Flow rate control apparatus, flow rate control method, and program recording medium

Patent metadata

Field	Value
Publication number	US-10705546-B2
Application number	US-201916520710-A
Country	US
Kind code	B2
Filing date	Jul 24, 2019
Priority date	Jul 30, 2018
Publication date	Jul 7, 2020
Grant date	Jul 7, 2020

Abstract

In order to provide a flow rate control apparatus capable of reducing noise while reducing delay, the flow rate control apparatus includes: a fluid resistor provided in a flow path; a downstream valve provided downstream of the fluid resistor; and a downstream pressure sensor provided between the fluid resistor and the downstream valve. The apparatus calculates a resistor flow rate through the fluid resistor; the time change amount of the downstream pressure; on the basis of the resistor flow rate, the difference between the resistor flow rate and the time change amount of the downstream side pressure, and a weighting factor, calculates a weighted average to estimate a valve flow rate through the downstream valve; and, on the basis of the deviation between a set flow rate and the valve flow rate, controls the downstream side valve, in which the weighting factor is configured to be changeable.

First claim

The invention claimed is:

1. A flow rate control apparatus comprising:
a fluid resistor provided in a flow path;
a downstream side valve provided on a downstream side of the fluid resistor;
a downstream side pressure sensor provided between the fluid resistor and the downstream side valve;
a resistor flow rate calculation part that calculates a resistor flow rate that is a flow rate of fluid flowing through the fluid resistor;
a change amount calculation part that calculates a time change amount of downstream side pressure measured by the downstream side pressure sensor;
a valve flow rate estimation part that, on a basis of the resistor flow rate, a conversion flow rate that is a difference between the resistor flow rate and the time change amount of the downstream side pressure, and a weighting factor, calculates a weighted average to estimate a valve flow rate through the downstream side valve; and
a flow rate control part that, on a basis of a deviation between a set flow rate and the valve flow rate, controls the downstream side valve, wherein
the weighting factor is configured to be changeable.

2. The flow rate control apparatus according to claim 1 , wherein
the valve flow rate estimation part changes the weighting factor in dependence on a target value of the set flow rate to calculate a weighted average of the resistor flow rate and the conversion flow rate, and estimates the valve flow rate.

3. The flow rate control apparatus according to claim 2 , wherein
the valve flow rate estimation part comprises:
the change amount calculation part that calculates the time change amount of the downstream side pressure;
a weighting factor storage part that stores the weighting factor corresponding to the target value of the set flow rate; and
a valve flow rate calculation part that, on a basis of the resistor flow rate, the time change amount of the downstream side pressure, and the weighting factor, calculates the valve flow rate.

4. The flow rate control apparatus according to claim 3 , wherein
the valve flow rate calculation part is configured to calculate the valve flow rate on a basis of a following expression:

Q
=

K
×
FlowRes

+

(

1
-
K

)

×

(
FlowCov
)

FlowCov
=

(

FlowRes
-

dP
2

dt

)

[

Expression
⁢

⁢
1

]

where Q: the valve flow rate, K: the weighting factor, FlowRes: the resistor flow rate, FlowCov: the conversion flow rate, and P 2 : the downstream side pressure.

5. The flow rate control apparatus according to claim 3 , wherein
the valve flow rate calculation part is configured to calculate the valve flow rate on a basis of a following expression:

Q
=

FlowRes
-

K
×

dP
2

dt

[

Expression
⁢

⁢
2

]

where Q: the valve flow rate, K: the weighting factor, FlowRes: the resistor flow rate, and P 2 : the downstream side pressure.

6. The flow rate control apparatus according to claim 1 , further comprising
an upstream side pressure sensor provided on an upstream side of the fluid resistor, wherein
the resistor flow rate calculation part calculates the resistor flow rate on a basis of upstream side pressure measured by the upstream side pressure sensor and the downstream side pressure.

7. The flow rate control apparatus according to claim 1 , further comprising:
an upstream side valve provided on an upstream side of an upstream side pressure sensor; and
a pressure control part that, on a basis of a deviation between a set pressure and an upstream side pressure, controls the upstream side valve.

8. A flow rate control method using a flow rate control apparatus comprising: a fluid resistor provided in a flow path; a downstream side valve provided on a downstream side of the fluid resistor; and a downstream side pressure sensor provided between the fluid resistor and the downstream side valve; the flow rate control method comprising:
a resistor flow rate calculation step of calculating a resistor flow rate that is a flow rate of fluid flowing through the fluid resistor;
a change amount calculation step of calculating a time change amount of downstream side pressure measured by the downstream side pressure sensor;
a valve flow rate estimation step of, on a basis of the resistor flow rate, a conversion flow rate that is a difference between the resistor flow rate and the time change amount of the downstream side pressure, and a weighting factor, calculating a weighted average to estimate a valve flow rate through the downstream side valve; and
a flow rate control step of, on a basis of a deviation between a set flow rate and the valve flow rate, controlling the downstream side valve, wherein
the weighting factor is cha

Assignees

• Horiba Stec Co Ltd

Inventors

• Tseng Tsai Wei
• Yoshida Tomohiro
• Nagai Kentaro

Classifications

• G05D7/06 Primary

  characterised by the use of electric means {(G05D7/005 takes precedence)} · CPC title

• G05D7/0647 Primary

  the plurality of throttling means being arranged in series · CPC title