Functional water producing apparatus and functional water producing method

Patent metadata

Field	Value
Publication number	US-10654014-B2
Application number	US-201715417957-A
Country	US
Kind code	B2
Filing date	Jan 27, 2017
Priority date	Jan 29, 2016
Publication date	May 19, 2020
Grant date	May 19, 2020

Abstract

A functional water producing apparatus in an embodiment includes: a water pressure regulator configured to regulate the water pressure of the ultrapure water, the water pressure regulator having a pressure regulating valve configured to regulate a water pressure of the ultrapure water to an almost constant pressure and a feed water pump configured to pressurize the ultrapure water; a dissolving device configured to dissolve functional gas imparting a specific function in the ultrapure water regulated the water pressure by the water pressure regulator; and a control device configured to control the feed water pump to regulate the water pressure of the functional water to a predetermined constant pressure based on a water pressure or a flow rate of the functional water flowing out of the dissolving device.

First claim

What is claimed is:

1. A functional water producing apparatus to produce functional water by using ultrapure water, the apparatus comprising:
a water pressure regulator configured to produce a pressure-regulated ultrapure water by regulating a water pressure of the ultrapure water,
the water pressure regulator having:
a pressure reducing valve configured to depressurize the ultrapure water to an almost constant pressure; and
a feed water pump configured to pressurize the ultrapure water depressurized by the pressure reducing valve;

dissolving device configured to dissolve functional gas imparting a specific function in the pressure-regulated ultrapure water and
a control device configured to control the feed water pump to pressurize the ultrapure water to a predetermined constant pressure based on a water pressure of the functional water or a flow rate of the functional water flowing out of the dissolving device.

2. The apparatus according to claim 1 ,
wherein the water pressure of the ultrapure water flowing out of the pressure reducing valve is lower by 20 kPa to 200 kPa than the water pressure of the ultrapure water supplied to the pressure reducing valve.

3. The apparatus according to claim 1 ,
wherein the water pressure of the ultrapure water supplied to the dissolving device is in a range from 235 kPa to 265 kPa.

4. The apparatus according to claim 1 ,
wherein the feed water pump is a centrifugal volute pump.

5. The apparatus according to claim 1 , further comprising:
a water pressure sensor configured to measure the water pressure of the functional water flowing out of the dissolving device and output a measured value,
wherein the control device controls the feed water pump based on the measured value so that the water pressure of the functional water is kept at the predetermined constant pressure.

6. The apparatus according to claim 1 ,
wherein the functional gas is hydrogen gas.

Assignees

• Nomura Micro Science Kk
• Acm Research Shanghai Inc

Inventors

• Jizaimaru Takayuki
• Wang David Hui

Classifications

• C02F2103/04

  for obtaining ultra-pure water · CPC title

• C02F1/68 Primary

  by addition of specified substances, e.g. trace elements, for ameliorating potable water (medicinal water A61K) · CPC title

• C11D7/04

  Water-soluble compounds · CPC title

• H10P72/0416

  with the semiconductor substrates being dipped in baths or vessels · CPC title

• B01F2215/004

  Operations & Transport · mapped topic