Air bearing with variable air delivery

Patent metadata

Field	Value
Publication number	US-10683894-B2
Application number	US-201815935052-A
Country	US
Kind code	B2
Filing date	Mar 25, 2018
Priority date	Mar 31, 2017
Publication date	Jun 16, 2020
Grant date	Jun 16, 2020

Abstract

An air bearing for movably bearing at least two elements includes a bearing main body with a first air outflow channel and a second air outflow channel. The first air outflow channel is supplied with air via at least one first air delivery device. The second air outflow channel is supplied with air via at least one second air delivery device. A sensor detects at least one of a bearing stroke, a bearing pressure, and a bearing throughflow, and a controller adjusts the supply of the air to at least one of the first air outflow channel and the second air outflow channel in accordance with the at least one of the bearing stroke, the bearing pressure, and the bearing throughflow.

First claim

What is claimed is:

1. An air bearing for movably bearing at least two elements with an air gap therebetween, the air bearing comprising:
a first air delivery device;
a second air delivery device; and
a bearing main body having a first air outflow channel and a second air outflow channel each being configured to discharge air to an atmosphere through the air gap, the first air outflow channel being supplied with air via the first air delivery device, the second air outflow channel being supplied with the air via the second air delivery device, and the first and second air outflow channels extending on a planar surface of the bearing main body.

2. The air bearing of claim 1 , wherein the first air outflow channel and the second air outflow channel are configured to be fluidically separate from each other.

3. The air bearing of claim 1 , wherein the first air outflow channel and the second air outflow channel are supplied with the air separately from each other.

4. The air bearing of claim 1 , further comprising:
at least one air delivery bore, wherein at least one of the first air outflow channel and the second air outflow channel are supplied with the air via the at least one air delivery bore.

5. The air bearing of claim 1 , wherein the first air outflow channel is arranged in a first region of the bearing main body, and the second air outflow channel is arranged in a second region of the bearing main body.

6. The air bearing of claim 1 , further comprising at least one valve configured to control a supply of air to at least one of the first air outflow channel and the second air outflow channel.

7. The air bearing of claim 1 , further comprising at least one controller configured to adjust the supply of the air to at least one of the first air outflow channel and the second air outflow channel.

8. The air bearing claim 7 , further comprising:
at least one sensor configured to detect at least one of a bearing stroke, a bearing pressure, and a bearing throughflow, and
wherein the at least one controller is configured to adjust the supply of the air to at least one of the first air outflow channel and the second air outflow channel in accordance with the at least one of the bearing stroke, the bearing pressure, and the bearing throughflow.

9. The air bearing of claim 1 , wherein:
the first and second air outflow channels have at least one of a rectangular shape, a square shape, or a circular shape, and
the first and second air outflow channels are concentric.

10. A coordinate measuring apparatus comprising:
at least one air bearing for movably bearing at least two elements with an air gap therebetween, the air bearing including:
a first air delivery device;
a second air delivery device; and
a bearing main body having a first air outflow channel and a second air outflow channel each being configured to discharge air to an atmosphere through the air gap, the first air outflow channel being supplied with air via the first air delivery device, the second air outflow channel being supplied with the air via the second air delivery device, and the first and second air outflow channels extending on a planar surface of the bearing main body.

11. The coordinate measuring apparatus of claim 10 , wherein the air bearing further includes:
at least one air delivery bore, wherein at least one of the first air outflow channel and the second air outflow channel are supplied with the air via the at least one air delivery bore.

12. The coordinate measuring apparatus of claim 10 , wherein the air bearing further includes:
at least one sensor configured to detect at least one of a bearing stroke, a bearing pressure, and a bearing throughflow, and
at least one controller configured to adjust the supply of the air to at least one of the first air outflow channel and the second air outflow channel in accordance with the at least one of the bearing stroke, the bearing pressure, and the bearing throughflow.

13. The coordinate measuring apparatus of claim 10 , further comprising a carrier device and a measuring system movably mounted by the air bearing.

14. A method for operating an air bearing for movably bearing at least two elements with an air gap therebetween, the method comprising:
providing a first air outflow channel and a second air outflow channel each being configured to discharge air to an atmosphere through the air gap, the first and second air outflow channels extending on a planar surface of a bearing main body;
supplying air to the first air outflow channel of the air bearing via a first air delivery device; and
supplying the air to the second air outflow channel of the air bearing via a second air delivery device.

15. The method of claim 14 , further comprising:
detecting at least one of a bearing stroke, a bearing pressure, and a bearing throughflow; and
supplying at least one of the first air outflow channel and the second air outflow channel with the air according to the detected at least one of the bearing stroke, the bearing pressure, and the bearing throughflow.

16. The method of claim 14 , wherein the first air outflow channel and the second air outflow channel are configured to be fluidically separate from each other.

17. The method of claim 14 , wherein the first air outflow channel and the second air outflow channel are supplied with the air separately from each other.

18. The method of claim 14 , wherein the air bearing further includes:
at least one air delivery bore, wherein at least one of the first air outflow channel and the second air outflow channel are supplied with the air via the at least one air delivery bore.

19. The method of claim 14 , wherein the first air outflow channel is arranged in a first region of the bearing main body, and the second air outflow channel is arranged in a second region of the bearing main body.

20. The method of claim 14 , wherein the air bearing further includes at least one valve configured to control a supply of air to at least one of the first air outflow channel and the second air outflow channel.

Assignees

• Zeiss Carl Industrielle Messtechnik Gmbh

Inventors

• Langmack Malte
• Strauss Steffen
• Strauss Wolfgang
• Koch Raphael
• Poglitsch Christof
• Hofmann Holger
• Zeller Nikolai

Classifications

• F16C2370/00

  Apparatus relating to physics, e.g. instruments · CPC title

• F16C32/0662

  Details of hydrostatic bearings independent of fluid supply or direction of load · CPC title

• F16C32/067

  of bearings adjustable for aligning, positioning, wear or play · CPC title

• F16C32/0622 Primary

  via nozzles, restrictors · CPC title

• G01B21/04

  by measuring coordinates of points · CPC title