Capacitors and radio frequency generators and other devices using them

Patent metadata

Field	Value
Publication number	US-10651020-B2
Application number	US-201715715523-A
Country	US
Kind code	B2
Filing date	Sep 26, 2017
Priority date	Sep 27, 2016
Publication date	May 12, 2020
Grant date	May 12, 2020

Abstract

Certain configurations of a stable capacitor are described which comprise electrodes produced from materials comprising a selected coefficient of thermal expansion to enhance stability. The electrodes can be spaced from each other through one of more dielectric layers or portions thereof. In some instances, the electrodes comprise integral materials and do not include any thin films. The capacitors can be used, for example, in feedback circuits, radio frequency generators and other devices used with mass filters and/or mass spectrometry devices.

First claim

The invention claimed is:

1. A mass filter comprising:
a multipole assembly comprising a first pole, a second pole, a third pole and a fourth pole;
a radio frequency generator electrically coupled to each of the first pole, the second pole, the third pole and the fourth pole of the multipole assembly to provide a radio frequency voltage to each of the first pole, the second pole, the third pole and the fourth pole, the radio frequency generator comprising a feedback circuit comprising a capacitor, in which the capacitor comprises:
a first dielectric layer comprising a coefficient of thermal expansion of 15 ppm/deg. Celsius or less;
a first electrode layer comprising an integral, solid material, wherein the first electrode layer comprises a coefficient of thermal expansion of 15 ppm/deg. Celsius or less;
a second dielectric layer, in which the first electrode layer is positioned between the first dielectric layer and the second dielectric layer, wherein the second dielectric layer comprises a coefficient of thermal expansion of 15 ppm/deg. Celsius or less;
a second electrode layer spatially separated from the first electrode layer through the second dielectric layer and comprising an integral, solid material, wherein the second electrode layer comprises a coefficient of thermal expansion of 15 ppm/deg. Celsius or less;
a third dielectric layer, in which the second electrode layer is positioned between the second dielectric layer and the third dielectric layer, and wherein a coefficient of thermal expansion of the third dielectric layer is 15 ppm/deg, Celsius or less;
a third electrode layer spatially separated from the second electrode layer through the third dielectric layer and comprising an integral, solid material, wherein the third electrode layer comprises a coefficient of thermal expansion of 15 ppm/deg. Celsius or less;
a fourth dielectric layer, in which the third electrode layer is positioned between the third dielectric layer and the second dielectric layer, and wherein a coefficient of thermal expansion of the fourth dielectric layer is 15 ppm/deg. Celsius or less;
a fourth electrode layer spatially separated from the third electrode layer through the fourth dielectric layer and comprising an integral, solid material, wherein the fourth electrode layer comprises a coefficient of thermal expansion of 15 ppm/deg. Celsius or less;
a fifth dielectric layer, in which the fourth electrode layer is positioned between the fourth dielectric layer and the fifth dielectric layer, and wherein a coefficient of thermal expansion of the fifth dielectric layer is 15 ppm/deg. Celsius or less;
wherein the first, second, third and fourth electrode layers are mechanically held against and between adjacent dielectric layers, wherein the first electrode layer and the fourth electrode layer are positioned to shield the second electrode layer and the third electrode layer from stray capacitive energy, wherein the adjacent dielectric layers are coupled to each other at outer edges, using an epoxy material comprising a coefficient of thermal expansion of 15 ppm/deg. Celsius or less, to hold the capacitor together, and wherein electrode terminals for each of the second electrode layer and the third electrode layer are present on a first side of the capacitor to electrically couple the second electrode layer and the third electrode layer to the feedback circuit through the terminals on the first side of the capacitor, and wherein electrode terminals for each of the first electrode layer and the fourth electrode layer are present on the second side of the capacitor to electrically couple the first electrode layer and the fourth electrode layer to the feedback circuit through the terminals on the second side of the capacitor.

2. The mass filter of claim 1 , in which the integral solid material of the first electrode is different from the integral solid material of the second electrode.

3. The mass filter of claim 1 , in which the first electrode layer is positioned between the first and second dielectric layers without an adhesive between the first and second dielectric layers.

4. The mass filter of claim 3 , in which the second electrode layer is positioned between the second and third dielectric layers without an adhesive between the second and third dielectric layers.

5. The mass filter of claim 1 , in which the integral solid material of each of the first electrode layer and the second electrode layer each comprises a metal alloy.

6. The mass filter of claim 5 , in which the metal alloy comprises a coefficient of thermal expansion of 5 ppm/deg. Celsius or less.

7. The mass filter of claim 6 , in which a dielectric material in at least one of the first dielectric layer, the second dielectric layer and the third dielectric layer is different from a dielectric material in one of the other dielectric layers.

8. The mass filter of claim 6 , in which the first dielectric layer and the second dielectric layer comprise the same dielectric material.

9. The mass filter of claim 6 , in which the first dielectric layer, the second dielectric layer and the third dielectric layer comprise the same dielectric material.

10. The mass filter of claim 9 , in which the dielectric material of the first dielectric layer, the second dielectric layer and the third dielectric layer comprises quartz comprising a coefficient of thermal expansion of 5 ppm/deg. Celsius or less.

11. The mass filter of claim 1 , in which the first electrode layer and the second electrode layer are constructed and arranged without any films.

12. The mass filter of claim 1 , in which at least one edge of the first dielectric layer is fused to an edge of the second dielectric layer to retain the first electrode layer between the first dielectric layer and the second dielectric layer.

13. The mass filter of claim 12 , in which at least one edge of the second dielectric layer is fused to an edge of the third dielectric layer to retain the second electrode between the second dielectric layer and the third dielectric layer.

14. The mass filter of claim 1 , further comprising an aperture in the integral, solid material of the first electrode layer.

15. The mass filter of claim 14 , further comprising an aperture in the integral, solid material of the second electrode layer.

16. The mass filter of claim 1 , in which the coefficient of thermal expansion of the second dielectric layer is about the same as the coefficient of thermal expansion of the integral, solid material of the first electrode layer and the same as the coefficient of thermal expansion of the integral, solid material of the second electrode layer.

17. The mass filter of claim 1 , wherein the coefficient of thermal expansion of each of the first dielectric layer, the first electrode layer, the second dielectric layer, the second electrode layer, the third dielectric layer, the third electrode layer, the fourth dielectric layer, the fourth electrode layer and the fifth dielectric layer are about the same, and wherein the first electrode layer and the fourth electrode layer are configured to shield the second electrode layer and the third electrode layer when a voltage is provided to the first electrode layer and the fourth electrode layer.

Assignees

• Perkinelmer Health Sciences Canada Inc

Inventors

• Cheung Tak Shun
• Wong Chui Ha Cindy

Classifications

• H01G4/30

  Stacked capacitors (H01G4/33 takes precedence) · CPC title

• H01G4/012

  Form of non-self-supporting electrodes · CPC title

• H01J49/421

  Mass filters, i.e. deviating unwanted ions without trapping · CPC title

• H01J1/02

  Main electrodes · CPC title

• H01J49/022 Primary

  Circuit arrangements, e.g. for generating deviation currents or voltages (regulating electric or magnetic variables in general, e.g. current, magnetic field G05F); Components associated with high voltage supply (high voltage supply per se H02M) · CPC title