Electronic device having an intermediate layer disposed between two electrically-conductive layers

Patent metadata

Field	Value
Publication number	US-10680137-B2
Application number	US-201515118979-A
Country	US
Kind code	B2
Filing date	Feb 19, 2015
Priority date	Feb 26, 2014
Publication date	Jun 9, 2020
Grant date	Jun 9, 2020

Abstract

An electronic device including: a substrate; a first electrically-conductive layer; a second electrically-conductive layer; and an intermediate layer. The first electrically-conductive layer is disposed on the substrate and composed of aluminum or an aluminum alloy. The second electrically-conductive layer is spaced away from the first electrically-conductive layer. The intermediate layer is disposed between the first electrically-conductive layer and the second electrically-conductive layer, is in contact with both the first electrically-conductive layer and the second electrically-conductive layer, and contains aluminum and fluorine.

First claim

The invention claimed is:

1. An electronic device, comprising:
a substrate;
a first electrically-conductive layer disposed on the substrate and composed of aluminum or an aluminum alloy;
a second electrically-conductive layer spaced away from the first electrically-conductive layer;
an intermediate layer disposed between the first electrically-conductive layer and the second electrically-conductive layer and in direct electrical and physical contact with both the first electrically-conductive layer and the second electrically-conductive layer; and
a barrier layer covering a surface of the first electrically-conductive layer,
wherein the barrier layer covers the surface of the first electrically-conductive layer other than a part of the surface of the first electrically-conductive layer that is in contact with the intermediate layer, and
wherein the intermediate layer contains aluminum and fluorine.

2. The electronic device of claim 1 ,
wherein the intermediate layer further contains oxygen.

3. The electronic device of claim 1 ,
wherein the intermediate layer has a thickness of 5 nm or less.

4. The electronic device of claim 1 , further comprising:
an electrically-insulating layer deposited over the barrier layer to surround the intermediate layer,
wherein the second electrically-conductive layer contacts the intermediate layer in an opening over the intermediate layer that is defined by the electrically-insulating layer.

5. The electronic device of claim 1 ,
wherein the second electrically-conductive layer is composed of aluminum or an aluminum alloy.

Assignees

• Joled Inc

Inventors

• Abe Yuuki

Classifications

• H01L2933/0025

  Electricity · mapped topic

• H01L27/3276

  Electricity · mapped topic

• H01L2224/48465

  Electricity · mapped topic

• H01L33/42 Primary

  Electricity · mapped topic

• H01L2933/0016

  Electricity · mapped topic