ESD protection device and method for manufacturing the same

Patent metadata

Field	Value
Publication number	US-10680415-B2
Application number	US-201816055192-A
Country	US
Kind code	B2
Filing date	Aug 6, 2018
Priority date	Apr 13, 2016
Publication date	Jun 9, 2020
Grant date	Jun 9, 2020

Abstract

An ESD protection device includes first and second discharge electrodes and a discharge auxiliary electrode that is electrically connected to the first and second discharge electrodes. The first and second discharge electrodes are located on or in an insulating substrate to at least partially face each other. The discharge auxiliary electrode includes first metal particles, second metal particles, and a binding agent. The first metal particles have a core-shell structure including a core section mainly including a first metal and a shell section which mainly includes an oxide of a second metal and which includes at least one portion with a cavity. The second metal particles have a core-shell structure including a core section mainly including the first metal and a shell section which mainly includes the oxide of the second metal and which has no cavity.

First claim

What is claimed is:

1. An ESD protection device comprising:
a first discharge electrode;
a second discharge electrode; and
a discharge auxiliary electrode that is electrically connected to the first discharge electrode and the second discharge electrode; wherein
the first discharge electrode and the second discharge electrode are located on or in an insulating substrate so as to at least partially face each other;
the discharge auxiliary electrode includes first metal particles, second metal particles, and a binding agent;
the first metal particles include a core-shell structure including a core section mainly including a first metal and a shell section which mainly includes an oxide of a second metal and which includes at least one portion with a cavity; and
the second metal particles include a core-shell structure including a core section mainly including the first metal and a shell section which mainly includes the oxide of the second metal and which has no cavity.

2. The ESD protection device according to claim 1 , wherein the shell section of each of the first metal particles has a thickness of about 50 nm to about 1,500 nm.

3. The ESD protection device according to claim 1 , wherein the shell section of each of the second metal particles has a thickness of about 1 nm to less than about 50 nm.

4. The ESD protection device according to claim 1 , wherein the binding agent is a glassy matter-including substance.

5. The ESD protection device according to claim 1 , wherein the second metal is more oxidizable than the first metal.

6. The ESD protection device according to claim 1 , wherein the first metal is copper or a copper-based alloy mainly including copper.

7. The ESD protection device according to claim 1 , wherein the oxide of the second metal is at least one selected from the group consisting of aluminum oxide, silicon oxide, magnesium oxide, and nickel oxide.

8. The ESD protection device according to claim 1 , wherein the core sections include the second metal in the form of a minor component.

9. The ESD protection device according to claim 1 , wherein a content of the second metal particles with respect to all the metal particles included in the discharge auxiliary electrode is about 2% by volume to about 35% by volume.

10. The ESD protection device according to claim 1 , further comprising a first outer terminal electrode and a second outer terminal electrode electrically connected to the first discharge electrode and the second discharge electrode, respectively; wherein
the insulating substrate includes a hollow section therein, the first discharge electrode and the second discharge electrode are located so as to at least partially face each other with the hollow section therebetween, and the discharge auxiliary electrode is located such that at least one portion of the discharge auxiliary electrode is exposed to the hollow section.

11. A method for manufacturing an ESD protection device including a discharge auxiliary electrode that is electrically connected to a first discharge electrode and a second discharge electrode, the method comprising:
forming the discharge auxiliary electrode using a discharge auxiliary electrode paste including a first metal powder including particles of an alloy of a first metal and a second metal that is more oxidizable than the first metal and a second metal powder including metal particles each including a shell section mainly including an oxide of the second metal and a core section, covered by the shell section, mainly including the first metal;
firing the discharge auxiliary electrode;
moving the second metal to surfaces of the alloy particles; and
oxidizing the moved second metal.

12. The manufacturing method according to claim 11 , wherein the second metal powder is produced in such a manner that metal particles mainly including the first metal are coated with the oxide of the second metal by a mechanofusion process.

13. The manufacturing method according to claim 11 , wherein the first metal powder is produced by an atomizing process.

14. The manufacturing method according to claim 11 , wherein
the ESD protection device includes an insulating substrate;
the first discharge electrode and the second discharge electrode are located in the insulating substrate so as to at least partially face each other;
multiple ceramic green sheets including a first ceramic green sheet and a second ceramic green sheet are prepared;
the discharge auxiliary electrode, the first discharge electrode, and the second discharge electrode are formed on the first ceramic green sheet;
a burnout layer is formed so as to cover a gap between the first and second discharge electrodes;
the second ceramic green sheet is stacked on the first ceramic green sheet so as to cover the discharge auxiliary electrode, the first discharge electrode, the second discharge electrode, and the burnout layer;
a first outer terminal electrode and a second outer terminal electrode are formed so as to be electrically connected to the first discharge electrode and the second discharge electrode, respectively, after stacking; and
the burnout layer is burned out such that a hollow section is formed in the insulating substrate.

15. The manufacturing method according to claim 11 , wherein the shell section of each of the particles of the first metal has a thickness of about 50 nm to about 1,500 nm.

16. The manufacturing method according to claim 11 , wherein the shell section of each of the metal particles of the second metal has a thickness of about 1 nm to less than about 50 nm.

17. The manufacturing method according to claim 11 , wherein the discharge auxiliary electrode includes first metal particles, second metal particles, and a binding agent.

18. The manufacturing method according to claim 17 , wherein the binding agent is a glassy matter-including substance.

19. The manufacturing method according to claim 11 , wherein the second metal is more oxidizable than the first metal.

20. The manufacturing method according to claim 11 , wherein a content of the particles of the second metal with respect to all the metal particles included in the discharge auxiliary electrode is about 2% by volume to about 35% by volume.

Assignees

• Murata Manufacturing Co

Inventors

• Hongo Hiromitsu
• Sumi Takahiro
• Miki Takeshi
• Adachi Jun
• Tsukizawa Takayuki
• Noma Takashi

Classifications

• H01T1/20 Primary

  Means for starting arc or facilitating ignition of spark gap · CPC title

• H01L23/60

  Electricity · mapped topic

• H01T2/02

  comprising a trigger electrode or an auxiliary spark gap · CPC title

• H01T4/12

  hermetically sealed · CPC title

• H01T4/10

  having a single gap or a plurality of gaps in parallel · CPC title