Method and system of dual-mode actuation and sensing for real-time calibration of axisymmetric resonant gyroscopes
US-2016139176-A1 · May 19, 2016 · US
High dynamic range gyroscope
US10697772B1 · US · B1
| Field | Value |
|---|---|
| Publication number | US-10697772-B1 |
| Application number | US-201916277610-A |
| Country | US |
| Kind code | B1 |
| Filing date | Feb 15, 2019 |
| Priority date | Sep 1, 2015 |
| Publication date | Jun 30, 2020 |
| Grant date | Jun 30, 2020 |
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Abstract
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A sensor includes an acceleration or magnetic field sensitive microelectromechanical systems (MEMS) resonator, configured to oscillate in at least a first normal mode and a second normal mode. The sensor further includes: a coarse readout circuit configured to drive the first normal mode, measure a motion of the first normal mode, and derive from the measured motion a coarse measurement of the true acceleration or true external magnetic field; and a fine readout circuit configured to drive the second normal mode, measure a motion of the second normal mode, and derive from the measured motion and the coarse measurement a measurement of the difference between the true acceleration or true external magnetic field and the coarse measurement.
First claim
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What is claimed is: 1. A sensor comprising: an acceleration or magnetic field sensitive microelectromechanical systems (MEMS) resonator, configured to oscillate in at least a first normal mode and a second normal mode, a coarse readout circuit configured to: drive the first normal mode, measure a motion of the first normal mode, and derive from the measured motion of the first normal mode a coarse measurement of a true acceleration or true external magnetic field; and a fine readout circuit configured to: drive the second normal mode, measure a motion of the second normal mode, and derive from the measured motion of the second normal mode and the coarse measurement a fine measurement of a difference between the true acceleration or true external magnetic field and the coarse measurement. 2. The sensor of claim 1 , wherein the coarse readout circuit is configured to generate the coarse measurement of the true acceleration or true external magnetic field of the MEMS resonator and the coarse measurement with a resolution of 19 bits. 3. The sensor of claim 2 , wherein the fine readout circuit is configured to generate the fine measurement of the difference between the true acceleration or true external magnetic field of the MEMS resonator and the coarse measurement with a resolution of 19 bits. 4. The sensor of claim 1 , wherein the first normal mode has a mode number of 2 and the second normal mode has a mode number of 3. 5. The sensor of claim 1 , further comprising a mechanical tilt stage with two rotational degrees of freedom, wherein: the MEMS resonator is secured to the tilt stage, and the coarse readout circuit is configured to generate a control signal proportional to the coarse measurement of the true external field of the MEMS resonator and apply the control signal to the mechanical tilt stage to reduce a rotation of the tilt stage.
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Classifications
Automatic control ({H03G3/005 takes precedence;} combined with volume compression or expansion H03G7/00) · CPC title
- G01C19/5684Primary
the devices involving a micromechanical structure · CPC title
the devices having a single sensing mass · CPC title
using energy levels of molecules, atoms, or subatomic particles as a frequency reference · CPC title
- G01C19/5726Primary
Signal processing · CPC title
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- What does patent US10697772B1 cover?
- A sensor includes an acceleration or magnetic field sensitive microelectromechanical systems (MEMS) resonator, configured to oscillate in at least a first normal mode and a second normal mode. The sensor further includes: a coarse readout circuit configured to drive the first normal mode, measure a motion of the first normal mode, and derive from the measured motion a coarse measurement of the …
- Who is the assignee on this patent?
- Hrl Lab Llc
- What technology area does this patent fall under?
- Primary CPC classification G01C19/5684. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Jun 30 2020 00:00:00 GMT+0000 (Coordinated Universal Time) (B1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 5 related publications on this page (citations in our corpus or others sharing the same primary CPC).