Method and apparatus for positioning a micro- or nano-object under visual observation

Patent metadata

Field	Value
Publication number	US-10705115-B2
Application number	US-201716093125-A
Country	US
Kind code	B2
Filing date	Mar 23, 2017
Priority date	Apr 13, 2016
Publication date	Jul 7, 2020
Grant date	Jul 7, 2020

Abstract

A method is provided for positioning a micro- or nano-object on a planar support by displacement performed under visual control, wherein the micro- or nano-object is immersed in a transparent medium, called ambient medium, having a refractive index n 3 ; the planar support comprises a transparent substrate of refractive index n 0 >n 3 on which is deposited at least one optically absorbent layer, adapted to behave as antireflection coating when it is lit at normal incidence with a lighting wavelength λ through the substrate; and the visual control comprises the lighting of the micro- or nano-object at least with the wavelength λ through the substrate, and the observation thereof also through the substrate. A method to scanning probe microscopy and to the assembly of nanostructures is provided.

First claim

The invention claimed is:

1. A method for positioning a micro- or nano-object on a planar support, the method comprising:
displacing said micro- or nano-object by means of a micromanipulator and under visual control; and
immersing said micro- or nano-object in a transparent medium, called ambient medium, having a refractive index n 3 ,
wherein said planar support comprises a transparent substrate of refractive index n 0 >n 3 on which is deposited at least one optically absorbent layer, adapted to behave as antireflection coating when it is lit at normal incidence with a lighting wavelength λ through said transparent substrate, and
the visual control comprises the lighting of said micro- or nano-object at least with said wavelength λ at normal incidence through said transparent substrate and said optically absorbent layer, the observation thereof by specular reflection also through said transparent substrate and said optically absorbent layer and the characterization of either the distance between the micro- or nano-object and the optically absorbent layer or of the inclination of said micro- or nano-object relative to the optically absorbent layer by analysis of an optical interference pattern or of a reflected light intensity, observed through said substrate.

2. The method as claimed in claim 1 , in which said optically absorbent layer is a conductive layer.

3. The method as claimed in claim 1 , in which said lighting is a conical lighting about the normal to said optically absorbent layer.

4. The method as claimed in claim 1 , in which the visual control also comprises the lighting of said micro- or nano-object by an auxiliary light source situated on the same side of said planar support as said micro- or nano-object.

5. The method as claimed in claim 1 , in which said micro- or nano-object is a probe for local probe microscopy and its displacement comprises an approach of said probe to said optically absorbent layer.

6. The method as claimed in claim 5 , also comprising the displacement of said probe in a direction substantially parallel to said optically absorbent layer, the distance between the probe and the layer being kept constant by a servocontrol mechanism using said visual control.

7. The method as claimed in claim 5 , also comprising the displacement of said probe in a direction substantially parallel to said optically absorbent layer, the orientation of the probe relative to the layer being kept constant by a servocontrol mechanism using said visual control.

8. The method as claimed in claim 5 , in which said probe is an electrochemical microscopy probe.

9. The method as claimed in claim 1 , in which said micro- or nano-object is a two-dimensional nanostructure secured to a support allowing it to be manipulated.

10. A method for fabricating a nanostructure by stacking two-dimensional nanostructures, comprising the positioning of said two-dimensional nanostructures by a method as claimed in claim 9 .

11. The method as claimed in claim 1 , in which said micro- or nano-object comprises at least one micro- or nano-electrode secured to a support allowing it to be manipulated.

12. A method for producing at least one micro- or nano-contact by deposition of at least one micro- or nano-electrode on the surface of a substrate, said deposition being performed by a method as claimed in claim 11 .

13. A local probe microscope comprising:
a planar support comprising a transparent substrate of refractive index no on which is deposited at least one optically absorbent layer, adapted to behave as antireflection coating when it is lit at normal incidence with a lighting wavelength λ through said transparent substrate, and when it is in contact, on the side opposite said substrate, with a transparent medium, called ambient medium, exhibiting a refractive index n3<n 0 ;
a local probe, arranged in proximity to a surface of said planar support;
an actuation system configured to displace said local probe over said planar support, at least in a direction at right angles to and in a direction parallel to said support; wherein:
said local probe microscope also comprises an optical system configured to light said local probe at normal incidence at least with said wavelength λ through said transparent substrate and said optically absorbent layer, and observe it by specular reflection, also through said transparent substrate and said optically absorbent layer; and in that
said local probe microscope also comprises a servocontrol system configured to characterize the distance between the probe and the optically absorbent layer by analysis of an optical interference pattern or of a reflected light intensity observed through said substrate, and drive said actuation system to keep the measured distance equal to a setpoint.

14. The local probe microscope as claimed in claim 13 , in which said servocontrol system is also configured to:
characterize the inclination of the probe relative to the optically absorbent layer by analysis of said optical interference pattern or of said reflected light intensity observed through said substrate;
drive said actuation system to keep the measured inclination equal to a setpoint.

15. The local probe microscope as claimed in claim 13 , of scanning electro-chemical microscopy (SECM) type.

16. An apparatus for assembling nanostructures comprising
a planar support;
an actuation system configured to displace, as many times as necessary, over said planar support, a support, to which can be fixed a two-dimensional nanostructure wherein:
said planar support comprises a transparent substrate of refractive index no on which is deposited at least one optically absorbent layer, adapted to behave as antireflection coating when it is lit at normal incidence with a lighting wavelength λ through said transparent substrate, and when it is in contact, on the side opposite said substrate, with a transparent medium, called ambient medium, exhibiting a refractive index n3<n 0 ; and
in that said
apparatus also comprises an optical system configured to light said support at normal incidence at least with said wavelength λ through said transparent substrate, observe it by specular reflection, also through said transparent substrate and said optically absorbent layer, and characterize either the distance between the two-dimensional nanostructure and the optically absorbent layer or of the inclination of said two-dimensional nanostructure relative to the optically absorbent layer by analysis of an optical interference pattern or of a reflected light intensity, observed through said substrate.

17. The apparatus for assembling nanostructures as claimed in claim 16 , in which said support is adapted to allow the dropping of said nanostructure onto said support once positioned.

Assignees

• Commissariat Energie Atomique
• Centre Nat Rech Scient
• Univ Du Mans

Inventors

• Campidelli Stéphane
• Cornut Renaud
• Derycke Vincent
• Ausserre Dominique
• Ausserre Manuel

Classifications

• H10P10/128

  by direct semiconductor to semiconductor bonding · CPC title

• G02B21/32

  Micromanipulators structurally combined with microscopes · CPC title

• G01Q30/025 Primary

  Optical microscopes coupled with SPM · CPC title

• G01Q60/60

  SECM [Scanning Electro-Chemical Microscopy] or apparatus therefor, e.g. SECM probes · CPC title

• H01L21/187

  Electricity · mapped topic