Gas flow guide design for uniform flow distribution and efficient purge

Patent metadata

Field	Value
Publication number	US-10697062-B2
Application number	US-201816032854-A
Country	US
Kind code	B2
Filing date	Jul 11, 2018
Priority date	Jul 11, 2018
Publication date	Jun 30, 2020
Grant date	Jun 30, 2020

Abstract

Embodiments described herein provide a chamber having a gas flow inlet guide to uniformly deliver process gas and a gas flow outlet guide to effectively purge process gasses and reduce purge time. The chamber includes a chamber body having a process gas inlet and a process gas outlet, a lid assembly, a process gas inlet and a process gas outlet configured to be in fluid communication with a processing region in the chamber, a gas flow inlet guide disposed in the process gas inlet, and a gas flow outlet guide disposed in the process gas outlet. The gas flow inlet guide includes a flow modulator and at least two first inlet guide channels having first inlet guide channel areas that are different. The gas flow outlet guide includes at least two first outlet guide channels having first outlet guide channel areas that are different.

First claim

What is claimed is:

1. A gas flow inlet guide, comprising:
a flow guide body having a top, a bottom, body sidewalls, a flow guide inlet, and a flow guide outlet; and
a flow modulator disposed within the flow guide body including at least one opening having a diameter and at least one first channel, the at least one first channel includes:
a first sidewall and a second sidewall extending along radii centered at the flow modulator, the first sidewall and the second sidewall having different lengths from the flow modulator to a first channel outlet disposed in the flow guide outlet, the first sidewall and the second sidewall have a sidewall width and a sidewall height;
a first channel area defined by the flow modulator, the first sidewall, the second sidewall, and the first channel outlet;
a first channel volume defined by the flow modulator, the first sidewall, the second sidewall, the first channel outlet, the bottom of the flow guide body, and the top of the flow guide body;
a first inlet width at the flow modulator from the first sidewall to the second sidewall;
a first outlet width at the first channel outlet from the first sidewall to the second sidewall; and
a first cross-sectional area defined by the first outlet width and the sidewall height, wherein a plenum is present between the flow modulator and the flow guide inlet.

2. The gas flow inlet guide of claim 1 , wherein the gas flow inlet guide is configured to be disposed in a process gas inlet within an atomic layer deposition (ALD) chamber.

3. The gas flow inlet guide of claim 1 , wherein the first channel area of at least two first channels is different.

4. The gas flow inlet guide of claim 1 , wherein the first channel volume of at least two first channels is different.

5. The gas flow inlet guide of claim 1 , wherein each first inlet width is substantially the same.

6. The gas flow inlet guide of claim 1 , wherein the first outlet width of at least two first channels is different.

7. The gas flow inlet guide of claim 1 , wherein the first cross-sectional area of at least two first channels is substantially the same.

8. The gas flow inlet guide of claim 1 , wherein the diameter of each opening is selected to account for differences of the first channel volume and the first channel area of at least two first channels.

9. A atomic layer deposition (ALD) chamber, comprising:
a chamber body having a process gas inlet and a process gas outlet;
a lid assembly disposed at an upper end of the chamber body;
a gas flow inlet guide comprising:
a flow guide body having a top, a bottom, body sidewalls, a flow guide inlet, and a flow guide outlet; and
a flow modulator disposed within the flow guide body including at least one opening having a diameter and at least one first channel, the at least one first channel includes:
a first sidewall and a second sidewall extending along radii centered at the flow modulator, the first sidewall and the second sidewall having different lengths from the flow modulator to a first channel outlet disposed in the flow guide outlet, the first sidewall and the second sidewall have a sidewall width and a sidewall height;
a first channel area defined by the flow modulator, the first sidewall, the second sidewall, and the first channel outlet;
a first channel volume defined by the flow modulator, the first sidewall, the second sidewall, the first channel outlet, the bottom of the flow guide body, and the top of the flow guide body;
a first inlet width at the flow modulator from the first sidewall to the second sidewall;
a first outlet width at the first channel outlet from the first sidewall to the second sidewall; and
a first cross-sectional area defined by the first outlet width and the sidewall height, wherein a plenum is present between the flow modulator and the flow guide inlet disposed in the process gas inlet; and

a gas flow outlet guide disposed in the process gas outlet, the gas flow outlet guide includes at least two first outlet guide channels having first outlet guide channel areas that are different.

10. The chamber of claim 9 , wherein the first channel volume of at least two first channels is different is different and the first cross-sectional area of the at least two first channels is different is substantially the same.

11. The chamber of claim 10 , wherein the diameter of each opening is selected to account for differences of the first channel volume and the first channel area of the at least two first channels.

12. The chamber of claim 9 , wherein at least two first outlet guide channels have first outlet guide channel volumes that are different.

13. The gas flow inlet guide of claim 9 , wherein the first channel area of at least two first channels is different.

14. The gas flow inlet guide of claim 9 , wherein the first channel volume of at least two first channels is different.

15. A gas flow inlet guide, comprising:
a flow guide body having a top, a bottom, body sidewalls, a flow guide inlet, and a flow guide outlet; and
a flow modulator disposed within the flow guide body including at least one opening having a diameter and at least one first channel, the at least one first channel includes:
a first sidewall and a second sidewall extending along radii centered at the flow modulator, the first sidewall and the second sidewall having different lengths from the flow modulator to a first channel outlet disposed in the flow guide outlet, the first sidewall and the second sidewall have a sidewall width and a sidewall height;
a first channel area defined by the flow modulator, the first sidewall, the second sidewall, and the first channel outlet;
a first channel volume defined by the flow modulator, the first sidewall, the second sidewall, the first channel outlet, the bottom of the flow guide body, and the top of the flow guide body;
a first inlet width at the flow modulator from the first sidewall to the second sidewall, each first inlet width is substantially the same;
a first outlet width at the first channel outlet from the first sidewall to the second sidewall; and
a first cross-sectional area defined by the first outlet width and the sidewall height, wherein a plenum is present between the flow modulator and the flow guide inlet.

16. The gas flow inlet guide of claim 15 , wherein the gas flow inlet guide is configured to be disposed in a process gas inlet within an atomic layer deposition (ALD) chamber.

17. The gas flow inlet guide of claim 15 , wherein the first channel area of at least two first channels is different.

18. The gas flow inlet guide of claim 15 , wherein the first channel volume of at least two first channels is different.

19. The gas flow inlet guide of claim 15 , wherein the diameter of each opening is selected to account for differences of the first channel volume and the first channel area of at least two first channels.

Assignees

• Applied Materials Inc

Inventors

• Kao Chien-Teh
• Kho Jeffrey A
• Rui Xiangxin
• Zhou Jianhua
• Kurita Shinichi
• Shao Shouqian
• Sun Guangwei

Classifications

• C23C16/45591

  Fixed means, e.g. wings, baffles · CPC title

• C23C16/45578

  Elongated nozzles, tubes with holes · CPC title

• C23C16/4412 Primary

  Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps · CPC title

• C23C16/45527

  characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations · CPC title

• C23C16/45544

  characterized by the apparatus · CPC title