Solid-state imaging device, imaging apparatus, and manufacturing method of solid-state imaging device with pixels that include light shielding portions

Patent metadata

Field	Value
Publication number	US-10672813-B2
Application number	US-201615576973-A
Country	US
Kind code	B2
Filing date	Apr 19, 2016
Priority date	Jun 3, 2015
Publication date	Jun 2, 2020
Grant date	Jun 2, 2020

Abstract

Image plane phase difference pixels that can handle incident light at two or more chief ray angles are realized. A solid-state imaging device includes a pixel, the pixel including a microlens that condenses light from a subject, a photoelectric conversion unit that receives the subject light condensed by the microlens to generate an electrical signal according to an amount of received light, and a light shielding portion provided between the photoelectric conversion unit and the microlens. The light shielding portion includes an edge portion formed across over a light receiving surface of the photoelectric conversion unit, and the edge portion includes a first edge portion and a second edge portion at positions different from each other both in a first direction corresponding to an up and down direction of an output image and a second direction corresponding to a left and right direction of the output image.

First claim

The invention claimed is:

1. A solid-state imaging device comprising:
a pixel including:
a microlens that condenses light from a subject;
a photoelectric conversion unit that receives the subject light condensed by the microlens to generate an electrical signal according to an amount of received light, and
a light shielding, portion provided between the photoelectric conversion unit and the microlens,

wherein the pixel is formed at a corner section of the solid-state imaging device,
wherein the light shielding portion includes an edge portion formed over a light receiving surface of the photoelectric conversion unit,
wherein the edge portion is formed across the light receiving surface of the photoelectric conversion unit in a third direction different from both a first direction corresponding to an up and down direction of an output image and a second direction corresponding to a left and right direction of the output image, and
wherein the third direction is a direction along a radiation ray extending from an optical axis center of a light receiving surface of the solid-state imaging device.

2. The solid-state imaging device according to claim 1 , wherein the edge portion is formed in a zigzag by a combination of direction lines different from the direction along the radiation ray.

3. The solid-state imaging device according to claim 2 ,
wherein the solid-state imaging device includes a plurality of pixels,
the pixels including the light shielding portions are provided in pairs, and
the light shielding portions of the pixels in pairs are formed to shield different ranges of light receiving surfaces of the pixels.

4. The solid-state imaging device according to claim 1 , further comprising:
a focus determination unit that performs focus determination through phase difference detection based on the signal generated by the pixel.

5. A manufacturing method of a solid-state imaging device, the manufacturing method comprising:
a step of forming a pixel, the pixel including:
a microlens that condenses light from a subject;
a photoelectric conversion unit that receives the subject light condensed by the microlens to generate an electrical signal according to an amount of received light; and
a light shielding portion provided between the photoelectric conversion unit and the microlens,

wherein the pixel is formed at a corner section of the solid-state imaging device,
wherein the light shielding portion includes an edge portion formed over a light receiving surface of the photoelectric conversion unit,
wherein the edge portion is formed across over the light receiving surface of the photoelectric conversion unit in a third direction different from both a first direction corresponding to an up and down direction of an output image and a second direction corresponding to a left and right direction of the output image, and
wherein the third direction is a direction along a radiation ray extending from an optical axis center of a light receiving surface of the solid-state imaging device.

6. The manufacturing method according to claim 5 , wherein the edge portion is formed in a zigzag by a combination of direction lines different from the direction along the radiation ray.

7. The manufacturing method according to claim 6 , wherein the solid-state imaging device includes a plurality of pixels, the pixels including the light shielding portions are provided in pairs, and the light shielding portions of the pixels in pairs are formed to shield different ranges of light receiving surfaces of the pixels.

8. The manufacturing method according to claim 7 , forming a focus determination unit, wherein the focus determination unit performs focus determination through phase difference detection based on the signal generated by the pixel.

9. An imaging apparatus comprising:
a solid-state imaging device including:
a pixel including:
a microlens that condenses light from a subject;
a photoelectric conversion unit that receives the subject light condensed by the microlens to generate an electrical signal according to an amount of received light; and
a light shielding portion provided between the photoelectric conversion unit and the microlens,

wherein the pixel is formed at a corner section of the solid-state imaging device,
wherein the light shielding portion includes an edge portion formed over a light receiving surface of the photoelectric conversion unit,
wherein the edge portion is formed across the light receiving surface of the photoelectric conversion unit in a third direction different from both a first direction corresponding to an up and down direction of an output image and a second direction corresponding to a left and right direction of the output image, and
wherein the third direction is a direction along a radiation ray extending from an optical axis center of a light receiving surface of the solid-state imaging device.

10. The imaging apparatus according to claim 9 , wherein the edge portion is formed in a zigzag by a combination of direction lines different from the direction along the radiation ray.

11. The imaging apparatus according to claim 10 ,
wherein the solid-state imaging device includes a plurality of pixels,
the pixels including the light shielding portions are provided in pairs, and
the light shielding portions of the pixels in pairs are formed to shield different ranges of light receiving surfaces of the pixels.

12. The imaging apparatus according to claim 9 , further comprising:
a focus determination unit that performs focus determination through phase difference detection based on the signal generated by the pixel.

Assignees

• Sony Corp

Inventors

• Noudo Shinichiro

Classifications

• G02B7/34

  using different areas in a pupil plane · CPC title

• H01L27/14627

  Electricity · mapped topic

• H01L27/14

  Electricity · mapped topic

• H01L27/14623 Primary

  Electricity · mapped topic

• H01L27/14685

  Electricity · mapped topic