Method of manufacturing emitter

Patent metadata

Field	Value
Publication number	US-10658143-B2
Application number	US-201916280719-A
Country	US
Kind code	B2
Filing date	Feb 20, 2019
Priority date	Feb 23, 2018
Publication date	May 19, 2020
Grant date	May 19, 2020

Abstract

Disclosed is a method of manufacturing an emitter in which the tip of the emitter can be formed into a desired shape even when various materials are used for the emitter. The method includes performing an electrolytic polishing process of polishing a front end of a conductive emitter material so that a diameter of the front end is gradually reduced toward a tip; performing a first etching process by irradiating a processing portion of the emitter material processed by the electrolytic polishing process with a charged particle beam; performing a sputtering process by irradiating the pointed portion formed by the first etching process with a focused ion beam; and performing a secondary etching process of further sharpening the tip by an electric field induced gas etching processing while observing a crystal structure of the tip of the pointed portion processed by the sputtering process using a field ion microscope.

First claim

What is claimed is:

1. A method of manufacturing a sharpened needle-shaped emitter, the method comprising:
performing an electrolytic polishing process of polishing a front end of a conductive emitter material so that a diameter of the front end is gradually reduced toward a tip;
performing a first etching process by irradiating a processing portion of the emitter material processed by the electrolytic polishing process with a charged particle beam to form a pyramid-shaped pointed portion with the tip as an apex;
performing a sputtering process by irradiating the pointed portion formed by the first etching process with a focused ion beam using rare gas as an ionizing gas; and
performing a secondary etching process of further sharpening the tip by an electric field induced gas etching processing while observing a crystal structure of the tip of the pointed portion processed by the sputtering process with a field ion microscope, thereby making a number of atoms constituting the tip to be equal to or less than a predetermined number.

2. The method of claim 1 , wherein the sputtering process removes at least any one of damage layer and residual impurity particles of the pointed portion formed by the first etching process.

3. The method of claim 1 , wherein the sputtering process is performed so that a rate of increase, between before and after performing the sputtering process, of an electric field evaporation voltage of the emitter material is equal to or less than a predetermined value.

4. The method of claim 1 , wherein the first etching process is performed, by irradiation with the focused ion beam, so that an apex angle of the pointed portion is equal to or less than a predetermined angle.

5. The method of claim 1 , wherein the emitter material is tungsten.

6. The method of claim 1 , wherein the emitter material is iridium.

7. The method of claim 1 , wherein a size of a processing range of the sputtering process is set to be equal to or less than a diameter of the focused ion beam.

8. The method of claim 1 , wherein, in the sputtering process, the processing range is scanned with the focused ion beam when a size of a processing range of the sputtering process is set to be larger than a diameter of the focused ion beam.

9. The method of claim 7 , wherein the sputtering process is performed by irradiating the pointed portion with the focused ion beam in an axial direction of the needle-shaped emitter material.

10. The method of claim 7 , wherein the sputtering process is performed by rotating the emitter material about a central axis while irradiating the pointed portion with the focused ion beam in a direction intersecting an axial direction of the needle-shaped emitter material.

11. The method of claim 1 , wherein the ionizing gas is argon or xenon.

Assignees

• Hitachi High Tech Science Corp

Inventors

• Nakajima Yoko
• Kawanami Yoshimi
• Moritani Hironori
• Oba Hiroshi

Classifications

• H01J2209/012

  Coating · CPC title

• C25F3/16

  Polishing · CPC title

• H01J37/3053

  for evaporating or etching · CPC title

• H01J9/025 Primary

  of field emission cathodes · CPC title

• C25F3/26

  of refractory metals · CPC title