MEMS mirror driven by dual pulse drive signal

Patent metadata

Field	Value
Publication number	US-10684465-B2
Application number	US-201715722444-A
Country	US
Kind code	B2
Filing date	Oct 2, 2017
Priority date	Oct 2, 2017
Publication date	Jun 16, 2020
Grant date	Jun 16, 2020

Abstract

Described herein is a device including mirror control circuitry for controlling a movable mirror. The mirror control circuitry includes drive circuitry for providing a drive signal to the movable mirror, and a processor. The processor cause the drive circuitry to generate the drive signal so as to have pulses with leading edges occurring an offset period of time after a maximum opening angle of the movable mirror and trailing edges occurring an offset period of time before a zero crossing of the movable mirror. The processor may sample a mirror sense signal from the movable mirror at times at which a derivative of capacitance of the movable mirror with respect to time is zero, and then perform an action based upon the samples.

First claim

The invention claimed is:

1. A method of driving a movable mirror, comprising:
generating a drive signal for the movable mirror so as to have a respective different pulse generated an offset period of time after each time at which an opening angle of the movable mirror is at a maximum or a minimum;
sampling a mirror sense signal from the movable mirror at least twice during each period of the drive signal; and
performing at least one action as a function of the sampled mirror sense signal.

2. The method of claim 1 , wherein generating the drive signal comprises generating the drive signal having a respective pulse transition from deasserted to asserted an offset period of time after each time at which the opening angle of the movable mirror is at the maximum or the minimum.

3. The method of claim 1 , further comprising determining a phase between the mirror sense signal and the drive signal as a function of the sampled mirror sense signal; and wherein performing the at least one action comprises adjusting the drive signal such that the determined phase matches a given phase.

4. The method of claim 1 , further comprising determining whether the movable mirror has failed as a function of the sampled mirror sense signal; and wherein performing the at least one action comprises generating a flag indicating that the movable mirror has failed.

5. The method of claim 2 , wherein the offset period of time is greater than 0 but less than 5% between a pulse transition from deasserted to asserted and each time at which the opening angle of the movable mirror is at the maximum.

6. The method of claim 2 , wherein the offset period of time is greater than 0 but less than 10% between a pulse transition from asserted to deasserted and each time at which the opening angle of the movable mirror is at the minimum.

7. The method of claim 1 , wherein a shape of each pulse of the drive signal is trapezoidal.

8. The method of claim 1 , wherein a duty cycle of the drive signal is less than one quarter of a period of oscillation of the movable mirror.

9. The method of claim 1 , wherein the drive signal is generated so as to have two pulses per each period of oscillation of the movable mirror.

10. A device, comprising:
mirror control circuitry configured to control a movable mirror, the mirror control circuitry comprising:
drive circuitry configured to provide a drive signal to the movable mirror;
a processor configured to:
cause the drive circuitry to generate the drive signal for the movable mirror so as to have a respective different pulse generated an offset period of time after each time at which an opening angle of the movable mirror is at a maximum or a minimum;
sample a mirror sense signal from the movable mirror at least twice during each period of the drive signal; and
perform at least one action as a function of the sampled mirror sense signal.

11. The device of claim 10 , wherein the processor generates the drive signal so as to have a respective pulse transition from deasserted to asserted an offset period of time after each time at which the opening angle of the movable mirror is at the maximum or a minimum.

12. The device of claim 10 , wherein the offset period of time is greater than 0 but less than 5% between a pulse transition from deasserted to asserted and each time at which the opening angle of the movable mirror is at the maximum.

13. The device of claim 10 , wherein the offset period of time is greater than 0 but less than 10% between a pulse transition from asserted to deasserted and each time at which the opening angle of the movable mirror is at the minimum.

14. The device of claim 10 , wherein the processor is further configured to determine a phase between the mirror sense signal and the drive signal as a function of the sampled mirror sense signal; and wherein the at least one action performed by the processor is to adjust the drive signal such that the determined phase matches a certain phase.

15. The device of claim 10 , wherein the processor is further configured to determine whether the movable mirror has failed as a function of the sampled mirror sense signal; and wherein the at least one action performed by the processor is to generate a flag indicating that the movable mirror has failed.

16. The device of claim 10 , wherein the movable mirror comprises an oscillating micromirror.

17. The device of claim 10 , wherein a shape of each pulse of the drive signal is generated by the drive circuitry so as to be trapezoidal.

18. The device of claim 10 , wherein the processor causes the drive circuitry to generate the drive signal so as to have a duty cycle of less than one quarter of a period of oscillation of the movable mirror.

19. The device of claim 10 , wherein the processor causes the drive circuitry to generate the drive signal so as to have two pulses per each period of oscillation of the movable mirror.

Assignees

• St Microelectronics Ltd

Inventors

• Kinstlich Sivan
• Duvdevany Offir

Classifications

• G02B26/122

  Control of the scanning speed of the polygonal mirror · CPC title

• G02B26/0833 Primary

  the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B) · CPC title

• G02B26/105 Primary

  with one or more pivoting mirrors or galvano-mirrors (G02B26/101 takes precedence) · CPC title