Gas branching apparatus and method for manufacturing fine glass particle deposited body using the same

Patent metadata

Field	Value
Publication number	US-10683230-B2
Application number	US-201715621446-A
Country	US
Kind code	B2
Filing date	Jun 13, 2017
Priority date	Jan 8, 2015
Publication date	Jun 16, 2020
Grant date	Jun 16, 2020

Abstract

A gas branching apparatus that branches and supplies a gas to first to N-th supply targets, includes first to N-th pipes wherein the first to N-th pipes are each branched into first to N-th branch pipes on a downstream end side, and wherein the i-th branch pipes of the respective first to N-th pipes are connected in common to the i-th supply target, and the i-th branch pipes of the respective first to N-th pipes are provided with valves, respectively, where i denotes each of integers of 1 to N.

First claim

What is claimed is:

1. A gas branching apparatus that branches and supplies a gas to first to N-th supply targets (where N is an integer of 2 or more), comprising:
a controller; and
first to N-th pipes,
wherein the first to N-th pipes are each branched into first to N-th branch pipes on a downstream end side,
wherein the i-th branch pipes of the respective first to N-th pipes are connected in common to the i-th supply target, and the i-th branch pipes of the respective first to N-th pipes are provided with respective valves, where i denotes each of integers of 1 to N,
wherein the gas branching apparatus is arranged between a mass flow controller and the first N-th supply targets,
wherein the controller is configured to control opening and closing of the valves provided on the first to N-th branch pipes of the first to N-th pipes, and
wherein the controller controls the opening and closing of the valves while satisfying a first condition where one of the N valves provided on the first to N-th branch pipes of the j-th pipe is set to an opened state and the rest are set to a closed state, where j notes each of integers of 1 to N, and satisfying a second condition where one of the N valves provided on the k-th branch pipes of the respective first to N-th pipes is set to the opened state and the rest are set to the closed state, where k denotes each of integers of 1 to N.

2. The gas branching apparatus according to claim 1 , wherein
the controller controls the opening and closing of the valves so as to randomly switch the opened and closed states of the valves.

3. The gas branching apparatus according to claim 1 , wherein
the controller controls opening and closing of the valves so as to regularly switch the opened and closed states of the valves.

4. The gas branching apparatus according to claim 1 , further comprising:
a flow divider provided upstream of the first to N-th pipes,
wherein the flow divider includes first to N-th gas outlets through which the gas is branched and discharged, and upstream ends of the first to N-th pipes are connected to the first to N-th gas outlets, respectively.

5. The gas branching apparatus according to claim 4 ,
wherein the flow divider is designed so as to have an equal branching ratio of the gas to the first to N-th gas outlets.

6. The gas branching apparatus according to claim 1 ,
wherein the first to N-th supply targets are arranged along a longitudinal direction of a long object.

Assignees

• Furukawa Electric Co Ltd

Inventors

• Takahashi Tadashi

Classifications

• C03B37/01413 Primary

  Reactant delivery systems (C03B37/01807 takes precedence; devices therefor in general B01D1/00, B01J4/00) · CPC title

• C03B2207/81

  Constructional details of the feed line, e.g. heating, insulation, material, manifolds, filters · CPC title

• F23N2237/02

  two or more burners · CPC title

• C03B37/0142 Primary

  Reactant deposition burners · CPC title

• C03B2207/70

  Control measures · CPC title