Low-voltage microfluidic valve device and system for regulating the flow of fluid

Patent metadata

Field	Value
Publication number	US-10710070-B2
Application number	US-201615774440-A
Country	US
Kind code	B2
Filing date	Nov 22, 2016
Priority date	Nov 24, 2015
Publication date	Jul 14, 2020
Grant date	Jul 14, 2020

Abstract

A low-voltage microfluidic valve device and system for regulating the flow of fluid. One low-voltage microfluidic valve device for regulating the low of fluid includes a nano-textured dendritic metallic filament configured to grow and retract in response to a voltage. The low-voltage microfluidic valve device also includes a microfluidic channel configured to allow fluid flow, wherein the fluid flow is selectively interrupted by the growth of the nano-textured dendritic metallic filament. The low-voltage microfluidic valve device also includes a membrane positioned proximate to the fluid and configured to alter shape in response to the growth of the nano-textured dendritic metallic filament.

First claim

What is claimed is:

1. A low-voltage microfluidic valve device for regulating the flow of a fluid, the device comprising:
a substrate;
a plurality of electrodes positioned on the substrate;
a microfluidic channel formed between the plurality of electrodes;
a nano-textured dendritic metallic filament configured to grow and retract between the plurality of electrodes in response to a voltage applied to the plurality of electrodes;
a parylene membrane covering the microfluidic channel and configured to alter shape in response to the growth of the nano-textured dendritic metallic filament; and
the microfluidic channel configured to allow fluid flow over the parylene membrane, wherein the fluid flow is selectively interrupted by the parylene membrane when the shape of the parylene membrane is altered by the growth of the nanotextured dendritic metallic filament.

2. The low-voltage microfluidic valve device of claim 1 , wherein the parylene membrane is configured to isolate the fluid from an underlying metal and solid electrolyte.

3. The low-voltage microfluidic valve device of claim 2 , wherein the underlying metal and solid electrolyte is constructed of chalcogenide.

4. The low-voltage microfluidic valve device of claim 1 , further comprising a power supply for providing the voltage to the nano-textured dendritic metallic filament.

5. The low-voltage microfluidic valve device of claim 4 , wherein the power supply is a direct current power supply.

6. The low-voltage microfluidic valve device of claim 1 , wherein the growth and retraction of the nano-textured dendritic metallic filament is based on a reversible petal effect that controls the fluid flow.

7. The low-voltage microfluidic valve device of claim 1 , wherein the nano-textured dentritic metallic filament is configured to grow in response to a positive direct current voltage and wherein the nano-textured dentritic metallic filament is configured to retract in response to a negative direct current voltage.

8. The low-voltage microfluidic valve device of claim 1 , further comprising a first electrode and a second electrode opposite the first electrode, and wherein the nano-textured dendritic metallic filament is configured to grow and retract in response to a voltage applied across the first electrode and the second electrode.

9. The low-voltage microfluidic valve device of claim 8 , wherein the first electrode is constructed of silver and the second electrode is constructed of nickel, and wherein the nanotextured dendritic metallic filament is configured to grow and retract from the second electrode in response to a voltage applied across the first electrode and the second electrode.

10. The low-voltage microfluidic valve device of claim 1 , wherein the microfluidic channel is enclosed by the parylene membrane and a polydimethylsiloxane (PDMS) membrane and wherein the microfluidic channel is 25 μm in depth.

Assignees

• Univ Arizona State

Inventors

• Kozicki Michael N
• Chae Junseok

Classifications

• B01L3/502738 Primary

  characterised by integrated valves (throttle valves in microfluidic sample containers B01L3/502746) · CPC title

• F04B43/043 Primary

  Micropumps · CPC title

• F16K99/0042

  Electric operating means therefor · CPC title

• B01L2400/086

  using baffles or other fixed flow obstructions · CPC title

• F16K2099/0074

  using photolithography, e.g. etching · CPC title