System and method for providing a clean environment in an electron-optical system

Patent metadata

Field	Value
Publication number	US-10692692-B2
Application number	US-201615164273-A
Country	US
Kind code	B2
Filing date	May 25, 2016
Priority date	May 27, 2015
Publication date	Jun 23, 2020
Grant date	Jun 23, 2020

Abstract

An electron extractor of an electron source capable of absorbing contaminant materials from a cavity proximate to the extractor is disclosed. The electron extractor includes a body. The body of the electron extractor is formed from one or more non-evaporable getter materials. The one or more non-evaporable getter materials absorb one or more contaminants contained within a region proximate to the body of the electron extractor. The body of the electron extractor is further configured to extract electrons from one or more emitters posited proximate to the body of the electron extractor.

First claim

What is claimed is:

1. An apparatus for generating an electron beam comprising:
an electron source;
an electron-optical column including a set of electron-optical elements configured to direct the electron beam onto a sample; and
a detector assembly configured to detect an electron signal emanating from a surface of the sample, wherein the electron source includes an electron extractor, wherein a body of the electron extractor comprises a bulk volume of a non-evaporable getter material having a non-uniform thickness to absorb one or more contaminants located within a cavity of the electron source, wherein the non-evaporable getter material has a non-zero porosity level providing surface area within the body of the electron extractor for absorbing one or more contaminants, wherein the body of the electron extractor includes a rounded portion, wherein a top part of the rounded portion is oriented towards one or more emitters of the electron source.

2. The apparatus of claim 1 , wherein the apparatus is a scanning electron microscopy system.

3. The apparatus of claim 2 , wherein the apparatus is a miniature scanning electron microscopy system.

4. The apparatus of claim 1 , wherein the one or more contaminants include at least one of a volatile organic compound or water vapor.

5. The apparatus of claim 1 , wherein the non-evaporable getter material includes at least one of zirconium, vanadium, cobalt, aluminum, ruthenium, thorium, iron, molybdenum, or boron.

6. The apparatus of claim 1 , wherein the selected porosity level is between 0.05 and 0.95 of the theoretical density of an electron-optical element of the set of electron-optical elements.

7. An electron extractor for absorbing contaminants comprising:
a body, wherein the body of the electron extractor comprises a bulk volume of one or more non-evaporable getter materials having a non-uniform thickness to absorb one or more contaminants contained within a region proximate to the body of the electron extractor, wherein the one or more non-evaporable getter materials have a non-zero porosity level providing surface area within the body of the electron extractor for absorbing the one or more contaminants, wherein the body of the electron extractor includes a rounded portion, wherein a top part of the rounded portion is oriented towards one or more emitters, wherein the body of the electron extractor is further configured to extract electrons from the one or more emitters.

8. The electron extractor of claim 7 , wherein the electron extractor comprises:
an opening; and
a beam-defining aperture configured to control angular trajectories of electrons in an electron beam.

9. The electron extractor of claim 8 , wherein the electron extractor comprises:
a converging portion between the opening and the beam-defining aperture.

10. The electron extractor of claim 8 , wherein the rounded portion is positioned laterally between the opening and an outer edge of the electron extractor.

11. The electron extractor of claim 10 , wherein the electron extractor comprises:
an outer sloped surface between the rounded portion and an outer radius of the electron extractor.

12. The electron extractor of claim 7 , wherein the body of the electron extractor is formed from at least one of an electrically conductive material.

13. The electron extractor of claim 7 , wherein the electron extractor is formed from a non-electrically conductive material.

14. The electron extractor of claim 7 , wherein the body of the electron extractor is formed via at least one of a mechanical process, a powder metallurgical process, a casting process, an extrusion process, an optical process, or an additive manufacturing process.

15. A method for forming an electron-optical element that serves as a contaminant getter comprising:
providing a non-evaporable getter material for absorbing one or more contaminants contained within a region proximate to the non-evaporable getter material; and
forming an electron extractor with the provided non-evaporable getter material, wherein a body of the electron extractor comprises a bulk volume of the non-evaporable getter material having a non-uniform thickness and a non-zero porosity level providing a surface area within the body of the electron extractor for absorbing the one or more contaminants, wherein the electron extractor includes a rounded entrance portion for receiving electrons from one or more emitters of an electron source.

16. An apparatus for generating an electron beam comprising:
an electron source;
an electron-optical column including a set of electron-optical elements configured to direct the electron beam onto a sample; and
a detector assembly configured to detect an electron signal emanating from a surface of the sample, wherein at least one of the electron-optical column or the detector assembly includes an electron-optical element, wherein a body of the electron-optical element comprises a bulk volume of a non-evaporable getter material having a non-uniform thickness to absorb one or more contaminants located within a cavity of at least one of the electron-optical column or the detector assembly, wherein the non-evaporable getter material has a non-zero porosity level providing surface area within the body of the electron-optical element for absorbing the one or more contaminants.

17. The apparatus of claim 1 , wherein an absorption state of the electron extractor formed from a non-evaporable getter material is activatable by at least one of resistive heating, inductive heating, or optical heating.

Assignees

• Kla Tencor Corp

Inventors

• Schultz William G
• Delgado Gildardo
• Rose Garry A

Classifications

• H01J37/065

  Construction of guns or parts thereof (H01J37/067 - H01J37/077 take precedence) · CPC title

• H01J7/18

  Means for absorbing or adsorbing gas, e.g. by gettering · CPC title

• H01J3/40

  Arrangements for removing or diverting unwanted particles, e.g. for negative ions or fringing electrons; Arrangements for velocity or mass selection · CPC title

• H01J2237/182

  Obtaining or maintaining desired pressure · CPC title

• H01J3/027

  Construction of the gun or parts thereof (H01J3/021 - H01J3/025, H01J3/026 and H01J3/028 take precedence) · CPC title