Piezoelectric thin film, piezoelectric actuator, inkjet head, inkjet printer, and method for manufacturing piezoelectric actuator
US-2018170044-A1 · Jun 21, 2018 · US
US10680163B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10680163-B2 |
| Application number | US-201816136649-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 20, 2018 |
| Priority date | Apr 9, 2018 |
| Publication date | Jun 9, 2020 |
| Grant date | Jun 9, 2020 |
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A piezoelectric sensing module, a piezoelectric sensing module detecting method, and a piezoelectric sensing detection system thereof are disclosed. The piezoelectric sensing module is used for an operating tool. The piezoelectric sensing module includes a piezoelectric sensing film, and the piezoelectric sensing film includes at least a first to a sixth electrodes; wherein the first electrode is disposed between the third and the fourth electrodes, the second electrode is disposed between the fifth and the sixth electrodes; wherein the first and the second electrodes, the third and the fifth electrodes, and the fourth and the sixth electrodes are separated by a certain distance respectively, and a first angle between the first and the second electrodes, a second angle between the third and the fifth electrodes, and a third angle between the fourth and the sixth electrodes each have an included angle of 90 degrees.
Opening claim text (preview).
What is claimed is: 1. A piezoelectric sensing module disposed on an operating tool of a machine tool, comprising: a piezoelectric sensing film at least comprising: a first electrode; a second electrode; a third electrode; a fourth electrode; a fifth electrode; and a sixth electrode disposed thereon, wherein the first electrode is disposed between the third electrode and the fourth electrode, the second electrode is disposed between the fifth electrode and the sixth electrode; wherein the first and the second electrodes, the third and the fifth electrodes, and the fourth and the sixth electrodes are separated by a certain distance respectively, and when the piezoelectric sensing film is attached to the operating tool, a first angle between the first and the second electrodes, a second angle between the third and the fifth electrodes, and a third angle between the fourth and the sixth electrodes on the operating tool each have an included angle of 90 degrees; wherein the first electrode is polarized in the direction of the third electrode and the fourth electrode, the fifth electrode and the sixth electrode are polarized in the direction of the second electrode, the fifth electrode is polarized in the direction of the third electrode, the sixth electrode is polarized in the direction of the fourth electrode. 2. The piezoelectric sensing module as claimed in claim 1 , wherein the operating tool can be a milling tool, the first and the second electrodes are used for calculating a feed force and a transverse force of the operating tool, wherein the feed force and the transverse force are obtained from: F xy A =F y cos(θ)+ F x sin(θ); F xy B =F y cos(θ+90°)+ F x sin(θ+90°),and F xy A =C q V A /K A ,F xy B =C q V B /K B , K A =d 13 A ×LB×F xy A ,K B =d 13 B ×LD×F xy B ; wherein F x is the feed force, F y is the transverse force, θ is the rotation angle, C q is the capacitance, V A is the measured voltage of the first electrode, V B is the measured voltage of the second electrode, LD=−32L/[E ct (πD 0 3 )], E ct is the Young's modulus of the operating tool, D 0 is the operating tool diameter, d 13 A and d 13 B ; are the piezoelectric coefficients of the first electrode and the second electrode respectively, L is the distance of the first electrode and the second electrode to a cutting end. 3. The piezoelectric sensing module as claimed in claim 2 , wherein the first to the sixth electrodes are used for calculating a tangential force of the operating tool, wherein the tangential force is obtained from: F t =F x sin(θ)−F y cos(θ) and: the feed force F x = 1 2 ( ζ 2 + η 2 ) , the transverse force F y = 1 2 ( ζ ′ 2 + η ′ 2 ) , wherein ζ = C q V A K A + JG ( D 0 / 2 ) 2 atan ( Δ V C k ) , η = C q V B K B + JG ( D 0 / 2 ) 2
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