Resonator and resonance device

Patent metadata

Field	Value
Publication number	US-10659004-B2
Application number	US-201715723344-A
Country	US
Kind code	B2
Filing date	Oct 3, 2017
Priority date	Apr 27, 2015
Publication date	May 19, 2020
Grant date	May 19, 2020

Abstract

A resonance device is provided having a resonator with opposing upper and lower lids. The resonator includes a base, and multiple vibration arms that are connected to a front end of the base so as to extend away from the base. Moreover, a frame surrounds a periphery of the base portion and the vibration arms and one or more holding arms connect the base to the frame. The base, the vibration arms, and the holding arm include a substrate and a temperature characteristics correction layer laminated on the substrate and having a material with a coefficient of thermal expansion different from that of the substrate. The base, the vibration arms, and the holding arm are formed integrally with the substrate and the temperature characteristics correction layer.

First claim

The invention claimed is:

1. A resonance device, comprising:
an upper lid;
a lower lid that opposes the upper lid; and
a resonator interposed between the upper and lower lids, the resonator including:
a base,
a plurality of vibration arms having respective first and second ends with the respective first ends coupled to a front end of the base, such that the plurality of vibration arms extend in a direction away from the base,
a frame surrounding at least a portion of the base and the plurality of vibration arms, and
at least one holding arm having a first end coupled to the base and a second end coupled to the frame, the second end of the at least one holding arm being closer to the second end of at least one of the plurality of vibration arms than the first end of the at least one of the plurality of vibration arms,

wherein the base, the plurality of vibration arms, and the at least one holding arm include a substrate and a temperature characteristics correction layer disposed on the substrate that comprises a material having a coefficient of thermal expansion different from that of the substrate.

2. The resonance device according to claim 1 , wherein the base, the plurality of vibration arms, and the at least one holding arm are formed integrally of the substrate and the temperature characteristics correction layer.

3. The resonance device according to claim 1 , wherein the plurality of vibration arms each include a piezoelectric material and a pair of electrode layers that oppose each other with the piezoelectric material interposed therebetween.

4. The resonance device according to claim 3 , wherein at least one of the pair of electrode layers is disposed on a first surface of the substrate with the temperature characteristics correction layer being disposed on an opposing second surface of the substrate.

5. The resonance device according to claim 2 ,
wherein the frame includes a substrate that is formed integrally with the substrate of the base, the plurality of vibration arms, and the at least one holding arm,
wherein the substrate of the frame includes a first surface that opposes the lower lid,
wherein the substrate of the base includes a second surface that opposes the lower lid,
wherein the substrate of the at least one holding arm includes a third surface that opposes the lower lid,
wherein at least a portion of the second surface of the substrate of the base corresponding to a rear end that opposes the front end of the base does not lie in a same plane as the first surface, and
wherein a portion of the third surface of the substrate of the at least one holding arm corresponding to the first end of the holding arm does not lie in a same plane as the first surface.

6. The resonance device according to claim 5 ,
wherein the substrate of the plurality of vibration arms includes a fourth surface that opposes the lower lid, and
wherein a distance from a portion of the fourth surface corresponding to the second ends of the plurality of vibration arms to the first surface is smaller than a distance from a portion of the second surface corresponding to the rear end of the base to the first surface.

7. The resonance device according to claim 6 ,
wherein a portion of the fourth surface of the substrate of the plurality of vibration arms corresponding to the second ends of the plurality of vibration arms is not on the first surface, and
wherein the fourth surface of the substrate of the plurality of vibration arms includes a portion that approaches the first surface, as progressing from a portion corresponding to the first ends of the plurality of vibration arms towards a portion corresponding to the second ends of the plurality of vibration arms.

8. The resonance device according to claim 6 , wherein the third surface of the substrate of the at least one holding arm spaces apart from the first surface progressing from the second end of the at least one holding arm towards the first end of the at least one holding arm.

9. The resonance device according to claim 1 , wherein a length from the front end of the base to a rear end of the base opposite the front end is shorter than a length from the first end to the second end of at least one of the plurality of vibration arms.

10. The resonance device according to claim 1 , wherein the at least one holding arm includes a sub-arm with a first end coupled to a rear end of the base opposite the front end and that extends away from the rear end of the base.

11. The resonance device according to claim 10 , wherein a length from the front end of the base to a second end of the sub-arm opposite the first end is shorter than a length from the second end to the first end of at least one of the plurality of vibration arms.

12. The resonance device according to claim 1 , wherein the substrate is formed of silicon, and the temperature characteristics correction layer is formed of silicon oxide.

13. The resonance device according to claim 1 , wherein the first end of at least one holding arm is coupled to the base between a pair of the plurality of vibration arms and the second end of the at least one holding arm is coupled to the frame.

14. The resonance device according to claim 1 , wherein the at least one holding arm comprises a pair of holding arms extending in a direction parallel to the plurality of vibration arms and that are each connected to a surface of the frame that faces the respective second ends of the plurality of vibration arms.

15. A resonance device, comprising:
an upper lid;
a lower lid that opposes the upper lid; and
a resonator disposed between the upper and lower lids, the resonator including:
a frame,
a base disposed within the frame,
a plurality of vibration arms coupled to the base and extending away from the base towards at least a first side of the frame,
at least one holding arm coupling the base to the frame with a frame connecting end coupling the at least one holding arm to the frame and being closer to a free end of at least one of the plurality of vibration arms than to the base,

wherein the base, the plurality of vibration arms, and the at least one holding arm include a substrate and a temperature characteristics correction layer disposed on the substrate that comprises a material having a coefficient of thermal expansion different from that of the substrate, and
wherein the base, the plurality of vibration arms, and the at least one holding arm integrally formed with the substrate and the temperature characteristics correction layer.

16. The resonance device according to claim 15 , wherein the plurality of vibration arms each include a piezoelectric material and a pair of electrode layers that oppose each other with the piezoelectric material interposed therebetween.

17. The resonance device according to claim 16 , wherein at least one of the pair of electrode layers is disposed on a first surface of the substrate with the temperature characteristics correction layer being disposed on an opposing second surface of the substrate.

18. The resonance device according to claim 15 , wherein a length from a front end of the base where the plurality of vibration arms are coupled to a rear end of the base opposite the front end is shorter than a length of at least one of the plurality of vibration arms.

19. The resonance device according to claim 15 ,
wherein the at least one holding arm includes a sub-arm with a first end coupled to an end of the base opposite to an end where the plurality of vibration arms are coupled and that extends away f

Assignees

• Murata Manufacturing Co

Inventors

• Goto Yuichi
• Hirota Wakana

Classifications

• H03H9/178

  of a laminated structure of multiple piezoelectric layers with inner electrodes · CPC title

• H03H2009/155

  using MEMS techniques · CPC title

• H03H9/0595

  the holder support and resonator being formed in one body · CPC title

• H03H9/2489

  with more than two fork tines · CPC title

• H03H9/1057

  for microelectro-mechanical devices · CPC title