Multi-function semiconductor and electronics processing

Patent metadata

Field	Value
Publication number	US-10649241-B2
Application number	US-201815934714-A
Country	US
Kind code	B2
Filing date	Mar 23, 2018
Priority date	Sep 29, 2016
Publication date	May 12, 2020
Grant date	May 12, 2020

Abstract

A method of tailoring beam characteristics of a laser beam during fabrication of an electronic device. The method includes: providing a substrate comprising one or more layers; adjusting one or more characteristics of a laser beam; and impinging the laser beam having the adjusted beam characteristics on the substrate to carry out at least one process step for fabricating the electronic device. The adjusting of the laser beam comprises: perturbing the laser beam propagating within a first length of fiber to adjust the one or more beam characteristics of the laser beam in the first length of fiber or a second length of fiber or a combination thereof, the second length of fiber having two or more confinement regions; coupling the perturbed laser beam into the second length of fiber; and emitting the laser beam having the adjusted beam characteristics from the second length of fiber.

First claim

We claim:

1. A method of tailoring beam characteristics of a laser beam during fabrication of an electronic device, the method comprising:
providing a substrate comprising one or more layers;
adjusting one or more characteristics of the laser beam; and
impinging the laser beam having the adjusted beam characteristics on the substrate to carry out at least one process step for fabricating the electronic device,
the adjusting of the laser beam comprising:
perturbing the laser beam propagating within a first length of fiber to adjust the one or more beam characteristics of the laser beam in the first length of fiber or a second length of fiber or a combination thereof, the second length of fiber having two or more confinement regions;
coupling the perturbed laser beam into the second length of fiber; and
emitting the laser beam having the adjusted beam characteristics from the second length of fiber.

2. The method of claim 1 , wherein the one or more layers comprise materials chosen from electrical conductors, electrical insulators, semiconductors, and combinations thereof.

3. The method of claim 1 , wherein the at least one process step comprises removing a portion of the one or more layers.

4. The method of claim 1 , wherein the at least one process step comprises drilling a first via in the one or more layers.

5. The method of claim 4 , wherein the one or more layers comprise a first layer and a second layer, the second layer comprising a different material than the first layer.

6. The method of claim 5 , wherein the at least one process step comprises removing a portion of the first layer and then removing a portion of the second layer, the laser beam having a first set of beam characteristics during the removing of the portion of the first layer and a second set of beam characteristics during the removing of the portion of the second layer, the second set of beam characteristics being different than the first set of beam characteristics.

7. The method of claim 5 , wherein the at least one process step comprises removing a portion of the first layer and employing the second layer as a stop layer, the adjusting of the one or more characteristics improving a laser beam selectivity for removing the portion of the first layer from the second layer compared to the laser beam selectivity prior to the adjusting of the one or more characteristics.

8. The method of claim 4 , further comprising drilling a second via, the first via having a first diameter and the second via having a second diameter that is different than the first diameter.

9. The method of claim 8 , wherein the laser beam has a first set of beam characteristics during the drilling of the first via and a second set of beam characteristics during the drilling of the second via, the second set of beam characteristics being different than the first set of beam characteristics.

10. The method of claim 4 , wherein the drilling the first via comprises trepanning, the trepanning comprises drilling a hole having a first width in at least one of the one or more layers and then expanding the hole to have a second width that is larger than the first width by moving the laser beam relative to the substrate.

11. The method of claim 10 , wherein the laser beam has a first set of beam characteristics during the drilling of the hole and a second set of beam characteristics during the expanding the hole, the second set of beam characteristics being different than the first set of beam characteristics.

12. The method of claim 1 , wherein the at least one process step comprises scribing the substrate to have a scribe line.

13. The method of claim 12 , wherein adjusting the one or more beam characteristics adjusts a width of the scribe line.

14. The method of claim 1 , wherein the at least one process step comprises annealing at least one of the one or more layers.

15. The method of claim 1 , wherein the adjusting the laser beam is carried out while the laser beam impinges on the substrate.

16. The method of claim 1 , wherein adjusting the one or more beam characteristics of the laser beam comprises adjusting one or more of a beam diameter, divergence distribution, beam parameter product (BPP), intensity distribution, M2 value, numerical aperture (NA), optical intensity, power density, radial beam position, radiance or spot size, or any combination thereof.

17. The method of claim 1 , wherein the adjusting the one or more beam characteristics is carried out without using free-space optics.

18. The method of claim 1 , wherein the adjusting the one or more beam characteristics of the laser beam comprises adjusting a beam parameter product of the laser beam.

19. The method of claim 1 , wherein the adjusting the one or more beam characteristics of the laser beam comprises adjusting one or more of a divergence distribution or an intensity distribution, or a combination thereof.

20. The method of claim 1 , wherein the electronic device is an integrated circuit, a semiconductor device, a microcircuit, a printed circuit board, a flex circuit, a micromachine, a display screen or a photovoltaic cell.

21. The method of claim 1 , wherein the at least one process step comprises selectively depositing a layer onto the substrate.

22. The method of claim 1 , wherein the at least one process step comprises soldering.

23. The method of claim 1 , wherein the at least one process step comprises welding.

24. The method of claim 1 , wherein coupling the perturbed laser beam into the second length of fiber further comprises launching the perturbed laser beam into at least one of the two or more confinement regions of the second length of fiber at a transition between the first length of fiber and the second length of fiber.

Assignees

• Nlight Inc

Inventors

• Hemenway David Martin
• Gross Ken
• Kliner Dahv A V
• Farrow Roger

Classifications

• G02B6/262

  Optical details of coupling light into, or out of, or between fibre ends, e.g. special fibre end shapes or associated optical elements · CPC title

• B23K1/0016

  Soldering of electronic components · CPC title

• G02B27/0927

  Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat · CPC title

• B23K26/0736

  into an oval shape, e.g. elliptic shape · CPC title

• G02B6/0281

  Graded index region forming part of the central core segment, e.g. alpha profile, triangular, trapezoidal core (G02B6/0288, G02B6/0286 take precedence) · CPC title