Motor attachment bracket, motor attachment structure, and substrate processing apparatus

Patent metadata

Field	Value
Publication number	US-10680496-B2
Application number	US-201815875370-A
Country	US
Kind code	B2
Filing date	Jan 19, 2018
Priority date	Jan 30, 2017
Publication date	Jun 9, 2020
Grant date	Jun 9, 2020

Abstract

Various examples, relating to motor attachment, a motor attachment structure, substrate processing apparatus are disclosed. The present disclosure exemplifies a motor attachment bracket including a plate-shaped motor mounting portion which an output shaft insertion hole through which an output shaft of a motor is inserted penetrates, and to which the motor the output shaft of which is inserted through the output shaft insertion hole is fixed. A fluid path in which a cooling fluid is circulated is formed in a metal member formed with the motor mounting portion, a motor attachment structure using the motor attachment bracket, and a substrate processing apparatus.

First claim

What is claimed is:

1. A substrate processing apparatus comprising:
a motor accommodation case inside a processing chamber where polishing or cleaning of a substrate is performed,
wherein the motor accommodation case accommodates a motor attachment bracket comprising:
a flat motor mount having a first side facing a motor and a second side opposite the first side;
an output shaft insertion hole extending through the first side and the second side of the motor mount through which an output shaft of the motor extends; and
a fluid path in which a cooling fluid is circulated,
wherein the first side of the motor mount is fixed to the motor and the fluid path is positioned between the second side of the motor mount and the motor, and
the second side of the motor mount of the motor attachment bracket is fixed to a motor attachment wall provided in the motor accommodation case to be disposed along the motor attachment wall, the motor is fixed to the first side of the motor mount which is opposite to the motor attachment wall, and the output shaft of the motor extends through the output shaft insertion hole in the motor mount and a shaft insertion hole formed in the motor attachment wall.

2. The substrate processing apparatus of claim 1 , wherein the second side of the motor mount of the motor attachment bracket is fixed to a support to be disposed along a surface of the support, the first side of the motor mount is opposite to the support, and the output shaft of the motor extends through a shaft insertion hole formed in the support via the output shaft insertion hole in the motor mount.

3. The substrate processing apparatus of claim 1 , further comprising:
a fluid inlet and a fluid outlet which are formed on outer sides of the motor mount, respectively.

4. The substrate processing apparatus of claim 1 , wherein the motor attachment bracket is made of metal.

5. The substrate processing apparatus of claim 1 , wherein the motor attachment bracket is located inside the motor accommodation case accommodating the motor, and
the motor accommodation case is housed in a housing forming the processing chamber.

6. A substrate processing apparatus comprising:
a motor accommodation case inside a processing chamber where polishing or cleaning of a substrate is performed, the motor accommodating case including a motor attachment wall provided in the motor accommodation case,
wherein the motor accommodation case accommodates a motor attachment bracket comprising:
a flat motor mount having a first side and a second side opposite the first side;
an output shaft insertion hole extending through the first side and the second side of the motor mount through which an output shaft of a motor extends; and
a fluid path in which a cooling fluid is circulated,

wherein the second side of the motor mount is fixed to the motor attachment wall to be disposed along the motor attachment wall, the motor is fixed to the first side of the motor mount which is opposite to the motor attachment wall, and the output shaft of the motor extends through the output shaft insertion hole in the motor mount and a shaft insertion hole formed in the motor attachment wall.

7. The substrate processing apparatus of claim 6 , wherein the motor attachment bracket is made of metal.

8. The substrate processing apparatus of claim 6 , further comprising:
a cooling portion extending from the motor mount and having the fluid path disposed therein.

9. The substrate processing apparatus of claim 8 , wherein the cooling portion extends from the motor mount to be perpendicular to the motor.

Assignees

• Ebara Corp

Inventors

• Tanaka Hideaki

Classifications

• H02K9/19 Primary

  for machines with closed casing and closed-circuit cooling using a liquid cooling medium, e.g. oil · CPC title

• H01L23/367

  Electricity · mapped topic

• H02K2205/00

  Specific aspects not provided for in the other groups of this subclass relating to casings, enclosures, supports · CPC title

• H02K5/20

  with channels or ducts for flow of cooling medium · CPC title

• H02K2209/00

  Specific aspects not provided for in the other groups of this subclass relating to systems for cooling or ventilating · CPC title