Electrolyte, method of forming a copper layer and method of forming a chip

Patent metadata

Field	Value
Publication number	US-10648096-B2
Application number	US-201514948463-A
Country	US
Kind code	B2
Filing date	Nov 23, 2015
Priority date	Dec 12, 2014
Publication date	May 12, 2020
Grant date	May 12, 2020

Abstract

An electrolyte may be provided. The electrolyte may include at least one additive configured to decompose or evaporate at a temperature above approximately 100° C., and a water soluble metal salt, and the electrolyte may be free from carbon nanotubes. In various embodiments, a method of forming a metal layer may be provided: The method may include depositing a metal layer on a carrier using an electrolyte, wherein the electrolyte may include at least one additive configured to decompose or evaporate at a temperature above approximately 100° C. and a water soluble metal salt, wherein the electrolyte is free from carbon nanotubes; and annealing the metal layer to form a metal layer comprising a plurality of pores. In various embodiments, a semiconductor device may be provided. The semiconductor device may include a metal layer including a plurality of pores, wherein the plurality of pores may be formed in the metal layer as remnants of an additive having resided in the plurality of pores and having at least partially decomposed or evaporated. To keep a high elasticity over a wide temperature range (up to 450° C.), an adhesion layer may stabilize the metal grain boundaries and may fix dislocation gliding inside metal grains. In various embodiments, a metal layer is provided. The metal layer may include a plurality of pores having ellipsoidal or spheroidal shape.

First claim

What is claimed is:

1. A method of forming a metal layer, comprising:
depositing a metal layer over a carrier using an electrolyte, wherein the electrolyte comprises an additive and a water soluble metal salt, wherein the electrolyte is free from carbon nanotubes, wherein the electrolyte has a pH value in the range from 1.0 to 2.5, and wherein the additive is configured to decompose or evaporate at a temperature above approximately 100° C.; and
forming a plurality of pores in the deposited metal layer by annealing the deposited metal layer to form a continuous metal layer comprising the plurality of formed pores.

2. The method of claim 1 ,
wherein the metal of the metal layer and of the metal salt includes or consists of at least one metal of a group of metals consisting of copper (Cu), gold (Au), silver (Ag), platinum (Pt), palladium (Pd), nickel (Ni), and tin (Sn).

3. The method of claim 1 ,
wherein the annealing comprises heating the metal layer to a temperature above about 150° C.

4. The method of claim 1 , further comprising:
forming a patterned mask on the carrier.

5. The method of claim 1 ,
wherein the carrier comprises semiconductor material.

6. A method of forming a semiconductor device, comprising:
forming an adhesion layer over a carrier;
depositing a metal layer over the adhesion layer using an electrolyte, wherein the electrolyte comprises an additive and a water soluble metal salt, and wherein the additive is configured to decompose or evaporate at a temperature above approximately 100° C., wherein the electrolyte is free from carbon nanotubes, and wherein the electrolyte has a pH value in the range from 1.0 to 2.7; and
forming a plurality of pores in the metal layer by annealing the metal layer to form a continuous metal layer comprising the plurality of formed pores and doping metal atoms out of the adhesion layer.

7. The method of claim 6 , further comprising:
depositing a seed layer on the adhesion layer before depositing the metal layer.

8. The method of claim 1 , wherein
a volume density of the plurality of pores is in a range from about 1% to about 50%.

9. The method of claim 1 , comprising
depositing an adhesion layer over the carrier before depositing the metal layer.

10. The method of claim 9 , wherein
the adhesion layer includes of one or more metal(s) of a group of metals consisting of aluminum, titanium, zinc, tin, nickel, silver, gold, molybdenum and lead.

11. The method of claim 5 , wherein the carrier includes one or more components of a power semiconductor device.

12. The method of claim 11 , wherein
the power semiconductor device includes a power diode, a thyristor, a power MOSFET, an IGBT, and/or a microelectromechanical system (MEMS).

13. The method of claim 1 , wherein one or more of the plurality of pores are closed-pores.

14. The method of claim 1 , wherein one or more of the plurality of pores are open-pores.

15. The method of claim 1 , wherein one or more of the plurality of pores have a spheroidal or ellipsoidal shape.

16. The method of claim 1 , wherein one or more of the plurality of pores have a concave and/or a convex wall structure.

17. The method of claim 1 , wherein during the annealing, the additive decomposes to form one or more gaseous decomposition products, wherein the one or more decomposition products cause the formation of pores during the annealing.

18. The method of claim 17 , wherein the one or more decomposition products comprise carbon dioxide, acetone, and/or acetic acid.

19. The method of claim 9 , wherein the adhesion layer is formed directly on the carrier, the carrier comprising semiconductor material.

20. The method of claim 1 , wherein the continuous metal layer comprising a bottom surface facing the carrier and an integral and continuous top surface opposite to the bottom surface.

Assignees

• Infineon Technologies Ag

Inventors

• Robl Werner
• Melzl Michael
• Schneegans Manfred
• Weidgans Bernhard
• Haering Franziska

Classifications

• C25D3/38 Primary

  of copper · CPC title

• C25D15/00

  Electrolytic or electrophoretic production of coatings containing embedded materials, e.g. particles, whiskers, wires · CPC title

• C25D3/48

  of gold · CPC title

• C25D5/50

  by heat-treatment · CPC title

• C25D3/12

  of nickel or cobalt · CPC title