Pressure sensor array and the method of making

Patent metadata

Field	Value
Publication number	US-10690559-B1
Application number	US-201815938731-A
Country	US
Kind code	B1
Filing date	Mar 28, 2018
Priority date	Mar 28, 2018
Publication date	Jun 23, 2020
Grant date	Jun 23, 2020

Abstract

An electronic pressure sensor array has a plurality of conductive electrodes and interconnects selectively formed on a pressure sensor substrate to form a plurality of individual pressure sensor assemblies. The individual pressure sensor assemblies can be aligned in various configurations to form the electronic pressure sensor array. Each pressure sensor assembly is made of a plurality of layers including a pressure sensor substrate, insulating layers on either side of the pressure sensor substrate, and conductive ink layers on an outer surface of each insulating layer. A cavity is formed in each insulating layer, the cavity in one insulating layer being vertically aligned with the cavity in the other insulating layer, and conductive ink fills each cavity to form electrodes.

First claim

What is claimed is:

1. A pressure sensor assembly comprising:
a. a pressure sensitive conductive substrate configured to enable a current through the pressure sensitive conductive substrate in response to an applied pressure;
b. a first dielectric layer having a first surface coupled to a first surface of the pressure sensitive conductive substrate, wherein the first dielectric layer has a first through hole that forms a first cavity;
c. a second dielectric layer having a first surface coupled to a second surface of the pressure sensitive conductive substrate, wherein the second dielectric layer has a second through hole that forms a second cavity, further wherein the second cavity is vertically aligned with the first cavity;
d. a first electrode formed in the first cavity and electrically coupled to the pressure sensitive conductive substrate;
e. a second electrode formed in the second cavity and electrically coupled to the pressure sensitive conductive substrate;
f. a first conductive interconnect coupled to the first electrode and selectively patterned on a second surface of the first dielectric layer; and
g. a second conductive interconnect coupled to the second electrode and selectively patterned on a second surface of the second dielectric layer.

2. The pressure sensor assembly of claim 1 wherein the pressure sensor conductive substrate comprises a carbon embedded sheet.

3. The pressure sensor assembly of claim 1 wherein the pressure sensor conductive substrate comprises a piezo resistive element.

4. The pressure sensor assembly of claim 1 wherein the pressure sensor conductive substrate has a resistivity that changes with applied pressure.

5. The pressure sensor assembly of claim 1 wherein the first electrode and the second electrode are each made of electrically conductive ink.

6. The pressure sensor assembly of claim 5 wherein the electrically conductive ink comprises one of a silver ink, a copper ink or a carbon ink.

7. The pressure sensor assembly of claim 1 wherein the first conductive interconnect and the second conductive interconnect are each made of electrically conductive ink.

8. The pressure sensor assembly of claim 1 wherein the first dielectric layer and the second dielectric layer are each made of a polymer material.

9. The pressure sensor assembly of claim 1 wherein the first dielectric layer and the second dielectric layer are each made of a thermoplastic polyurethane film.

10. The pressure sensor assembly of claim 1 further comprising a current detection circuit coupled to one of the first conductive interconnect or the second conductive interconnect, wherein a current detected by the current detection circuit corresponds to the current flowing through the pressure sensitive conductive substrate.

11. The pressure sensor assembly of claim 10 further comprising processing circuitry coupled to the current detection circuit, wherein the processing circuitry is configured to determine the applied pressure according to the detected current.

12. A pressure sensor array comprising:
a. a pressure sensitive conductive substrate configured to enable a current through the pressure sensitive conductive substrate in response to an applied pressure;
b. a first dielectric layer having a first surface coupled to a first surface of the pressure sensitive conductive substrate, wherein the first dielectric layer has a plurality of first through holes that form a plurality of first cavities;
c. a second dielectric layer having a first surface coupled to a second surface of the pressure sensitive conductive substrate, wherein the second dielectric layer has a plurality of second through holes that form a plurality of second cavities, further wherein each second cavity is vertically aligned with a corresponding one first cavity;
d. a plurality of first electrodes, each first electrode is formed in one of the plurality of first cavities and electrically coupled to the pressure sensitive conductive substrate;
e. a plurality of second electrodes, each second electrode is formed in one of the plurality of second cavities and electrically coupled to the pressure sensitive conductive substrate;
f. a plurality of first conductive interconnects, each first conductive interconnect is coupled to one of the plurality of first electrodes and selectively patterned on a second surface of the first dielectric layer; and
g. a plurality of second conductive interconnects, each second conductive interconnect is coupled to one of the plurality of second electrode and selectively patterned on a second surface of the second dielectric layer.

13. The pressure sensor array of claim 12 wherein each of the plurality of first conductive interconnects are electrically isolated from each other.

14. The pressure sensor array of claim 13 wherein each of the plurality of second conductive interconnects are electrically connected to each other.

15. The pressure sensor array of claim 14 further comprising a plurality of current detection circuits, one of the plurality of current detection circuits coupled to a corresponding one first conductive interconnect.

16. The pressure sensor assembly of claim 15 further comprising a processing circuitry coupled to the plurality of current detection circuits, wherein each vertically aligned first electrode and second electrode and a portion of the pressure sensitive conductive substrate therebetween correspond to an individual pressure sensor assembly, further wherein the processing circuitry is configured to determine the applied pressure at each individual pressure sensor assembly according to the detected current at each of the plurality of current detection circuits.

17. The pressure sensor array of claim 12 where the plurality of first conductive interconnects are organized as a plurality of first subgroups, the first conductive interconnects of each first subgroup are electrically connected to each other and electrically isolated from the first conductive interconnects of all other first subgroups.

18. The pressure sensor array of claim 15 where the plurality of second conductive interconnects are organized as a plurality of second subgroups, the second conductive interconnects of each second subgroup are electrically connected to each other and electrically isolated from the second conductive interconnects of all other second subgroups.

19. The pressure sensor array of claim 18 further comprising a plurality of current detection circuits, one of the plurality of current detection circuits for and coupled to each first subgroup and each second subgroup.

20. The pressure sensor assembly of claim 19 further comprising processing circuitry coupled to the plurality of current detection circuits, wherein each vertically aligned first electrode and second electrode and a portion of the pressure sensitive conductive substrate therebetween correspond to an individual pressure sensor assembly, further wherein the processing circuitry is configured to determine the applied pressure at each individual pressure sensor assembly according to the detected current at each of the plurality of current detection circuits.

21. The pressure sensor array of claim 12 wherein the pressure sensor conductive substrate comprises a carbon embedded sheet.

22. The pressure sensor array of claim 12 wherein the pressure sensor conductive substrate comprises a piezo resistive element.

23. The pressure sensor array of claim 12 wherein the pressure sens

Assignees

• Flex Ltd

Inventors

• Liu Weifeng
• Lian Jie
• Feng Zhen
• Mohammed Anwar
• Kurwa Murad

Classifications

• G01L5/16 Primary

  for measuring several components of force · CPC title

• G01L1/18

  using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material · CPC title

• H01M4/02

  Electrodes composed of, or comprising, active material · CPC title