Method for manufacturing polysilicon
US-9469544-B2 · Oct 18, 2016 · US
US10676818B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10676818-B2 |
| Application number | US-201515316913-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 12, 2015 |
| Priority date | Jun 13, 2014 |
| Publication date | Jun 9, 2020 |
| Grant date | Jun 9, 2020 |
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A method for producing a material based on silicon nanowires is provided. The method includes the steps of: i) bringing into contact, in an inert atmosphere, a sacrificial support based on a halogenide, a carbonate, a sulfate or a nitrate of an alkali metal, an alkaline earth metal or a transition metal having metal nanoparticles, with the pyrolysis vapours of a silicon source having a silane compound, by which silicon nanowires are deposited on the sacrificial support; and optionally ii) eliminating the sacrificial support and recovering the silicon nanowires produced in step ii).
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The invention claimed is: 1. A process for the preparation of a material based on silicon nanowires, comprising the stages of: i) bringing a sacrificial support based on an alkali metal or alkaline earth metal halide, carbonate, sulfate or nitrate, comprising metal nanoparticles, into contact, under an inert atmosphere, with the pyrolysis vapors from a silicon source comprising a silane compound, whereby silicon nanowires deposited on the sacrificial support are obtained, the sacrificial support being obtained by mixing alkali metal or alkaline earth metal halide, carbonate, sulfate, or nitrate particles in an anhydrous nonpolar solvent, with the metal nanoparticles; and optionally ii) removing the sacrificial support and recovering the silicon nanowires obtained in stage i). 2. The process as claimed in claim 1 , in which the sacrificial support is based on sodium chloride. 3. The process as claimed in claim 1 , in which stage ii) comprises a stage of washing with water the silicon nanowires deposited on the sacrificial support. 4. The process as claimed in claim 1 , in which stage i) is carried out in the presence of a doping agent. 5. The process as claimed in claim 4 , in which the doping agent is chosen from organophosphines, organoarsines, organoboranes and aromatic amines. 6. The process as claimed in claim 1 , in which the sacrificial support is a powder of an alkali metal or alkaline earth metal halide, carbonate, sulfate or nitrate, the diameter of the particles which is between 10 nm and 50 μm. 7. The process as claimed in claim 1 , in which the silicon nanowires resulting from stages i) or ii) are deposited on a support which is a conductor or semiconductor.
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