Method for forming a carbon nanotube pellicle membrane

Patent metadata

Field	Value
Publication number	US-10712659-B2
Application number	US-201815979800-A
Country	US
Kind code	B2
Filing date	May 15, 2018
Priority date	May 15, 2017
Publication date	Jul 14, 2020
Grant date	Jul 14, 2020

Abstract

The present disclosure relates to a method for forming a carbon nanotube pellicle membrane for an extreme ultraviolet lithography reticle, the method comprising: bonding together overlapping carbon nanotubes of at least one carbon nanotube film by pressing the at least one carbon nanotube film between a first pressing surface and a second pressing surface, thereby forming a free-standing carbon nanotube pellicle membrane. The present disclosure also relates to a method for forming a pellicle for extreme ultraviolet lithography and for forming a reticle system for extreme ultraviolet lithography respectively.

First claim

What is claimed is:

1. A method for forming a carbon nanotube pellicle membrane for an extreme ultraviolet lithography reticle, the method comprising:
bonding together overlapping carbon nanotubes of at least one carbon nanotube film by pressing the at least one carbon nanotube film between a first pressing surface and a second pressing surface, thereby forming a carbon nanotube pellicle membrane,
wherein at least one of the first pressing surface or the second pressing surface is provided with a protruding pattern, and
wherein the protruding pattern has a pitch smaller than an average length of the overlapping carbon nanotubes of the at least one carbon nanotube film or bundles of carbon nanotubes of the at least one carbon nanotube film.

2. The method according to claim 1 , wherein at least two separate carbon nanotube films are pressed between the first pressing surface and the second pressing surface.

3. The method according to claim 1 , further comprising, forming a coating on the at least one carbon nanotube film prior to pressing the at least one carbon nanotube film.

4. The method according to claim 3 , wherein forming the coating includes forming a coating including at least one material selected from the group consisting of: B, B4C, ZrN, Mo, Ru, SiC, TiN, and a-C.

5. The method according to claim 3 , wherein the pressing the at least one carbon nanotube film includes applying a pressure of 0.1 kPa to 30 MPa.

6. The method according to claim 1 , wherein the overlapping carbon nanotubes of the at least one carbon nanotube film are in direct contact at locations where the overlapping carbon nanotubes overlap.

7. The method according to claim 1 , wherein the protruding pattern is formed by a rough surface, a set of protruding pins, a line pattern, a square grid, or a hexagonal grid.

8. The method according to claim 1 , wherein the pitch of the protruding pattern is between 200 nm and 200 μm.

9. The method according to claim 1 , further comprising heating the at least one carbon nanotube film while pressing the at least one carbon nanotube film.

10. The method according to claim 1 , the method further comprising:
forming a graphene flake coating layer by depositing graphene flakes on a main surface of the carbon nanotube pellicle membrane.

11. The method according to claim 10 , wherein a lateral dimension of the graphene flakes along a main surface of the graphene flakes is between 75 nm and 50 μm.

12. The method according to claim 10 , wherein the forming of the graphene flake coating layer further comprises heating the carbon nanotube pellicle membrane.

13. The method according to claim 10 , wherein the forming of the graphene flake coating layer further comprises applying a pressure to the carbon nanotube pellicle membrane and the graphene flakes.

14. A method for forming a pellicle for extreme ultraviolet lithography, the method comprising:
forming the carbon nanotube pellicle membrane according to the method of claim 1 , and
fixing the carbon nanotube pellicle membrane to a pellicle frame.

15. The method according to claim 14 , wherein a coating is formed on the carbon nanotube pellicle membrane and wherein the step of fixing comprises:
arranging the carbon nanotube pellicle membrane on a support surface of the pellicle frame, and
bonding together the coating of the carbon nanotube pellicle membrane and the support surface of the pellicle frame by pressing the carbon nanotube pellicle membrane and the support surface of the pellicle frame against each other thereby fixing the carbon nanotube pellicle membrane to the support surface of the pellicle frame.

16. The method according to claim 15 , wherein the support surface of the pellicle frame is formed by a first material and the coating is formed by a second material,
the first material being a metal or a semiconductor,
the second material being a metal or a semiconductor.

17. The method according to claim 15 , further comprising heating the carbon nanotube pellicle membrane and the pellicle frame while pressing the carbon nanotube pellicle membrane and the support surface of the pellicle frame against each other.

18. The method according to claim 15 , wherein the bonding comprises pressing the carbon nanotube pellicle membrane and the support surface of the pellicle frame together using a mechanical pressure while applying a vacuum to the carbon nanotube pellicle membrane and the pellicle frame.

19. A method for forming a reticle system for extreme ultraviolet lithography, the method comprising:
forming the pellicle according to the method of claim 14 , and
mounting the pellicle on a reticle.

20. A carbon nanotube pellicle membrane for an extreme ultraviolet lithography reticle, formed according to the method of claim 1 .

Assignees

• Imec Vzw
• Imec USA Nanoelectronics Design Center

Inventors

• Gallagher Emily
• Huyghebaert Cedric
• Pollentier Ivan
• Adelmann Hanns Christoph
• Timmermans Marina
• Lee Jae Uk

Classifications

• G03F1/62 Primary

  Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof · CPC title

• G03F1/64 Primary

  characterised by the frames, e.g. structure or material, including bonding means therefor · CPC title

• C01B32/159

  single-walled · CPC title

• B82Y30/00

  Nanotechnology for materials or surface science, e.g. nanocomposites · CPC title

• G03F1/22

  Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof · CPC title