System and method for removing foreign substances by using electric field adsorption method

Patent metadata

Field	Value
Publication number	US-10665472-B2
Application number	US-201715737561-A
Country	US
Kind code	B2
Filing date	Mar 28, 2017
Priority date	Apr 27, 2016
Publication date	May 26, 2020
Grant date	May 26, 2020

Abstract

The present invention relates to a system and a method of removing a foreign material by using an electric field adsorbing scheme, which are capable of easily adsorbing and removing a foreign material on a surface of a film by using an electric field adsorbing scheme through a micro-current (several micro ampere) voltage driving method, not a surface treatment method, such as plasma discharge processing, corona discharge processing, and air blowing processing, which causes damage to the surface of the film, in a processing process for removing the foreign material on the surface of the film, and particularly, which exclude high pressure discharge processing and the like, thereby decreasing an incurrence rate of a safety accident of an operator and preventing a surface of a film from being scratched.

First claim

The invention claimed is:

1. A system for removing a foreign material by using an electric field adsorbing scheme, the system comprising:
one or more positive electrode leads and one or more negative electrode leads positioned at one surface of a flat plate, and which generate an electric field and
a cover layer which covers external sides of the positive electrode lead and the negative electrode lead; and
wherein a foreign material at an external side of a film adjacently positioned to the positive electrode lead is shifted in a direction of the positive electrode lead and adsorbed to a surface of the cover layer because of an electrostatic force of the electric field,
wherein the one or more positive electrode leads and the one or more negative electrode leads are arranged in:
an alternating pattern, in which straight positive electrode leads and negative electrode leads are alternately positioned parallel to each other; or
a concentric circular pattern, in which ring-shaped positive electrode leads and negative electrode leads are alternately positioned in a concentric circle form, and

wherein each of the one or more positive electrode leads and each of the one or more negative electrode leads has an electrode width corresponding to 0.5 mm to 5 mm, and wherein an interval between each of the one or more positive electrode leads and each of the one or more negative electrode leads corresponds to 0.4 mm to 1.2 mm.

2. The system of claim 1 , further comprising:
a power supplying unit which varies a voltage value of power according to the kind of foreign material and supplies the power to the one or more positive electrode leads and the one or more negative electrode leads;
an adsorbed material removing module which removes an adsorbed material adsorbed to a surface of the cover layer; and
wherein the adsorbed material removing module includes:
an adhesive plate, which has predetermined cohesion and in a form corresponding to that of the cover layer; and
a shifting unit which shifts the adhesive plate in a direction of the surface of the cover layer, and
wherein the adhesive plate is in contact with the surface of the cover layer via the shifting unit, so that the adsorbed material adheres to a surface of the adhesive plate and is removed from the surface of the cover layer.

3. The system of claim 1 , wherein a form of the cover layer corresponds to at least one or more of:
a film form, in which one or more polymer films are bonded at an external side of the flat plate, and
a coating layer form, in which one or more polymer materials are applied onto an external side of the flat plate to form a plurality of coating layers.

4. A method of removing a foreign material by using an electric field adsorbing scheme, the method comprising:
positioning one or more positive electrode leads and one or more negative electrode leads on one surface of a flat plate;
covering external sides of the positive electrode lead and the negative electrode lead with a cover layer; and
shifting a foreign material at an external side of the film adjacently positioned to the positive electrode lead in a direction of the positive electrode lead and adsorbing the foreign material to a surface of a cover layer because of an electrostatic force of an electric field generated by the one or more positive electrode leads and the one or more negative electrode leads;
varying, by a power supplying unit, a voltage value of power according to the kind of foreign material; and
supplying the varied power to the one or more positive electrode leads and the one or more negative electrode leads; and
removing an adsorbed material adsorbed to a surface of the cover layer through an adsorbed material removing module.

5. The method of claim 4 , wherein the positioning one or more positive electrode leads and one or more negative electrode leads includes:
forming the each of the one or more positive electrode leads and each of the one or more negative electrode leads to have an electrode width corresponding to 0.5 mm to 5 mm;
positioning straight positive electrode leads and negative electrode leads parallel to one another in an alternating pattern; and
positioning ring-shaped positive electrode leads and negative electrode leads alternately in a concentric circle pattern,
wherein an interval between each of the one or more positive electrode leads and each of the one or more negative electrode leads corresponds to 0.4 mm to 1.2 mm.

6. The method of claim 4 , wherein the covering includes:
bonding one or more polymer films for covering to an external side of the flat plate; and
applying the bonded one or more polymer materials for covering onto the external side of the flat plate to form a plurality of coating layers.

7. The method of claim 4 , wherein the removing of the adsorbed material includes:
shifting an adhesive plate, which has a predetermined cohesion and a form corresponding to a form of the surface of the cover layer, in a direction of the surface of the cover layer through a shifting unit; and
bonding the adsorbed material to a surface of the adhesive plate and removing the adsorbed material from the surface of the cover layer by contacting the adhesive plate with the surface of the cover layer.

8. A system for removing a foreign material by using an electric field adsorbing scheme, the system comprising:
a cylinder, which rotates in one direction;
one or more positive electrode leads and one or more negative electrode leads positioned along a circumference of an external side of the cylinder, wherein the one or more positive electrode leads and one or more negative electrode leads form an electric field;
a cover layer, which covers external surfaces of the one or more positive electrode leads and the one or more negative electrode leads; and
an adsorbed material removing module which is adjacently positioned to the cylinder, wherein the adsorbed material removing module rotates in accordance with a rotation direction of cylinder,
wherein a direction of a foreign material at an external side of a film adjacently positioned to the one or more positive electrode leads is changed to a direction of the one or more positive electrode leads by an electrostatic force of the electric field, so that the foreign material is adsorbed to a surface of the cover layer, and
wherein the adsorbed material adsorbed to the surface of the cover layer is removed from the surface of the cover layer by the adsorbed material removing module.

9. The system of claim 8 , further comprising:
a power supplying unit which varies a voltage value of power according to the kind of foreign material and supplies the power to the one or more positive electrode leads and the one or more negative electrode leads.

10. The system of claim 8 , wherein the positive electrode lead and the negative electrode lead are arranged in:
an alternating pattern, in which straight positive electrode leads and negative electrode leads are alternately arranged parallel to each other; or
a concentric circular pattern, in which ring-shaped positive electrode leads and negative electrode leads are alternately positioned in a concentric circle form, and
wherein each of the one or more positive electrode leads and each of the one or more negative electrode leads has an electrode width corresponding to 0.5 mm to 5 mm, and
wherein an interval between each of the one or more positive electrode leads and each of the one or more negative electrode leads corresponds to 0.4 mm to 1.2 mm.

11. The system of claim 8 , wherein a form of the cover layer corresponds to at least one or more of
a film form, in which one or more polymer films are bond

Assignees

• Lg Chemical Ltd

Inventors

• Shin Dongmyung
• Chun Sang Ki
• Lee Bum Woo

Classifications

• F04B19/006

  Micropumps (F04B43/043 and F04B43/095 take precedence) · CPC title

• B08B17/02

  Preventing deposition of fouling or of dust · CPC title

• F04B19/00

  Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00 · CPC title

• H01L21/02057

  Electricity · mapped topic

• H01L21/479 Primary

  Electricity · mapped topic