Device and method for generating organic molecular cluster ion beam

Patent metadata

Field	Value
Publication number	US-10699868-B2
Application number	US-201816185527-A
Country	US
Kind code	B2
Filing date	Nov 9, 2018
Priority date	May 15, 2018
Publication date	Jun 30, 2020
Grant date	Jun 30, 2020

Abstract

Disclosed is a device for generating an organic molecular cluster ion beam, the device including a receiver configured to accommodate an organic material, a cluster generator configured to generate a cluster by supersonic expanding the organic material accommodated in the receiver at a high speed, a photo-ionizer configured to temporarily accommodate the cluster that is generated through the cluster generator, an ultraviolet (UV) light source configured to irradiate an UV pulse to the photo-ionizer to ionize the cluster, and entrance electrodes disposed at both sides of the photo-ionizer and configured to provide a potential difference to the photo-ionizer to generate a cluster ion beam.

First claim

What is claimed is:

1. A device for generating an organic molecular cluster ion beam, the device comprising:
a receiver configured to accommodate an organic material;
a cluster generator including a nozzle configured to generate a cluster of molecules of the organic material by supersonic expanding the organic material accommodated in the receiver through the nozzle;
a photo-ionizer configured to accommodate the cluster that is generated through the cluster generator;
an ultraviolet (UV) light source configured to irradiate an UV pulse into the photo-ionizer to ionize the cluster; and
entrance electrodes disposed at both sides of the photo-ionizer and configured to provide a potential difference for the photo-ionizer to generate a cluster ion beam.

2. The device of claim 1 further comprising a mass gate located downstream of the entrance electrode based on a travelling direction of the cluster ion beam and configured to adjust a cluster size of the cluster ion beam.

3. The device of claim 2 , wherein the mass gate is located on a travelling path of the cluster ion beam and configured to control whether to pass the cluster ion beam generated in the device based on a magnitude of applied potential.

4. The device of claim 3 further comprising a controller configured to synchronize an irradiation time point of the UV pulse irradiated from the UV light source with an activation time point at which an activating potential allowing a pass of the cluster ion beam is applied to the mass gate, based on a cluster size of the cluster ion beam selected by a user.

5. The device of claim 4 , wherein the controller is configured to control the activation time point and an activation time in which the activation potential is applied from the activation time point based on the cluster size of the cluster ion beam selected by the user.

6. A method of generating an organic molecular cluster ion beam, the method comprising:
generating a cluster of molecules of an organic material by supersonically expanding the organic material through a nozzle;
accommodating the cluster in a receiver;
photoionizing the cluster in the receiver by irradiating an ultraviolet (UV) pulse to the cluster; and
accelerating a cluster ion beam in one direction by applying a potential difference in the photoionized cluster in the one direction.

7. The method of claim 6 further comprising adjusting a cluster size of the cluster ion beam passing through a mass gate installed in the one direction by selectively applying a potential to the mass gate.

8. The method of claim 7 , wherein the adjusting of the cluster size comprises adjusting, based on an irradiation time point of the UV pulse, an activation time point at which an activating potential allowing a pass of the cluster ion beam is applied to the mass gate and an activation time in which the activation potential is applied so that the cluster size of the cluster ion beam is selected.

9. The method of claim 6 further comprising setting the cluster size of the cluster ion beam by setting a timing for forming a plurality of potential differences in the photoionized cluster based on a cluster size of the cluster ion beam required by a user.

10. The method of claim 9 , wherein the setting of the cluster size comprises
selecting a cluster size of the cluster ion beam from the user; and
calculating a time required by a cluster having the received size to reach a mass gate that controls a pass of the cluster ion beam based on an irradiation time point of the UV pulse and setting an activation time point at which an activating potential allowing a pass of the cluster ion beam is applied to the mass gate.

11. The method of claim 10 , wherein the setting of the cluster size further comprises setting an activation time in which the activation potential is applied from the activation time point by calculating a time required by a cluster having a bigger size than the selected cluster size to reach the mass gate based on the activation time point after the activation time point is set.

12. An organic molecular cluster ion beam mass analyzer comprising:
the device of claim 1 ;
a sample plate configured to hold a sample bombarded by a cluster ion beam; and
a detector configured to detect a secondary ion generated from a surface of the sample.

13. The organic molecular cluster ion beam mass analyzer of claim 12 , wherein the sample is a biological sample.

14. The organic molecular cluster ion beam mass analyzer of claim 12 further comprising a mass analysis controller configured to measure a mass of the secondary ion based on flight time information of the secondary ion detected by the detector.

Assignees

• Korea Basic Science Inst

Inventors

• Choi Chang Min
• Choi Myoung Choul
• Lee Sang Ju
• Baek Ji Young
• Kim Jeong Jin

Classifications

• H01J2237/0812

  Ionized cluster beam [ICB] sources · CPC title

• H01J49/162

  Direct photo-ionisation, e.g. single photon or multi-photon ionisation · CPC title

• H01J2237/2527

  Ions [SIMS] · CPC title

• H01J49/10

  Ion sources; Ion guns · CPC title

• G01N23/2258

  Measuring secondary ion emission, e.g. secondary ion mass spectrometry [SIMS] (mass-to-charge ratio analysis aspects of SIMS for material analysis G01N27/62) · CPC title