Member for solid-state image pickup device and method for manufacturing solid-state image pickup device

Patent metadata

Field	Value
Publication number	US-10651231-B2
Application number	US-201816204753-A
Country	US
Kind code	B2
Filing date	Nov 29, 2018
Priority date	Jul 9, 2010
Publication date	May 12, 2020
Grant date	May 12, 2020

Abstract

A member for a solid-state image pickup device having a bonding plane with no gaps and a method for manufacturing the same are provided. The manufacturing method includes the steps of providing a first substrate provided with a photoelectric converter on its primary face and a first wiring structure, providing a second substrate provided with a part of a peripheral circuit on its primary face and a second wiring structure, and performing bonding so that the first substrate, the first wiring structure, the second wiring structure, and the second substrate are disposed in this order. In addition, at least one of an upper face of the first wiring structure and an upper face of the second wiring structure has a concave portion, and a conductive material forms a bottom face of the concave portion.

First claim

The invention claimed is:

1. A method for manufacturing a device, comprising:
providing a first member which includes a first substrate and a first structure on the first substrate;
providing a second member which includes a second substrate and a second structure on the second substrate; and
bonding the first member and the second member so that the first structure and the second structure are disposed between the first substrate and the second substrate,
wherein the first structure includes a first insulating film having a groove, includes a first portion containing copper in the groove of the first insulating film and includes a first film of barrier metal between the first portion and the first insulating film, wherein the second structure includes a second insulating film having a groove, includes a second portion containing copper in the groove of the second insulating film and includes a second film of barrier metal between the second portion and the second insulating film,
wherein before the bonding, the first structure has a first face which is to face the second member in the bonding, the first face is formed by at least the first insulating film and the first portion, the first face has a first concave portion, at least a bottom of the first concave portion is formed by the first portion,
wherein before the bonding, the second structure has a second face which is to face the first member in the bonding, the second face is formed by at least the second insulating film and the second portion, the second face has a second concave portion, at least a bottom of the second concave portion is formed by the second portion,
wherein in the bonding, a heat treatment is performed,
wherein in the bonding, the first insulating film and the second insulating film are bonded together, and
wherein in the bonding, the first portion and the second portion are bonded together.

2. The method according to claim 1 , wherein in the bonding, a gap is formed between the first concave portion and the second concave portion whereas the first insulating film and the second insulating film are bonded together.

3. The method according to claim 1 , wherein a part of the second concave portion is formed by the second insulating film.

4. The method according to claim 1 , wherein an upper face of the second portion forms the second concave portion and has a concave shape.

5. The method according to claim 1 , wherein the first portion has a dual damascene structure and the second portion has a dual damascene structure.

6. The method according to claim 1 , wherein the first structure includes a first wire primarily composed of aluminum arranged between the first portion and the first substrate, and the second structure includes a second wire primarily composed of copper arranged between the second portion and the second substrate.

7. The method according to claim 1 , wherein the first insulating film includes a silicon oxide film and/or a silicon nitride film, the second insulating film includes a silicon oxide film and/or a silicon nitride film, the first film contains tantalum and/or titanium, and the second film contains tantalum and/or titanium.

8. The method according to claim 1 , wherein the first substrate includes a silicon semiconductor substrate, and the second substrate includes a silicon semiconductor substrate.

9. The method according to claim 1 , wherein the first substrate is provided with a first transistor, and the second substrate is provided with a second transistor.

10. The method according to claim 9 , wherein after the bonding, a thickness of the first substrate is reduced.

11. The method according to claim 10 , wherein after the bonding, an opening is formed in the first substrate.

12. The method according to claim 11 , wherein after the bonding, a thickness of the second substrate is reduced.

13. The method according to claim 9 , wherein the first substrate is provided with a photoelectric converter.

14. The method according to claim 1 , wherein for providing the first member with the first concave portion, a CMP treatment is performed on the first structure, and wherein for providing the second member with the second concave portion, a CMP treatment is performed on the second structure.

15. The method according to claim 1 , wherein for providing the first member with the first concave portion, a wet etching or a dry etching is performed on the first structure, and wherein for providing the second member with the second concave portion, a wet etching or a dry etching is performed on the second structure.

16. The method according to claim 1 , wherein before the bonding, a plasma irradiation is performed on the second face of the second structure.

17. The method according to claim 16 , wherein the plasma irradiation is performed in a gas atmosphere of nitrogen.

18. The method according to claim 1 , wherein before the bonding, a chemical treatment is performed on the second face of the second structure.

19. The method according to claim 1 , wherein by the heat treatment, a difference in thermal expansion between copper of the first portion and the first insulating film and a difference in thermal expansion between copper of the second portion and the second insulating film are caused.

20. The method according to claim 19 , wherein the bonding is performed in a vacuum or an inert gas atmosphere.

Assignees

• Canon Kk

Inventors

• Endo Nobuyuki
• Itano Tetsuya
• Yamazaki Kazuo
• Watanabe Kyouhei
• Iwata Junji

Classifications

• H01L27/14636

  Electricity · mapped topic

• H01L31/04

  Electricity · mapped topic

• H01L27/1464

  Electricity · mapped topic

• H01L27/14687

  Electricity · mapped topic

• H01L2224/05655

  Electricity · mapped topic