Multiple-layer arrangements including one or more dielectric layers over a waveguide

Patent metadata

Field	Value
Publication number	US-10698159-B2
Application number	US-201816165600-A
Country	US
Kind code	B2
Filing date	Oct 19, 2018
Priority date	Oct 19, 2018
Publication date	Jun 30, 2020
Grant date	Jun 30, 2020

Abstract

Structures that include a waveguide and methods of fabricating a structure that includes a waveguide. A first dielectric layer comprised of a first silicon nitride is formed. The waveguide is arranged over the first dielectric layer. A second dielectric layer is formed that is arranged over the waveguide. The second dielectric layer is composed of a second silicon nitride having a lower absorption of optical signals than the first silicon nitride.

First claim

What is claimed is:

1. A structure comprising:
a first dielectric layer comprised of a first silicon nitride;
a waveguide arranged over the first dielectric layer; and
a second dielectric layer arranged over the waveguide, the second dielectric layer comprised of a second silicon nitride having a lower absorption of optical signals than the first silicon nitride.

2. The structure of claim 1 wherein the waveguide has a first surface, and the second dielectric layer is arranged in direct contact with the first surface of the waveguide.

3. The structure of claim 2 further comprising:
a third dielectric layer arranged to surround the waveguide, the third dielectric layer having a second surface that is coplanar with the first surface of the waveguide, and the third dielectric layer is in direct contact with the second surface of the second dielectric layer.

4. The structure of claim 3 wherein the third dielectric layer is comprised of an oxide of silicon.

5. The structure of claim 1 wherein the waveguide has a first surface, and the second dielectric layer has a non-contacting relationship with the first surface of the waveguide.

6. The structure of claim 5 further comprising:
a third dielectric layer arranged to surround the waveguide, the third dielectric layer having a second surface that is arranged over the first surface of the waveguide, and a portion of the third dielectric layer is arranged between the waveguide and the second dielectric layer to provide the non-contacting relationship.

7. The structure of claim 6 wherein the third dielectric layer is comprised of an oxide of silicon.

8. The structure of claim 1 wherein the waveguide has a first width, the second dielectric layer has a second width, and the second width of the second dielectric layer is greater than the first width of the waveguide.

9. The structure of claim 1 wherein the waveguide has a first width, the second dielectric layer has a second width, and the second width of the second dielectric layer is greater than or equal to 1.1 times the first width of the waveguide.

10. The structure of claim 1 wherein the waveguide is comprised of the second silicon nitride.

11. The structure of claim 1 further comprising:
a third dielectric layer over the second dielectric layer, the third dielectric layer comprised of the second silicon nitride.

12. The structure of claim 11 wherein the waveguide has a first width, the second dielectric layer has a second width, and the second width of the second dielectric layer is greater than the first width of the waveguide.

13. The structure of claim 12 wherein the third dielectric layer has a third width, and the third width of the third dielectric layer is greater than or equal to the first width of the waveguide.

14. The structure of claim 13 wherein the second width of the second dielectric layer is substantially equal to the third width of the third dielectric layer.

15. The structure of claim 11 wherein the waveguide has a first width, the third dielectric layer has a second width, and the second width of the third dielectric layer is greater than or equal to the first width of the waveguide.

16. A method comprising:
forming a first dielectric layer comprised of a first silicon nitride;
forming a waveguide arranged over the first dielectric layer; and
forming a second dielectric layer arranged over the waveguide,
wherein the second dielectric layer is comprised of a second silicon nitride having a lower absorption of optical signals than the first silicon nitride.

17. The method of claim 16 wherein the waveguide has a first surface, the second dielectric layer is in direct contact with the first surface of the waveguide, and further comprising:
forming a third dielectric layer arranged to surround the waveguide, the third dielectric layer comprised of an oxide of silicon.

18. The method of claim 16 wherein the waveguide has a first surface, the second dielectric layer has a non-contacting relationship with the first surface of the waveguide, and further comprising:
forming a third dielectric layer arranged to surround the waveguide and having a second surface that is arranged over the first surface of the waveguide,
wherein a portion of the third dielectric layer is arranged between the waveguide and the second dielectric layer to provide the non-contacting relationship, and the third dielectric layer is comprised of an oxide of silicon.

19. The method of claim 16 further comprising:
forming a third dielectric layer over the second dielectric layer,
wherein the third dielectric layer is comprised of the second silicon nitride, the second dielectric layer has a second width, the waveguide has a first width, and the second width of the second dielectric layer is greater than the first width of the waveguide.

20. The method of claim 16 further comprising:
forming a third dielectric layer over the second dielectric layer,
wherein the second dielectric layer comprised of the second silicon nitride, the waveguide has a first width, the third dielectric layer has a second width, and the second width of the third dielectric layer is greater than the first width of the waveguide.

Assignees

• Globalfoundries Inc

Inventors

• Bian Yusheng
• Jacob Ajey Poovannummoottil

Classifications

• G02B6/136 Primary

  by etching · CPC title

• G02B6/122 Primary

  Basic optical elements, e.g. light-guiding paths · CPC title

• G02B6/125

  Bends, branchings or intersections · CPC title