Image sensor for obtaining information relating to the phase of a light wave

Patent metadata

Field	Value
Publication number	US-10651221-B2
Application number	US-201816222061-A
Country	US
Kind code	B2
Filing date	Dec 17, 2018
Priority date	Dec 19, 2017
Publication date	May 12, 2020
Grant date	May 12, 2020

Abstract

An object of the invention is an image sensor comprising a matrix of pixels, extending along a detection plane, and configured to form an image of an incident light wave propagating in a spectral band along a propagation axis, the image sensor being characterized in that it comprises a mask, formed by opaque elementary masks, extending parallel to the detection plane, between which there extend openings through which the incident light wave can propagate toward the detection plane, the matrix of pixels being divided into:
open pixels extending facing the openings; masked pixels, each masked pixel being defined by a projection of an elementary mask along the axis of propagation on the matrix of pixels, each masked pixel being associated with the elementary mask facing it;

the image sensor comprising, between the open pixels and the openings:
a waveguide, extending facing masked pixels and open pixels; a first diffraction grating, extending facing at least one open pixel, and configured to couple part of the incident light wave into the waveguide; a second diffraction grating, extending facing a masked pixel, and configured to extract part of a guided wave propagating in the waveguide.

First claim

The invention claimed is:

1. An image sensor comprising a matrix of pixels, extending along a detection plane, and configured to form an image of an incident light wave propagating, in a spectral band, along a propagation axis, the image sensor comprising a mask, formed by opaque elementary masks, extending parallel to the detection plane, between which there extend openings through which the incident light wave can propagate toward the detection plane, the matrix of pixels being divided into:
open pixels extending facing the openings;
masked pixels, each masked pixel being defined by a projection of an elementary mask along the axis of propagation on the matrix of pixels, each masked pixel being associated with the elementary mask facing it;

the image sensor comprising, between the open pixels and the openings:
a waveguide, forming a strip extending facing masked pixels and open pixels;
a first diffraction grating, extending facing at least one open pixel, and configured to couple part of the incident light wave into the waveguide, so as to form a guided wave;
the first diffraction grating being configured to transmit another part of the incident light wave toward the open pixel;
the first diffraction grating being associated with the open pixel;
a second diffraction grating, extending facing a masked pixel, and configured to extract part of the guided wave propagating in the waveguide, so as to form an extracted wave, so that the extracted wave propagates toward the masked pixel; the second diffraction grating being associated with the masked pixel.

2. The image sensor as claimed in claim 1 , wherein:
a masked pixel extends between two open pixels which are adjacent to it, each open pixel being associated with a first diffraction grating;
the waveguide extends facing two open pixels and facing the masked pixel;
the masked pixel is associated with a second diffraction grating, so as to extract light waves guided in the waveguide, resulting, respectively, from a coupling of the incident light wave by the first diffraction grating associated with each open pixel adjacent to the masked pixel.

3. The image sensor as claimed in claim 2 , wherein the masked pixel and the open pixels adjacent to it are arranged along a same row or along a same column of the matrix of pixels.

4. The image sensor as claimed in claim 1 , wherein:
a masked pixel extends between two open pixels, which are adjacent to it, along a row of the matrix of pixels, each open pixel being associated with a first diffraction grating;
the waveguide extends facing the two open pixels and facing the masked pixel, parallel to the row, forming a longitudinal waveguide, each first diffraction grating associated with the open pixels of the row being configured to couple part of the incident light wave into the longitudinal waveguide, thereby forming guided light waves propagating into the longitudinal waveguide;
the masked pixel is associated with a second diffraction grating, the second diffraction grating being configured to extract part of the guided light waves propagating into the longitudinal waveguide, thereby forming a light wave extracted from the longitudinal waveguide, so that part of the light wave extracted from the longitudinal waveguide is detected by the masked pixel;
the masked pixel extends between two open pixels, which are adjacent to it, along a column of the matrix of pixels, said open pixels of the column being associated with a first diffraction grating;
the sensor comprises a lateral waveguide extending parallel to the column, facing the two open pixels of the column and facing the masked pixel, each first diffraction grating associated with the open pixels of the column being configured to couple part of the incident light wave into the lateral waveguide, thereby forming guided light waves propagating into the lateral waveguide;
the second diffraction grating is configured extract part of the guided light waves propagating into the lateral waveguide, thereby forming a light wave extracted from the lateral waveguide, so that part of the light wave extracted from the lateral waveguide is detected by the masked pixel.

5. The image sensor as claimed in claim 1 , wherein
the first diffraction grating is formed by a first thin layer, extending parallel to the waveguide, the first thin layer being formed from a first material, the first thin layer comprising inclusions of a first auxiliary material, the respective refractive indices of the first material and of the first auxiliary material being different, the first material and the first auxiliary material being transparent in part or all of the spectral band;
the second diffraction grating is formed by a second thin layer, extending parallel to the waveguide, the second thin layer being formed from a second material, the second thin layer comprising inclusions of a second auxiliary material, the respective refractive indices of the second material and of the second auxiliary material being different.

6. The image sensor as claimed in claim 5 , wherein the first material and the second material are the same material.

7. The image sensor as claimed in claim 5 , wherein the second auxiliary material is a metal.

8. The image sensor as claimed in claim 1 , wherein the first diffraction grating and the second diffraction grating extend along the same plane.

9. The image sensor as claimed in claim 1 , wherein the first diffraction grating and the second diffraction grating extend parallel to the matrix of pixels.

10. The image sensor as claimed in claim 1 , in which at least one elementary mask comprises a reflective face, facing a masked pixel associated with the elementary mask, so as to reflect part of the light wave extracted from the waveguide, extending facing the masked pixel, toward the latter.

11. A device for observing a sample, comprising:
a light source configured to emit an illuminating light wave in a spectral band, the illuminating light wave propagating along a propagation axis, toward the sample;
an image sensor;
a holder configured to receive the sample, so that the sample extends between the light source and the sample, the image sensor being configured to detect an incident light wave propagating between the sample and the sensor when the sample is illuminated by the illuminating light wave;

the image sensor being a sensor as claimed in claim 1 .

12. A method for determining an intensity and a phase of a light wave, using an image sensor as claimed in claim 1 , the image sensor being such that:
a masked pixel extends along a row or a column between two open pixels;
the waveguide extends facing the open pixels and facing the masked pixel, along the row or along the column;
each of the open pixels is associated with a first diffraction grating;
the masked pixel is associated with a second diffraction grating;

the method comprising:
a) illuminating the sensor in such a way that an incident light wave propagates toward each open pixel;
b) coupling part of the incident light wave, by means of the first diffraction grating extending facing each open pixel, in such a way that:
at the first diffraction grating, a confined light wave propagating in the waveguide is formed;
a transmitted light wave is transmitted to the open pixel associated with the first diffraction grating;

c) extracting, by means of the second diffraction grating, part of each confined light wave propagating in the waveguide, so as to form an extracted light wave;
d) detecting part of the extracted light wave by the masked pixel;
e) obtaining, on the basis of an intensity of the extracted light wave, information rel

Assignees

• Commissariat Energie Atomique

Inventors

• Benahmed Selimen
• Boutami Salim
• Cioni Olivier

Classifications

• G01N33/4833

  of solid biological material, e.g. tissue samples, cell cultures (tissue in vivo A61B5/00; cell suspensions G01N33/48735) · CPC title

• G01N21/4788

  Diffraction (for sizing particles G01N15/0205) · CPC title

• G01N15/1456

  without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals · CPC title

• G01N2015/1006

  for cytology · CPC title

• G01N2015/1454

  using phase shift or interference, e.g. for improving contrast · CPC title