Method of determining a position of a substrate in a lithography system, substrate for use in such a method, and lithography system for carrying out such method.
US-2015177625-A1 · Jun 25, 2015 · US
US10670802B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10670802-B2 |
| Application number | US-201816117869-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 30, 2018 |
| Priority date | Aug 31, 2017 |
| Publication date | Jun 2, 2020 |
| Grant date | Jun 2, 2020 |
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A method of making an optical fiber sensor device for distributed sensing includes generating a laser beam comprising a plurality of ultrafast pulses, and focusing the laser beam into a core of an optical fiber to form a nanograting structure within the core, wherein the nanograting structure includes a plurality of spaced nanograting elements each extending substantially parallel to a longitudinal axis of optical fiber. Also, an optical fiber sensor device for distributed sensing includes an optical fiber having a longitudinal axis, a core, and a nanograting structure within the core, wherein the nanograting structure includes a plurality of spaced nanograting elements each extending substantially parallel to the longitudinal axis of the optical fiber. Also, a distributed sensing method and system and an energy production system that employs such an optical fiber sensor device.
Opening claim text (preview).
What is claimed is: 1. An optical fiber sensor device structured for distributed sensing, comprising: an optical fiber having a longitudinal axis, a core, and a nanograting structure within the core, wherein the nanograting structure includes a plurality of nanograting elements each extending in a first direction that is substantially parallel to the longitudinal axis of the optical fiber, wherein the nanograting elements are spaced in a periodic manner from one another and aligned and positioned immediately adjacent one another in a second direction that is substantially perpendicular to the first direction, and wherein there is no spacing between or within any of the nanograting elements in the first direction such that the core does not include any grating elements therein spaced from one another in the first direction. 2. The optical fiber sensor device according to claim 1 , wherein a portion of the core surrounding the nanograting structure has a first refractive index and wherein each nanograting element has a second refractive index that is lower than the first refractive index. 3. The optical fiber sensor device according to claim 2 , wherein the second refractive index is 99% to 90% of the first refractive index. 4. The optical fiber sensor device according to claim 1 , wherein each nanograting element is generally planar and has a length that extends in a first direction that is substantially parallel to the longitudinal axis of the optical fiber, a width that extends in a second direction that is substantially perpendicular to the longitudinal axis of the optical fiber, and a height that extends in the third direction that is substantially perpendicular to the longitudinal axis of the optical fiber. 5. The optical fiber sensor device according to claim 1 , wherein the optical fiber sensor device is designed for use with an interrogating light having a wavelength, and wherein a spacing between each pair of immediately adjacent nanograting elements is less than or equal to one-fifth of the wavelength of the interrogating light. 6. The optical fiber sensor device according to claim 1 , wherein the optical fiber sensor device is designed for use with an interrogating light having a wavelength, and wherein a spacing between each pair of immediately adjacent nanograting elements is less than or equal to one-tenth of the wavelength of the interrogating light. 7. The optical fiber sensor device according to claim 1 , wherein a spacing between each immediately adjacent pair of nanograting elements is 750 nm or less. 8. The optical fiber sensor device according to claim 1 , wherein the optical fiber is a single-crystal optical fiber. 9. The optical fiber sensor device according to claim 8 , wherein the optical fiber is a sapphire optical fiber. 10. The optical fiber sensor device according to claim 1 , wherein the core includes a plurality of voids formed by annealing the optical fiber sensor device after the formation of the nanograting structure in the presence of a reactive gas. 11. The optical fiber sensor device according to claim 1 , wherein a plurality of voids are included at least partially within each of the nanograting elements by annealing the optical fiber sensor device after the formation of the nanograting structure in the presence of a reactive gas. 12. The optical fiber sensor device according to claim 11 , wherein each of the voids is spherical. 13. The optical fiber sensor device according to claim 1 , wherein the nanograting structure causes a backscattered amplitude of backscatter signals produced from the optical fiber sensor device to be polarization dependent. 14. A distributed sensing method, comprising: transmitting an interrogating light through an optical fiber sensor device according to claim 1 ; receiving a Rayleigh scattering profile from the optical fiber sensor device in response to the interrogating light; and determining a plurality of spatially resolved measurements based on the Rayleigh scattering profile. 15. The distributed sensing method according to claim 14 , wherein the plurality of spatially resolved measurements are a plurality of spatially resolved temperature measurements along the optical fiber sensor device. 16. The distributed sensing method according to claim 14 , wherein the plurality of spatially resolved measurements are a plurality of spatially resolved strain measurements along the optical fiber sensor device. 17. The distributed sensing method according to claim 14 , wherein the plurality of spatially resolved measurements are a plurality of spatially resolved chemical concentration measurements along the optical fiber sensor device. 18. A distributed sensing system, comprising: a light source structured to generate an interrogating light; an optical fiber sensor device according to claim 1 structured to receive the interrogating light; and an optical frequency domain reflectometry sensing system structured and configured to receive a Rayleigh scattering profile from the optical fiber sensor device in response to the interrogating light, and determine a plurality of spatially resolved measurements based on the Rayleigh scattering profile. 19. The distributed sensing system according to claim 18 , wherein the plurality of spatially resolved measurements are a plurality of spatially resolved temperature measurements along the optical fiber sensor device. 20. An energy production system, comprising: a reactor assembly; an optical fiber sensor device according to claim 1 provided within the reactor assembly; a light source structured to generate an interrogating light, wherein the optical fiber sensor device is structured to receive the interrogating light; and an optical frequency domain reflectometry sensing system structured and configured to receive a Rayleigh scattering profile from the optical fiber sensor device in response to the interrogating light, and determine a plurality of spatially resolved measurements based on the Rayleigh scattering profile. 21. The energy production system according to claim 20 , wherein the plurality of spatially resolved measurements are a plurality of spatially resolved temperature measurements along the optical fiber sensor device. 22. The energy production system according to claim 16 , wherein the reactor assembly is a solid oxide fuel cell assembly.
Core or cladding made from organic material, e.g. polymeric material (G02B1/04 takes precedence) · CPC title
using thermal effects, e.g. heating or cooling of a temperature sensitive mounting body (optical modulation using thermo-optic effect G02F1/0147) · CPC title
Fuel cells with solid oxide electrolytes · CPC title
Reflectometers detecting the back-scattered light in the frequency-domain, e.g. OFDR, FMCW, heterodyne detection · CPC title
Heat exchange or temperature measuring elements, thermal insulation, e.g. heat pipes, heat pumps, fins · CPC title
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