Pressure sensor having overpressure protection with reduced output error

Patent metadata

Field	Value
Publication number	US-10656039-B2
Application number	US-201715637232-A
Country	US
Kind code	B2
Filing date	Jun 29, 2017
Priority date	Mar 10, 2017
Publication date	May 19, 2020
Grant date	May 19, 2020

Abstract

An apparatus includes a sensor body, a sensor configured to measure differential pressure, and first and second pressure inputs in or on the sensor body. The pressure inputs are configured to provide multiple input pressures to the sensor. Each pressure input includes a barrier diaphragm configured to move in response to pressure and an overload diaphragm configured to limit movement of the barrier diaphragm. The overload diaphragm is also configured to exert a preload force against the sensor body. The overload diaphragm of each pressure input may include multiple convolutions. Bases of the convolutions may be configured to provide the preload force, and tops of the convolutions may be separated from the sensor body by gaps. Tops of the convolutions that are non-adjacent may be configured to provide the preload force, and tops of the convolutions between the non-adjacent convolutions may be separated from the sensor body by gaps.

First claim

What is claimed is:

1. An apparatus comprising:
a sensor body including a low-pressure side and a high-pressure side;
a sensor disposed between the low-pressure side and the high-pressure side and configured to measure differential pressure; and
first and second pressure inputs, the first pressure input associated with the low-pressure side of the sensor body and the second pressure input associated with the high-pressure side of the sensor body, the pressure inputs configured to apply at least one input pressure from the low-pressure side and the high-pressure side to the sensor, each pressure input comprising:
a barrier diaphragm associated with each of the first and second pressure inputs and configured to move in response to pressure; and
an overload diaphragm associated with each of the first and second pressure inputs and configured to limit movement of the barrier diaphragm, wherein the overload diaphragm is configured to exert a preload force against the sensor body,

wherein the overload diaphragm associated with each of the first and second pressure inputs is operable to move away from the sensor body in response to a pressure that overcomes the preload force,
wherein the overload diaphragm associated with each of the first and second pressure inputs includes multiple convolutions, wherein bases of the convolutions are operable to provide the preload force against the sensor body, and tops of the convolutions are separated from the sensor body by gaps.

2. The apparatus of claim 1 , further comprising:
a first fill fluid configured to convey the pressure from the barrier diaphragm of the first pressure input to the sensor as a first input pressure; and
a second fill fluid configured to convey the pressure from the barrier diaphragm of the second pressure input to the sensor as a second input pressure.

3. The apparatus of claim 2 , further comprising:
at least one first passage configured to transport the first fill fluid between (i) a gap between the barrier diaphragm of the first pressure input and the overload diaphragm of the first pressure input and (ii) the sensor and a gap between the overload diaphragm of the second pressure input and the sensor body; and
at least one second passage configured to transport the second fill fluid between (i) a gap between the barrier diaphragm of the second pressure input and the overload diaphragm of the second pressure input and (ii) the sensor and a gap between the overload diaphragm of the first pressure input and the sensor body.

4. The apparatus of claim 3 , wherein:
the tops of the convolutions that are non-adjacent are configured to provide the preload force against the sensor body; and
the tops of the convolutions between the non-adjacent convolutions are separated from the sensor body by gaps.

5. The apparatus of claim 1 , wherein the barrier diaphragm of each pressure input is configured to nest with the overload diaphragm of that pressure input.

6. The apparatus of claim 1 , wherein the sensor comprises one of multiple sensors.

7. The apparatus of claim 1 , wherein the sensor body is a coplanar meter body.

8. A system comprising:
a manifold; and
a pressure sensor mounted to the manifold, the pressure sensor comprising:
a sensor body including a low-pressure side and a high-pressure side;
a sensor disposed between the low-pressure side and the high-pressure side and configured to measure differential pressure; and
first and second pressure inputs, the first pressure input associated with the low-pressure side of the sensor body and the second pressure input associated with the high-pressure side of the sensor body, the pressure inputs configured to apply at least one input pressure from the low-pressure side and the high-pressure side to the sensor, each pressure input comprising:
a barrier diaphragm associated with each of the first and second pressure inputs and configured to move in response to pressure; and
an overload diaphragm associated with each of the first and second pressure inputs and configured to limit movement of the barrier diaphragm, wherein the overload diaphragm is configured to exert a preload force against the sensor body,

wherein the overload diaphragm associated with each of the first and second pressure inputs is operable to move away from the sensor body in response to a pressure that overcomes the preload force,
wherein the overload diaphragm associated with each of the first and second pressure inputs includes multiple convolutions, wherein bases of the convolutions are operable to provide the preload force against the sensor body, and tops of the convolutions are separated from the sensor body by gaps.

9. The system of claim 8 , wherein the pressure sensor further comprises:
a first fill fluid configured to convey the pressure from the barrier diaphragm of the first pressure input to the sensor as a first input pressure; and
a second fill fluid configured to convey the pressure from the barrier diaphragm of the second pressure input to the sensor as a second input pressure.

10. The system of claim 9 , wherein the pressure sensor further comprises:
at least one first passage configured to transport the first fill fluid between (i) a gap between the barrier diaphragm of the first pressure input and the overload diaphragm of the first pressure input and (ii) the sensor and a gap between the overload diaphragm of the second pressure input and the sensor body; and
at least one second passage configured to transport the second fill fluid between (i) a gap between the barrier diaphragm of the second pressure input and the overload diaphragm of the second pressure input and (ii) the sensor and a gap between the overload diaphragm of the first pressure input and the sensor body.

11. The system of claim 10 , wherein:
the tops of the convolutions that are non-adjacent are configured to provide the preload force against the sensor body; and
the tops of the convolutions between the non-adjacent convolutions are separated from the sensor body by gaps.

12. The system of claim 8 , wherein the barrier diaphragm of each pressure input is configured to nest with the overload diaphragm of that pressure input.

13. A method comprising:
applying at least one input pressure to a sensor disposed within a sensor body from a low-pressure input and a high-pressure input of the sensor body; and
measuring a differential pressure using the sensor;
wherein each pressure input comprises:
a barrier diaphragm associated with each of the pressure inputs and configured to move in response to pressure; and
an overload diaphragm associated with each of the pressure inputs and configured to limit movement of the barrier diaphragm, the overload diaphragm exerting a preload force against the sensor body,

wherein the overload diaphragm associated with each of the first and second pressure inputs is operable to move away from the sensor body in response to a pressure that overcomes the preload force,
wherein the overload diaphragm associated with each of the first and second pressure inputs includes multiple convolutions, wherein bases of the convolutions are operable to provide the preload force against the sensor body, and tops of the convolutions are separated from the sensor body by gaps.

14. The method of claim 13 , further comprising:
conveying, using a first fill fluid, the pressure from the barrier diaphragm of the first pressure input to the sensor as a first input pressure; and
conveying, using a second fill fluid, the pressure from the barrier diaphragm of the second pressure input to the sensor as a second input pressure.

Assignees

• Honeywell Int Inc

Inventors

• Hershey George
• Daugert Richard D

Classifications

• G01L7/082

  construction or mounting of diaphragms (of semiconductive diaphragms G01L9/0042) · CPC title

• G01L19/0618 Primary

  Overload protection · CPC title

• G01L11/004

  by the use of counterbalancing forces (measuring force by the use of counterbalancing forces G01L1/08) · CPC title

• G01L13/026

  involving double diaphragm · CPC title

• G01L19/14

  Housings {(G01L19/0007, G01L19/0084, G01L19/0092, G01L19/04, G01L19/06 take precedence)} · CPC title