Metal mirror based multispectral filter array

Patent metadata

Field	Value
Publication number	US-10651216-B2
Application number	US-201815922415-A
Country	US
Kind code	B2
Filing date	Mar 15, 2018
Priority date	Dec 29, 2015
Publication date	May 12, 2020
Grant date	May 12, 2020

Abstract

A device may include a multispectral filter array disposed on the substrate. The multi spectral filter array may include a first metal mirror disposed on the substrate. The multi spectral filter may include a spacer disposed on the first metal mirror. The spacer may include a set of layers. The spacer may include a second metal mirror disposed on the spacer. The second metal mirror may be aligned with two or more sensor elements of a set of sensor elements.

First claim

What is claimed is:

1. A device, comprising:
a set of optical sensors associated with a substrate; and
a multispectral filter array deposited on the substrate,
the multispectral filter array including:
a first silver (Ag) metal mirror,
a second silver (Ag) metal mirror, and
a plurality of spacer layers disposed between the first silver (Ag) metal mirror and the second silver (Ag) metal mirror.

2. The device of claim 1 , where the set of optical sensors are embedded into the substrate.

3. The device of claim 1 , where the set of optical sensors are associated with receiving a portion of light from a light source.

4. The device of claim 1 , where the set of optical sensors is aback illuminated sensor array.

5. The device of claim 1 , where the plurality of spacer layers comprise a material selected to reduce an angle shift of light directed from a light source toward the set of optical sensors.

6. The device of claim 1 , where the set of optical sensors are a plurality of optical sensors of a super array.

7. The device of claim 1 , where the substrate includes a silicon-based substrate.

8. The device of claim 1 , where the set of optical sensors are disposed in a silicon-based wafer.

9. The device of claim 8 ,
where the substrate includes a glass-based substrate, and
where the silicon-based wafer is bonded to the glass-based substrate.

10. The device of claim 1 , where the substrate includes one or more conductive pathways to provide information obtained by the set of optical sensors.

11. A device, comprising:
one or more sensor elements embedded into a substrate; and
a multispectral filter array deposited on the substrate,
the multispectral filter array including:
a first metal mirror,
a second metal mirror, and
a plurality of spacer layers.

12. The device of claim 11 ,
where the first metal mirror is a first silver (Ag) metal mirror, and
where the second metal mirror is a second silver (Ag) metal mirror.

13. The device of claim 11 , where the plurality of spacer layers are disposed between the first metal mirror and the second metal mirror.

14. The device of claim 11 , where the plurality of spacer layers are disposed on at least the first metal mirror.

15. The device of claim 11 , where the first metal mirror includes a silver (Ag) metal mirror.

16. The device of claim 11 , further comprising:
an intermediate layer between the substrate and the first metal mirror.

17. The device of claim 11 , where the one or more sensor elements include a plurality of sensor elements.

18. The device of claim 17 , where the plurality of spacer layers include:
a first spacer layer that covers all of the plurality of sensor elements; and
a second spacer layer that covers at least a half of the plurality of sensor elements and less than all of the plurality of sensor elements.

19. The device of claim 18 , where the plurality of spacer layers further include:
a third spacer layer that covers less than the half of the plurality of sensor elements.

20. The device of claim 11 , further comprising:
an anti-reflective coating filter that is deposited on top of a top metal mirror of the one or more metal mirrors.

Assignees

• Viavi Solutions Inc

Inventors

• Ockenfuss Georg J

Classifications

• G01J3/513

  having fixed filter-detector pairs · CPC title

• G02B5/201 Primary

  in the form of arrays · CPC title

• G01J2003/2806

  Array and filter array · CPC title

• G01J3/26

  using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters · CPC title

• G01J3/2803

  using photoelectric array detector · CPC title