Glassy carbon roll-type mold manufacturing method for fine pattern formation, and glassy carbon roll-type mold manufactured by the method

Patent metadata

Field	Value
Publication number	US-10654083-B2
Application number	US-201815887564-A
Country	US
Kind code	B2
Filing date	Feb 2, 2018
Priority date	Jan 9, 2018
Publication date	May 19, 2020
Grant date	May 19, 2020

Abstract

Provided is a glassy carbon roll-type mold manufacturing method for fine pattern formation. The method is for manufacturing a glassy carbon roll-type mold configured to form a fine pattern having a micro-nano structure on a substrate including glass or a metal. The method includes: preparing a roll precursor including a thermosetting resin material, the roll precursor having a roll shape with a circumferential surface on which a pattern corresponding to the fine pattern is formed, the roll precursor being configured to press the substrate while rotating on the substrate; and carbonizing the roll precursor.

First claim

What is claimed is:

1. A method of manufacturing a glassy carbon roll-type mold for forming a fine pattern having a micro and/or nano structure on a substrate, the method comprising:
preparing a roll precursor comprising a carbon polymer material, wherein the roll precursor has a roll shape with a circumferential surface on which a pattern corresponding to the fine pattern is formed; and
carbonizing the roll precursor,
wherein the preparing of the roll precursor comprises:
preparing a cylindrical mold having an inner surface on which the pattern corresponding to the fine pattern is formed;
placing a core mold in a center portion of the cylindrical mold to form a ring-shaped space between the cylindrical mold and the core mold; and
injecting the carbon polymer material into the ring-shaped space, thermosetting the carbon polymer material, and separating the carbon polymer material from the cylindrical mold.

2. The method of claim 1 , wherein the thermosetting of the carbon polymer material comprises primarily incompletely hardening the carbon polymer material in the cylindrical mold at a first temperature and secondarily completely hardening the carbon polymer material at a temperature higher than the first temperature after separating the carbon polymer material from the cylindrical mold.

3. The method of claim 2 , wherein a shore D hardness of the roll precursor is within a range from about 10 to about 60 after the primary incomplete hardening and is 80 or greater after the secondary complete hardening.

4. The method of claim 1 , wherein the roll precursor has a thickness of about 2 mm to about 8 mm.

5. The method of claim 1 , wherein the preparing of the cylindrical mold comprises wrapping a flexible pattern mold having the pattern corresponding to the fine pattern around an outer surface of a cylindrical structure, and performing a duplication process using a thermosetting elastomer.

6. A method of manufacturing a glassy carbon roll-type mold for forming a fine pattern having a micro and/or nano structure on a substrate, the method comprising:
preparing a roll precursor comprising a carbon polymer material, wherein the roll precursor has a roll shape with a circumferential surface on which a pattern corresponding to the fine pattern is formed; and
carbonizing the roll precursor,
wherein the preparing of the roll precursor comprises:
injecting the carbon polymer material into an inner space of a cylindrical mold having an inner surface on which the pattern corresponding to the fine pattern is formed;
thermosetting the carbon polymer material; and
separating the carbon polymer material from the cylindrical mold.

7. A method of manufacturing a glassy carbon roll-type mold for forming a fine pattern having a micro and/or nano structure on a substrate, the method comprising:
preparing a roll precursor comprising a carbon polymer material, wherein the roll precursor has a roll shape with a circumferential surface on which a pattern corresponding to the fine pattern is formed; and
carbonizing the roll precursor,
wherein the preparing of the roll precursor comprises:
preparing a solid core precursor having a smooth non-patterned outer surface and a solid center portion;
coating the outer surface of the solid core precursor with a liquid carbon polymer material to form a coating layer; and
thermosetting the coating layer after wrapping a flexible pattern mold having a pattern corresponding to the fine pattern around the coating layer.

8. A method of manufacturing a glassy carbon roll-type mold for forming a fine pattern having a micro and/or nano structure on a substrate, the method comprising:
preparing a roll precursor comprising a carbon polymer material, wherein the roll precursor has a roll shape with a circumferential surface on which a pattern corresponding to the fine pattern is formed; and
carbonizing the roll precursor,
wherein the preparing of the roll precursor comprises:
preparing a hollow core precursor having a smooth non-patterned outer surface and an empty center portion;
coating the outer surface of the hollow core precursor with a liquid carbon polymer material to form a coating layer; and
thermosetting the coating layer after wrapping a flexible pattern mold having the pattern corresponding to the fine pattern around the coating layer.

9. The method of claim 8 , wherein the thermosetting of the coating layer comprises primarily incompletely hardening the coating layer at a first temperature after inserting a core mold for thermosetting into the hollow core precursor and secondarily completely hardening the coating layer at a temperature higher than the first temperature after separating the core mold from the hollow core precursor.

10. A method of manufacturing a glassy carbon roll-type mold for forming a fine pattern having a micro and/or nano structure on a substrate, the method comprising:
preparing a roll precursor comprising a carbon polymer material, wherein the roll precursor has a roll shape with a circumferential surface on which a pattern corresponding to the fine pattern is formed; and
carbonizing the roll precursor,
wherein the preparing of the roll precursor comprises:
coupling a flexible pattern mold having the pattern corresponding to the fine pattern to an inner surface of a cylindrical structure in a manner in which a patterned surface of the flexible pattern mold faces a center of the cylindrical structure;
coating the patterned surface with a liquid carbon polymer material while rotating the cylindrical structure; and
separating the coated carbon polymer material from the flexible pattern mold after thermosetting the coated carbon polymer material.

Assignees

• Univ Chung Ang Ind Acad Coop Found

Inventors

• Kim Seok Min
• Kim Jun
• Haq Muhammad Refatul
• Kim Young Kyu

Classifications

• C03C19/00 Primary

  Surface treatment of glass, not in the form of fibres or filaments, by mechanical means (sand-blasting, grinding, or polishing glass B24) · CPC title

• B21B27/021 Primary

  Rolls for sheets or strips · CPC title

• C03B23/0093 Primary

  Tools and machines specially adapted for re-forming shaped glass articles in general, e.g. chucks (C03B23/0086, C03B23/02, C03B23/04, C03B23/18 take precedence) · CPC title

• B21H8/02

  Rolls of special shape · CPC title

• Y02P40/57

  Improving the yield, e-g- reduction of reject rates · CPC title