Mask extension welding device for thin film deposition

Patent metadata

Field	Value
Publication number	US-10675711-B2
Application number	US-201615098842-A
Country	US
Kind code	B2
Filing date	Apr 14, 2016
Priority date	Oct 16, 2015
Publication date	Jun 9, 2020
Grant date	Jun 9, 2020

Abstract

A mask extension welding apparatus for thin film deposition to extend and weld a mask on a frame includes an extension unit configured to extend the mask in a first direction, a pressure unit configured to press the mask towards the frame, and a laser welding unit configured to weld the mask and the frame. The pressure unit includes an upper housing, a lower housing spaced apart from the upper housing with respect to a fluid inlet, and a porous plate disposed at a downstream of the fluid inlet, the porous plate connecting the upper housing and the lower housing, and configured to eject a fluid supplied through the fluid inlet towards the mask.

First claim

What is claimed is:

1. A mask extension welding apparatus for thin film deposition to extend and weld a mask on a frame, comprising:
an extension unit comprising a mask extension clamp configured to extend the mask in a first direction;
a pressure unit configured to press the mask towards the frame, the pressure unit comprising:
an upper housing;
a lower housing spaced apart from the upper housing with respect to a fluid inlet; and
a porous plate disposed downstream of the fluid inlet, the porous plate connecting the upper housing and the lower housing, and configured to eject a fluid supplied through the fluid inlet towards the mask; and

a laser welding unit configured to weld the mask and the frame.

2. The mask extension welding apparatus of claim 1 , wherein the mask extension clamp extends both ends of the mask and fixes the both ends of the mask to the frame.

3. The mask extension welding apparatus of claim 1 , wherein the pressure unit is configured to press the mask towards the frame so that surfaces of the mask and the frame facing each other are in close-contact with each other.

4. The mask extension welding apparatus of claim 1 , wherein both ends of the mask are configured to be pressed by using the fluid supplied through the fluid inlet.

5. The mask extension welding apparatus of claim 1 , wherein both ends of the mask are configured to be pressed by a corresponding side of the lower housing.

6. The mask extension welding apparatus of claim 5 , wherein the laser welding unit is configured to irradiate laser light on a side of the mask in an internal direction or an external direction of the mask with respect to a contacting area between the lower housing and the both ends of the mask.

7. The mask extension welding apparatus of claim 5 , wherein the fluid inlet is inclined to direct the fluid in an internal direction of the mask with respect to a contacting area between the lower housing and the both ends of the mask.

8. The mask extension welding apparatus of claim 5 , wherein the fluid inlet is inclined to direct the fluid in an external direction of the mask with respect to a contacting area between the lower housing and the both ends of the mask.

9. The mask extension welding apparatus of claim 1 , wherein surfaces of the upper housing and the lower housing facing each other are inclined with respect to the mask.

10. The mask extension welding apparatus of claim 1 , wherein the porous plate connects the upper housing and the lower housing in an inclined state, and the porous plate is configured to eject the fluid supplied through the fluid inlet towards the mask.

11. The mask extension welding apparatus of claim 1 , wherein:
the pressure unit comprises a first pressure unit and a second pressure unit;
the first pressure unit comprises the upper housing, the lower housing, and the porous plate; and
the second pressure unit comprises:
a supplementary upper housing;
a supplementary lower housing spaced apart from the supplementary upper housing with respect to a supplementary fluid inlet; and
a supplementary porous plate disposed downstream of the supplementary fluid inlet, the supplementary porous plate connecting the supplementary upper housing and the supplementary lower housing, and configured to eject a fluid supplied through the supplementary fluid inlet towards the mask.

12. The mask extension welding apparatus of claim 11 , wherein:
the fluid inlet of the first pressure unit is inclined to direct the fluid in an internal direction of the mask with respect to a first contacting area between the lower housing of the first pressure unit and both ends of the mask; and
the supplementary fluid inlet of the second pressure unit is inclined to direct the fluid in an external direction of the mask with respect to a second contacting area between the supplementary lower housing of the second pressure unit and the both ends of the mask.

13. The mask extension welding apparatus of claim 11 , wherein surfaces of the upper housing and the lower housing of the first pressure unit facing each other are inclined with respect to the mask.

14. The mask extension welding apparatus of claim 11 , wherein surfaces of the supplementary upper housing and the supplementary lower housing of the second pressure unit facing each other are inclined with respect to the mask.

15. The mask extension welding apparatus of claim 11 , wherein the porous plate of the first pressure unit connects the upper housing and the lower housing of the first pressure unit in an inclined state, the inclined state corresponding to an ejecting direction of the fluid supplied through the fluid inlet of the first pressure unit towards the mask.

16. The mask extension welding apparatus of claim 11 , wherein the supplementary porous plate of the second pressure unit connects the supplementary upper housing and the supplementary lower housing of the second pressure unit in an inclined state, the inclined state corresponding to an ejecting direction of the fluid supplied through the supplementary fluid inlet of the second pressure unit towards the mask.

17. The mask extension welding apparatus of claim 1 , wherein the fluid is gas.

18. The mask extension welding apparatus of claim 17 , wherein the fluid is inert gas or air.

19. The mask extension welding apparatus of claim 1 , wherein a pressure applied to the mask is controlled by a pressure of the fluid supplied through the fluid inlet and ejected from the porous plate.

20. The mask extension welding apparatus of claim 1 , wherein a pressure of fluid is applied to an entire welding area of the mask and the frame.

Assignees

• Samsung Display Co Ltd
• Samsung Electronics Co Ltd

Inventors

• Han Jeongwon

Classifications

• B23K26/21 Primary

  by welding · CPC title

• B23K37/0443

  Jigs · CPC title

• C23C14/24

  Vacuum evaporation · CPC title

• B23K26/037

  by pressing on the workpiece, e.g. using a pressing roller foot · CPC title

• C23C14/042 Primary

  using masks · CPC title