Devices including a diffusion barrier layer

Patent metadata

Field	Value
Publication number	US-10699732-B2
Application number	US-201715828391-A
Country	US
Kind code	B2
Filing date	Nov 30, 2017
Priority date	Nov 11, 2014
Publication date	Jun 30, 2020
Grant date	Jun 30, 2020

Abstract

Devices that include a write pole; a near field transducer (NFT) that includes a peg and a disk, wherein the peg is at the ABS of the device; and a diffusion barrier layer positioned between the write pole and the peg of the NFT, the diffusion barrier layer including metals, nitrides, oxides, carbides, silicides, or amorphous material.

First claim

What is claimed is:

1. A device having an air bearing surface (ABS), the device comprising:
a write pole;
a near field transducer (NFT) comprising rhodium (Rh), the NFT comprising a peg and a disk, wherein the peg is at the ABS of the device; and
a diffusion barrier layer positioned between the write pole and the peg of the NFT and in direct physical contact with at least the write pole and the disk, the diffusion barrier layer having a thickness from about 0.1 nm to about 50 nm and comprising one or more materials selected from:
molybdenum (Mo), niobium (Nb), nickel (Ni), hafnium (Hf), neodymium (Nd), holmium (Ho), zirconium (Zr), yttrium (Y), uranium (U), iridium (Ir), silicon (Si), tantalum (Ta), tungsten (W), titanium (Ti), rhodium (Rh), and ruthenium (Ru);
molybdenum (Mo), niobium (Nb), nickel (Ni), hafnium (Hf), neodymium (Nd), holmium (Ho), zirconium (Zr), yttrium (Y), uranium (U), iridium (Ir), silicon (Si), tantalum (Ta), tungsten (W), titanium (Ti), rhodium (Rh), and ruthenium (Ru);
aluminum nitride (AlN), boron nitride (BN), zirconium nitride (ZrN), chromium nitride (CrN), titanium nitride (TiN), hafnium nitride (HfN), vanadium nitride (VN); titanium aluminum nitride (TiAlN), and titanium silicon nitride (TiSiN);
aluminum oxide (AlO), magnesium oxide (MgO), beryllium oxide (BeO), titanium oxide (TiO), tantalum oxide (TaO), niobium oxide (NbO), vanadium oxide (VO), tungsten oxide (WO), zirconium oxide (ZrO), hafnium oxide (HfO), silicon oxide (SiO), and chromium oxide (CrO);
titanium carbide (TiC), zirconium carbide (ZrC), niobium carbide (NbC), vanadium carbide (VC), hafnium carbide (HfC), silicon carbide (SiC), chromium carbide (CrC), and tantalum carbide (TaC) and tungsten carbide (WC); and
amorphous material.

2. The device according to claim 1 further comprising a dielectric material positioned between the NFT and the pole (NPS).

3. The device according to claim 2 , wherein the diffusion barrier layer is positioned at least between the pole and the NPS.

4. The device according to claim 3 , wherein the diffusion barrier layer extends away from the ABS between the pole and the disc of the NFT.

5. The device according to claim 1 , wherein the diffusion barrier layer intersects the disk of the NFT.

6. The device according to claim 5 , wherein the diffusion barrier layer has substantially the same shape as the disc of the NFT.

7. The device according to claim 1 , wherein the diffusion barrier layer comprises ruthenium (Ru).

8. The device according to claim 1 , wherein the diffusion barrier layer comprises tantalum (Ta).

9. The device according to claim 1 , wherein the diffusion barrier layer comprises an amorphous metal alloy.

10. The device according to claim 3 further comprising an adhesion layer positioned between the NPS and the diffusion barrier layer.

11. The device according to claim 9 , wherein the adhesion layer has a thickness from about 0.1 nm to about 10 nm.

12. A device having an air bearing surface (ABS), the device comprising:
a write pole;
a near field transducer (NFT) comprising rhodium (Rh), the NFT comprising a peg and a disk, wherein the peg is at the ABS of the device;
a dielectric material positioned between the NFT and the pole (NPS) at the ABS of the device; and
a diffusion barrier layer intersecting the disk of the NFT and positioned between the NPS and the pole, and the diffusion barrier layer in direct physical contact with at least the write pole and the disk.

13. The device according to claim 12 , wherein the diffusion barrier layer comprises one or more materials selected from:
molybdenum (Mo), niobium (Nb), nickel (Ni), hafnium (Hf), neodymium (Nd), holmium (Ho), zirconium (Zr), yttrium (Y), uranium (U), iridium (Ir), silicon (Si), tantalum (Ta), tungsten (W), titanium (Ti), rhodium (Rh), and ruthenium (Ru);
aluminum nitride (AlN), boron nitride (BN), zirconium nitride (ZrN), chromium nitride (CrN), titanium nitride (TiN), hafnium nitride (HfN), vanadium nitride (VN); titanium aluminum nitride (TiAlN), and titanium silicon nitride (TiSiN);
aluminum oxide (AlO), magnesium oxide (MgO), beryllium oxide (BeO), titanium oxide (TiO), tantalum oxide (TaO), niobium oxide (NbO), vanadium oxide (VO), tungsten oxide (WO), zirconium oxide (ZrO), hafnium oxide (HfO), silicon oxide (SiO), and chromium oxide (CrO);
titanium carbide (TiC), zirconium carbide (ZrC), niobium carbide (NbC), vanadium carbide (VC), hafnium carbide (HfC), silicon carbide (SiC), chromium carbide (CrC), and tantalum carbide (TaC) and tungsten carbide (WC); and
amorphous material.

14. The device according to claim 12 , wherein the diffusion barrier layer comprises tantalum (Ta).

15. The device according to claim 12 , wherein the diffusion barrier layer has substantially the same shape as the disc of the NFT.

16. The device according to claim 12 , wherein the diffusion barrier layer has a diameter from about 275 nm to about 400 nm.

17. A device having an air bearing surface (ABS), the device comprising:
a write pole;
a near field transducer (NFT) comprising rhodium (Rh), the NFT comprising a peg and a disk, wherein the peg is at the ABS of the device;
a dielectric material positioned between the NFT and the pole (NPS) at the ABS of the device and a diffusion barrier layer positioned between the write pole and the peg of the NFT, the diffusion barrier layer in direct physical contact with at least the write pole and the disk the diffusion barrier layer comprising one or more materials selected from:
molybdenum (Mo), niobium (Nb), nickel (Ni), hafnium (Hf), neodymium (Nd), holmium (Ho), zirconium (Zr), yttrium (Y), uranium (U), iridium (Ir), silicon (Si), tantalum (Ta), tungsten (W), titanium (Ti), rhodium (Rh), and ruthenium (Ru);
aluminum nitride (AlN), boron nitride (BN), zirconium nitride (ZrN), chromium nitride (CrN), titanium nitride (TiN), hafnium nitride (HfN), vanadium nitride (VN), tungsten nitride (WN), tantalum nitride (TaN), titanium aluminum nitride (TiAlN), and titanium silicon nitride (Ti SiN);
aluminum oxide (AlO), magnesium oxide (MgO), beryllium oxide (BeO), titanium oxide (TiO), tantalum oxide (TaO), niobium oxide (NbO), vanadium oxide (VO), tungsten oxide (WO), zirconium oxide (ZrO), hafnium oxide (HfO), silicon oxide (SiO), and chromium oxide (CrO);
titanium carbide (TiC), zirconium carbide (ZrC), niobium carbide (NbC), vanadium carbide (VC), hafnium carbide (HfC), silicon carbide (SiC), chromium carbide (CrC), tantalum carbide (TaC) and tungsten carbide (WC); and
amorphous material.

18. The device according to claim 17 further comprising an adhesion layer positioned between the NPS and the diffusion barrier layer.

19. The device according to claim 17 , wherein the diffusion barrier layer has a thickness from about 0.2 nm to 5 nm.

20. The device according to claim 17 , wherein the diffusion barrier layer is a multilayer structure.

Assignees

• Seagate Technology Llc

Inventors

• Cheng Yuhang
• Franzen Scott
• Seigler Michael
• Wessel James
• Zhao Tong
• Duda John
• Sahoo Sarbeswar
• Brickner Hui
• Kautzky Michael

Classifications

• G11B2005/0021

  Thermally assisted recording using an auxiliary energy source for heating the recording layer locally to assist the magnetization reversal · CPC title

• G11B5/314 Primary

  where the layers are extra layers normally not provided in the transducing structure, e.g. optical layers (G11B5/3196 takes precedence) · CPC title

• G11B5/3106

  where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination (G11B5/3133 takes precedence) · CPC title