Cryostation system

Patent metadata

Field	Value
Publication number	US-10658150-B2
Application number	US-201515129990-A
Country	US
Kind code	B2
Filing date	Apr 2, 2015
Priority date	Apr 3, 2014
Publication date	May 19, 2020
Grant date	May 19, 2020

Abstract

The present invention stores a cooled sample subjected to freezing treatment, or the like, while preventing the formation of condensation and frost-like substances and loads the sample into a sample holder for observation using a charged particle beam device. The present invention is provided with a main body for storing a sample and a lid unit mounted above the main body and is characterized in that the main body is divided into a first space and a second space by a partition member; the first space accommodates a cooling medium for cooling the sample; the second space has, disposed therein, a heating unit for heating the cooling medium accommodated in the first space; and the lid unit has, formed therein, a discharge port for discharging the gas generated by the heating of the cooling medium to the outside.

First claim

The invention claimed is:

1. A cryostation system which stores a sample in a cooled state, comprising:
a main body for storing the sample; and
a lid unit mounted on the main body,
wherein the main body has an insertion opening from which a sample holder for introducing a sample is inserted from the outside,
wherein the insertion opening is formed at a side surface of the main body,
wherein the main body has an inner wall and an outer wall, having a vacuum space between the inner and outer wall of the main body,
wherein the main body is divided into a first space and a second space, divided by a partition member, and a sample storing unit,
wherein the main body has a sample conveyance mechanism for conveying the sample to the sample holder inserted from the insertion opening while the sample and sample holder remain below the lid unit,
wherein the first space accommodates a first cooling medium for cooling a second cooling medium and the sample,
wherein the second space has, disposed therein, a heating unit for heating the first cooling medium accommodated in the first space,
wherein the sample storing unit contains the second cooling medium for cooling the sample, which second cooling medium may be the same or different from the first cooling medium,
wherein the second cooling medium is not gasified, and
wherein the first cooling medium contacts the sample storing unit in a liquid state, and
the lid unit has, formed therein, a discharge port for discharging a gas generated by the heating of the cooling medium from inside the cryostation system to outside the cryostation system.

2. The cryostation system according to claim 1 ,
wherein the lid unit forms the discharge port by providing a step in a part of a surface mounted on the main body.

3. The cryostation system according to claim 1 ,
wherein the heating unit is arranged in the second space and in the vicinity on one end side of the partition member.

4. The cryostation system according to claim 3 ,
wherein the sample is arranged in the first space and in the vicinity on the other end side of the partition member.

5. The cryostation system according to claim 3 ,
wherein the lid unit forms the discharge port at a position corresponding to an upper part of the heating unit provided in the main body.

6. The cryostation system according to claim 1 ,
wherein the sample conveyance mechanism contains a shaft member for rotating the sample and moving the sample upward and downward.

7. The cryostation system according to claim 1 , further comprising:
a sample holder heating unit for heating the sample holder inserted from the insertion opening inside the main body and in a periphery of the insertion opening.

8. The cryostation system according to claim 1 , further comprising:
an exhaust mechanism inside the main body,
wherein the exhaust mechanism sends air so that the gas generated by the heating of the cooling medium is discharged from the discharge port.

9. The cryostation system according to claim 1 ,
wherein the second cooling medium for the sample storing unit has a higher boiling point than the first cooling medium.

Assignees

• Hitachi High Tech Corp

Inventors

• Nagakubo Yasuhira
• Iwahori Toshiyuki

Classifications

• H01J2237/20235

  Z movement or adjustment · CPC title

• F25D3/10

  using liquefied gases, e.g. liquid air {(for cooling semiconductor devices H10W40/305)} · CPC title

• H01J2237/20214

  Rotation · CPC title

• H01J2237/2001

  Maintaining constant desired temperature · CPC title

• B01L2300/185

  using a liquid as fluid · CPC title