Solid-state imaging device and electronic apparatus

Patent metadata

Field	Value
Publication number	US-10651222-B2
Application number	US-201716084602-A
Country	US
Kind code	B2
Filing date	Jan 18, 2017
Priority date	Mar 23, 2016
Publication date	May 12, 2020
Grant date	May 12, 2020

Abstract

A solid-state imaging device according to the present disclosure includes: a photoelectric conversion film that is provided outside a semiconductor substrate on a pixel-by-pixel basis, performs photoelectric conversion on light having a predetermined wavelength range, and transmits light having wavelength ranges other than the predetermined wavelength range; and a photoelectric conversion region that is provided inside the semiconductor substrate on a pixel-by-pixel basis and performs photoelectric conversion on the light having the wavelength ranges, the light having the wavelength ranges having passed through the photoelectric conversion film. The photoelectric conversion film includes a film having an avalanche function.

First claim

The invention claimed is:

1. A solid-state imaging device, comprising:
a photoelectric conversion film above a semiconductor substrate, wherein the photoelectric conversion film is configured to:
perform photoelectric conversion on light having a first wavelength range; and
transmit light having a second wavelength range different from the first wavelength range;

a color filter between the photoelectric conversion film and the semiconductor substrate; and
a photoelectric conversion region inside the semiconductor substrate, wherein
the photoelectric conversion region is configured to perform photoelectric conversion on the light having the second wavelength range,
the light having the second wavelength range passes through the photoelectric conversion film, and
the photoelectric conversion film has an avalanche function.

2. The solid-state imaging device according to claim 1 , wherein the photoelectric conversion film is an organic film that includes an organic material.

3. The solid-state imaging device according to claim 1 , wherein the photoelectric conversion film is an inorganic film that includes an inorganic material.

4. The solid-state imaging device according to claim 1 , wherein the photoelectric conversion film has a function of accumulating charge obtained by the photoelectric conversion on the light having the first wavelength range.

5. The solid-state imaging device according to claim 1 , wherein
the photoelectric conversion film includes laminated photoelectric conversion films corresponding to two colors, and
each of the photoelectric conversion films corresponding to the two colors includes a film having the avalanche function.

6. The solid-state imaging device according to claim 5 , wherein each of the photoelectric conversion films corresponding to the two colors is an organic film that includes an organic material.

7. The solid-state imaging device according to claim 5 , wherein each of the photoelectric conversion films corresponding to the two colors is an inorganic film that includes an inorganic material.

8. The solid-state imaging device according to claim 5 , wherein
a first photoelectric conversion film of the photoelectric conversion films is on an incident light side of the solid-state imaging device,
the first photoelectric conversion film is configured to perform photoelectric conversion on blue light,
a second photoelectric conversion film of the photoelectric conversion films is on a semiconductor substrate side of the solid-state imaging device,
the second photoelectric conversion film is configured to perform photoelectric conversion on green light, and
the photoelectric conversion region inside the semiconductor substrate is further configured to perform photoelectric conversion on red light.

9. The solid-state imaging device according to claim 1 , wherein the photoelectric conversion region inside the semiconductor substrate corresponds to at least one color.

10. The solid-state imaging device according to claim 9 , further comprising a complementary color filter on an incident light side of the photoelectric conversion film.

11. An electronic apparatus, comprising:
a solid-state imaging device that includes:
a photoelectric conversion film above a semiconductor substrate, wherein the photoelectric conversion film is configured to:
perform photoelectric conversion on light having a first wavelength range; and
transmit light having a second wavelength range different from the first wavelength range;

a color filter between the photoelectric conversion film and the semiconductor substrate; and
a photoelectric conversion region inside the semiconductor substrate, wherein
the photoelectric conversion region is configured to perform photoelectric conversion on the light having the second wavelength range,
the light having the second wavelength range passes through the photoelectric conversion film, and
the photoelectric conversion film has an avalanche function.

12. The electronic apparatus according to claim 11 , wherein the photoelectric conversion film is an organic film that includes an organic material.

13. The electronic apparatus according to claim 11 , wherein the photoelectric conversion film is an inorganic film that includes an inorganic material.

14. The electronic apparatus according to claim 11 , wherein the photoelectric conversion film has a function of accumulating charge obtained by the photoelectric conversion on the light having the first wavelength range.

15. The electronic apparatus according to claim 11 , wherein
the photoelectric conversion film includes laminated photoelectric conversion films corresponding to two colors, and
each of the photoelectric conversion films corresponding to the two colors includes a film having the avalanche function.

16. The electronic apparatus according to claim 15 , wherein each of the photoelectric conversion films corresponding to the two colors is an organic film that includes an organic material.

17. The electronic apparatus according to claim 15 , wherein each of the photoelectric conversion films corresponding to the two colors is an inorganic film that includes an inorganic material.

18. The electronic apparatus according to claim 15 , wherein
a first photoelectric conversion film of the photoelectric conversion films is on an incident light side of the solid-state imaging device,
the first photoelectric conversion film is configured to perform photoelectric conversion on blue light,
a second photoelectric conversion film of the photoelectric conversion films is on a semiconductor substrate side of the solid-state imaging device,
the second photoelectric conversion film is configured to perform photoelectric conversion on green light, and
the photoelectric conversion region inside the semiconductor substrate is further configured to perform photoelectric conversion on red light.

19. The electronic apparatus according to claim 11 , wherein the photoelectric conversion region inside the semiconductor substrate corresponds to at least one color.

20. The electronic apparatus according to claim 19 , wherein the solid-state imaging device further includes a complementary color filter on an incident light side of the photoelectric conversion film.

Assignees

• Sony Corp

Inventors

• Kato Nanako
• Wakano Toshifumi
• Otake Yusuke

Classifications

• H01L27/14687

  Electricity · mapped topic

• H01L27/14638

  Electricity · mapped topic

• H01L27/14621

  Electricity · mapped topic

• H01L31/107

  Electricity · mapped topic

• H01L27/307

  Electricity · mapped topic