Neutral atom imaging system

Patent metadata

Field	Value
Publication number	US-10714307-B2
Application number	US-201816141150-A
Country	US
Kind code	B2
Filing date	Sep 25, 2018
Priority date	Jun 8, 2018
Publication date	Jul 14, 2020
Grant date	Jul 14, 2020

Abstract

An imaging system utilizing atomic atoms is provided. The system may include a neutral atom source configured to generate a beam of neutral atoms. The system may also include an ionizer configured to collect neutral atoms scattered from the surface of a sample. The ionizer may also be configured to ionize the collected neutral atoms. The system may also include a selector configured to receive ions from the ionizer and selectively filter received ions. The system may also include one or more optical elements configured to direct selected ions to a detector. The detector may be configured to generate one or more images of the surface of the sample based on the received ions.

First claim

What is claimed:

1. A neutral atom imaging system, comprising:
a neutral atom source configured to generate a beam of neutral atoms and direct the beam to a sample;
an ionizer configured to collect neutral atoms scattered from the surface of the sample and to ionize the collected neutral atoms to generate ionized atoms;
a selector configured to receive the ionized atoms from the ionizer and to selectively filter the ionized atoms;
one or more ion optics; and
a detector, wherein the one or more ion optics are configured to receive selected ionized atoms from the selector and focus the selected ionized atoms onto the detector, wherein the detector is configured to generate one or more images of the sample based on received selected ionized atoms.

2. The neutral atom imaging system of claim 1 , further comprising:
a controller, wherein the controller is configured to receive the one or more images from the detector and determine one or more characteristics of the sample based on the one or more images.

3. The neutral atom imaging system of claim 1 , wherein the sample comprises at least one of a wafer, a reticle, or a mask.

4. The neutral atom imaging system of claim 1 , wherein the neutral atoms comprise at least one of atomic helium (He), atomic neon (Ne), or atomic argon (Ar).

5. The neutral atom imaging system of claim 1 , wherein the neutral atom source comprises a chamber and a supersonic nozzle coupled to an opening in the chamber.

6. The neutral atom imaging system of claim 1 , wherein the neutral atom source comprises a plasmatron source.

7. The neutral atom imaging system of claim 1 , wherein the ionizer ionizes the collected neutral atoms scattered from the surface of the sample by optical excitation.

8. The neutral atom imaging system of claim 1 , wherein the ionizer comprises a defocused electron beam (E-beam).

9. The neutral atom imaging system of claim 1 , wherein the selector comprises at least one of an electrostatic mesh or a magnetic prism.

10. The neutral atom imaging system of claim 1 , wherein the one or more ion optics comprise at least one of an electrostatic lens or electromagnetic lens.

11. The neutral atom imaging system of claim 1 , wherein the selector is configured to selectively filter the ionized atoms by separating high-velocity ionized atoms from low-velocity ionized atoms.

12. A neutral atom imaging system, comprising:
a neutral helium imaging sub-system, wherein the neutral helium imaging sub-system comprises:
a neutral atom source configured to generate a beam of neutral atoms and direct the beam to a sample;
an ionizer configured to collect neutral atoms scattered from the surface of the sample and to ionize the collected neutral atoms to generate ionized atoms;
a selector configured to receive the ionized atoms from the ionizer and to selectively filter the ionized atoms;
one or more ion optics; and
a detector, wherein the one or more ion optics are configured to receive selected ionized atoms from the selector and focus the selected ionized atoms onto the detector, wherein the detector is configured to generate one or more images of the sample based on received selected ionized atoms; and

a controller comprising a memory and one or more processors, the controller configured to receive the one or more images from the detector and determine one or more characteristics of the sample based on the one or more images.

13. A method of imaging using neutral atoms, comprising:
generating a beam of neutral atoms;
directing the beam of neutral atoms to a surface of a sample;
collecting neutral atoms scattered from the surface of the sample;
ionizing collected neutral atoms to generate ionized atoms;
selectively filtering ionized atoms; and
generating one or more images of the sample based on received selected ionized atoms.

14. The method of claim 13 , further comprising:
determining one or more characteristics of the sample based on the one or more images.

15. The method of claim 13 , wherein the sample includes one of a wafer, a reticle, or a mask.

16. The method of claim 13 , wherein the neutral atoms comprise at least one of atomic helium (He), atomic neon (Ne), or atomic argon (Ar).

17. The method of claim 13 , wherein the generating a beam of neutral atoms comprises generating a beam of neutral atoms with a neutral atom source comprising a chamber and a supersonic nozzle coupled to an opening in the chamber.

18. The method of claim 13 , wherein the generating a beam of neutral atoms comprises generating a beam of neutral atoms with a plasmatron source.

19. The method of claim 13 , wherein the ionizing collected neutral atoms comprises ionizing collected neutral atoms by optical excitation.

20. The method of claim 13 , wherein the ionizing collected neutral atoms comprises a defocused electron beam (E-beam).

21. The method of claim 13 , wherein the selectively filtering ionized atoms comprises selectively filtering ionized atoms with at least one of an electrostatic mesh or a magnetic prism.

22. The method of claim 13 , further comprising: directing the selected ionized atoms to a detector with at least one of an electrostatic lens or electromagnetic lens.

23. The method of claim 13 , wherein the selectively filtering ionized atoms comprises selectively filtering the ionized atoms to allow ionized atoms originating from the beam of neutral atoms to pass to a detector.

Assignees

• Kla Tencor Corp

Inventors

• Bezel Ilya
• Shifrin Eugene
• Delgado Gildardo
• Garcia Rudy F

Classifications

• H05H3/02 Primary

  Molecular or atomic-beam generation, e.g. resonant beam generation · CPC title

• H01J37/3174

  Particle-beam lithography, e.g. electron beam lithography · CPC title

• H01J2237/24592

  Inspection and quality control of devices · CPC title

• H01J2237/24485

  Energy spectrometers · CPC title

• G01N2223/105

  molecular or atomic beams · CPC title