 13. The transducer of claim 1 further including a biocompatible coating over the nanoscale membrane. 14. The transducer of claim 1 wherein the opening is circular and wherein the electrodes are concentric circles of different diameters about the point. 15. A method of communicating audio comprising: (a) attaching a transducer adjacent to an eardrum of a human to be supported on the eardrum, the transducer comprising: piezoelectric material distributed about an opening; a set of electrodes attached to the piezoelectric material to electrically induce surface waves in the piezoelectric material around the opening and not electrically induce surface wave within the opening, the surface waves directed to converge on a point in the opening in the substrate; and a nanoscale membrane in contact with the eardrum and supported on an inner surface of the piezoelectric material covering the opening and acoustically coupled to the piezoelectric material around the opening to conduct the induced surface waves from piezoelectric material into the nanoscale membrane to the point for constructive interference; and (h) exciting the set of electrodes with phased waveforms having a fundamental frequency in excess of 100 kilohertz and modulated at an audio frequency wherein the surface waves have a frequency above the audio frequency. 16. The method of claim 15 wherein the modulation is amplitude modulation. 17. The method of claim 15 wherein the transducer further includes an antenna communicating with the set of electrodes for receiving electromagnetic energy. 18. The method of claim 15 wherein the phased waveforms may have a fundamental frequency in excess of 100 megahertz.
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