Substrates comprising nano-patterning surfaces and methods of preparing thereof

Patent metadata

Field	Value
Publication number	US-10682829-B2
Application number	US-201415025866-A
Country	US
Kind code	B2
Filing date	Dec 17, 2014
Priority date	Dec 19, 2013
Publication date	Jun 16, 2020
Grant date	Jun 16, 2020

Abstract

Substrates comprising a functionalizable layer, a polymer layer comprising a plurality of micro-scale or nano-scale patterns, or combinations thereof, and a backing layer and the preparation thereof by using room-temperature UV nano-embossing processes are disclosed. The substrates can be prepared by a roll-to-roll continuous process. The substrates can be used as flow cells, nanofluidic or microfluidic devices for biological molecules analysis.

First claim

What is claimed is:

1. A substrate comprising:
a functionalizable layer;
a UV-cured polymer layer comprising a plurality of micro-scale or nano-scale patterns, or combinations thereof; and
a backing layer;
wherein the micro-scale or nano-scale patterns of the UV-cured polymer layer comprise channels, trenches, wells, posts, or combinations thereof;
wherein the functionalizable layer comprises a reaction product of a functionalizable polymer and a layer of condensed norbornene silane, wherein the functionalizable polymer comprises one or more functional groups selected from the group consisting of azide, optionally substituted alkene, optionally substituted hydrazone, optionally substituted tetrazole, optionally substituted tetrazine and thiol; and
wherein the UV-cured polymer layer comprises at least one photocurable polymer and is free of photoresist.

2. The substrate of claim 1 , wherein the functionalizable layer is disposed between the backing layer and the UV-cured polymer layer.

3. The substrate of claim 2 , wherein at least a portion of the UV-cured polymer layer is perforated to expose the underlying functionalizable layer in micro-scale or nano-scale patterns.

4. The substrate of claim 1 , wherein the UV-cured polymer layer is disposed between the backing layer and the functionalizable layer.

5. The substrate of claim 4 , wherein the functionalizable layer comprises a plurality of micro-scale or nano-scale patterns, or combinations thereof, wherein at least a portion of the functionalizable layer is perforated to expose the underlying UV-cured polymer layer in micro-scale or nano-scale patterns.

6. The substrate of claim 1 , wherein the substrate further comprises a sealing layer to substantially seal the UV-cured polymer layer and the functionalizable layer between the backing layer and said sealing layer.

7. The substrate of claim 1 , wherein at least one of the micro-scale or nano-scale patterns is capable of admitting a sample fluid.

8. The substrate of claim 1 , wherein the functionalizable polymer comprises poly(N-(5-azidoacetamidylpentyl) acrylamide-co-acrylamide) (PAZAM).

9. The substrate of claim 1 , wherein the functionalizable layer is covalently attached to biomolecules selected from the group consisting of amino acids, nucleosides, nucleotides, peptides, oligonucleotides, polynucleotides, nucleic acids, and proteins, and combinations thereof via reaction of the one or more functional groups with the biomolecules.

10. The substrate of claim 9 , wherein the biomolecules are polynucleotides or nucleic acids.

11. The substrate of claim 1 , wherein the photocurable polymer comprises a urethane, an acrylate, a silicone, an epoxy, a polyacrylic acid, a polyacrylate, an epoxysilicone, an epoxy resin, polydimethylsiloxane (PDMS), a silsesquioxane, an acyloxysilane, a maleate polyester, a vinyl ether, or a monomer with vinyl or ethynyl groups, or a copolymer or a combination thereof.

12. The substrate of claim 1 , wherein each of the backing layer, the functionalizable layer, and the UV-cured polymer layer is no more than about 1 mm in thickness.

13. The substrate of claim 1 , wherein at least one of the backing layer, the UV-cured polymer layer, or the functionalizable layer is further doped with a dopant material selected from the group consisting of nanoparticles, Q dots, binding receptors, ligands, nucleic acids, reactive moieties in the functionalizable layer, optical filter materials, lighter absorbing materials, light emitting materials, light scattering materials, electrical conductive materials, and thermally conductive materials, and combinations thereof.

14. The substrate of claim 1 , wherein the one or more functional groups are azide.

15. The substrate of claim 3 , wherein the functionalizable layer comprises a plurality of micro-scale or nano-scale patterns, or combinations thereof, and at least a portion of the UV-cured polymer and functionalizable layers is perforated to expose the underlying backing layer in micro-scale or nanoscale patterns.

16. The substrate of claim 5 , wherein at least a portion of the functionalizable and the UV-cured polymer layers is perforated to expose the underlying backing layer in micro-scale or nano-scale patterns.

17. The substrate of claim 5 , wherein the functionalizable polymer comprises poly(N-(5-azidoacetamidylpentyl) acrylamide-co-acrylamide) (PAZAM).

18. The substrate of claim 1 , wherein at least a portion of the micro-scale or nano-scale patterns are posts, and wherein the posts have an average diameter or an average height of less than about 500 nm.

19. A substrate comprising:
a functionalizable layer;
a UV-cured polymer layer comprising a plurality of micro-scale or nano-scale patterns, or combinations thereof; and
a backing layer;
wherein the UV-cured polymer layer comprises at least one photocurable polymer;
wherein the functionalizable layer comprises a reaction product of a condensed norbornen silane and a functionalizable polymer, wherein the functionalizable polymer comprises one or more functional groups capable of attaching to biomolecules, and wherein the functionalizable polymer comprises Formula (Ia):

R 1 is H or optionally substituted alkyl;
R A is selected from the group consisting of azide, optionally substituted alkene, optionally substituted hydrazone, optionally substituted tetrazole, optionally substituted tetrazine, and thiol;
R 5 is H or optionally substituted alkyl;
each of the —(CH 2 )-p is optionally substituted;
p is an integer in the range of 1 to 50;
n is an integer in the range of 1 to 50,000; and
m is an integer in the range of 1 to 100,000.

20. The substrate of claim 19 , wherein the functionalizable polymer comprises poly(N-(5-azidoacetamidylpentyl) acrylamide-co-acrylamide) (PAZAM).

21. The substrate of claim 19 , wherein UV-cured polymer layer comprises a polyurethane, an acrylate, a silicone, an epoxy, a polyacrylic acid, a polyacrylate, an epoxysilicone, an epoxy resin, polydimethylsiloxane (PDMS), a silsesquioxane, an acyloxysilane, a maleate polyester, a vinyl ether, or a monomer with vinyl or ethynyl groups, or a copolymer or a combination thereof.

22. The substrate of claim 19 , wherein at least a portion of the micro-scale or nano-scale patterns are posts, and wherein the posts have an average diameter or an average height of less than about 500 nm.

23. The substrate of claim 19 , further comprises a sealing layer to substantially seal the UV-cured polymer layer and the functionalizable layer between the backing layer and the sealing layer.

Assignees

• Illumina Inc

Inventors

• Bowen M Shane
• Venkatesan Bala Murali
• Barnard Steven M

Classifications

• G03F7/0002 Primary

  Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title

• B29K2105/0085

  Copolymers · CPC title

• B32B3/30

  characterised by a layer formed with recesses or projections, e.g. {hollows, grooves, protuberances, ribs (apertured layer B32B3/266; layer with cavities or internal voids B32B3/26)} · CPC title

• B81B2203/0361

  Tips, pillars · CPC title

• B81B2203/03

  Static structures · CPC title